KX
Type: Sputter Chamber show more
ObjectId: 10
Created: 1/23/2024 12:30:49 PM by Savan Alan [alans327@gmail.com]
Updated: 12/15/2025 2:19:12 PM by Dudarev Victor gmail [vic.dudarev@gmail.com]
Access: Public Sort Code (asc): 0
License: CC BY 4.0
Description: Model: ATC2200 SP-DN ORION, Serial Number: 18424. Location: ZGH Clean Room. PSU: HiPIMS - 2 items, DC - 3 items, RF - 3 items. DC ion source. Substrate bias (DC/RF). Interchangeable 1 - DC; 2 - DC; 3 - pulse DC; 4 - RF; 5 - RF; 6 - RF; 7 - HiPIMS 1; 8 -HiPIMS 2; bias - RF/DC; GLAD - For K9: 1 - DC; 2 - DC; 3 - RF; 4 - ; bias - RF GLAD (2") + DC => K2, K3, K4. K9 NEW 5x DC 3 x 1500W, 2 x 750W
[no file attached]
All properties (except table)
No properties found