K8

Type: Sputter Chamber

ObjectId: 8

Created: 1/23/2024 12:30:49 PM by Savan Alan [alans327@gmail.com]

Updated: 12/15/2025 2:14:49 PM by Dudarev Victor gmail [vic.dudarev@gmail.com]

Access: Public Sort Code (asc): 0

License: CC BY 4.0

Description: Model: ORION-8-9000, Serial Number 18542. Location: IC 03. PS: HiPIMS-2, DC-3, RF-1... Interchangeable 1 - M/HiPIMS 1; 2 - M/HiPIMS 2; 3 - DC; 4 - DC; 5 - I/HiPIMS 1; 6 - I/HiPIMS 1; 7 -

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All properties (except table)

Include all template properties
Type Name Value Comment
Int Сathode Сount 7 pcs, number of regular cathodes available --//required
Float Target Diameter 2 inch, for regular cathodes only --//required
Float Target Diameter GLAD 0 inch, 0 - not present; >0 - GLAD cathode diameter --//required

The table

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