K5

Type: Sputter Chamber

ObjectId: 5

Created: 1/23/2024 12:30:49 PM by Savan Alan [alans327@gmail.com]

Updated: 12/15/2025 2:12:39 PM by Dudarev Victor gmail [vic.dudarev@gmail.com]

Access: Public Sort Code (asc): 0

License: CC BY 4.0

Description: Model: Creavac Creamet 450 S3 GB. Location: IAN 01/08. Cathode 1 is 4 inch, cathodes 2-3 are 2 inch, + GLAD cathode is 2 inch, thermal evaporator. 1 - DC; 2 - DC; 3 - RF; 4/GLAD - RF; bias -

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All properties (except table)

Include all template properties
Type Name Value Comment
Int Сathode Сount 3 pcs, number of regular cathodes available --//required
Float Target Diameter 2 inch, for regular cathodes only --//required
Float Target Diameter GLAD 2 inch, 0 - not present; >0 - GLAD cathode diameter --//required

The table

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