K4

Type: Sputter Chamber

ObjectId: 4

Created: 1/23/2024 12:30:49 PM by Savan Alan [alans327@gmail.com]

Updated: 12/15/2025 2:11:10 PM by Dudarev Victor gmail [vic.dudarev@gmail.com]

Access: Public Sort Code (asc): 0

License: CC BY 4.0

Description: Model: ATC 2200H Serial Number 7879. Location: IAN 01/08. Cathodes could be connected to any power supply (DC-2/RF-2/Hi-PIMS). GLAD cathode is an additional one. 1 - DC; 2 - RF; 3 - RF; 4 -

[no file attached]

Associated Objects

No associated objects found.

All properties (except table)

Include all template properties
Type Name Value Comment
Int Сathode Сount 4 pcs, number of regular cathodes available --//required
Float Target Diameter 2 inch, for regular cathodes only --//required
Float Target Diameter GLAD 2 inch, 0 - not present; >0 - GLAD cathode diameter --//required

The table

   Download properties in Excel

No properties for rendering in a table found