K3

Type: Sputter Chamber

ObjectId: 3

Created: 1/23/2024 12:30:49 PM by Savan Alan [alans327@gmail.com]

Updated: 12/15/2025 2:10:44 PM by Dudarev Victor gmail [vic.dudarev@gmail.com]

Access: Public Sort Code (asc): 0

License: CC BY 4.0

Description: Model: ATC 2200V serial number 5791. Location: IAN. Cathodes could be connected to any power supply (DC-2/Pulsed-DC-1/RF-1/Hi-PIMS). GLAD cathode could go in place of any cathode or be an additional one. 1 - bipolar pulse DC; 2 - RF; 3 - DC; 4 - ; bias - RF

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All properties (except table)

Include all template properties
Type Name Value Comment
Int Сathode Сount 4 pcs, number of regular cathodes available --//required
Float Target Diameter 4 inch, for regular cathodes only --//required
Float Target Diameter GLAD 2 inch, 0 - not present; >0 - GLAD cathode diameter --//required

The table

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