9913 synthesis (single material, 231103-K7-1, id=74570)

Type: Synthesis

ObjectId: 56695 ExternalId: 74570

Created: 11/11/2023 11:18:58 PM by Strotkötter Valerie [valerie.strotkoetter@rub.de]

Updated: 2/25/2026 5:18:03 PM by Buergel Jan [jan.buergel@ruhr-uni-bochum.de]

Access: Public Sort Code (asc): 0

License: CC BY 4.0

Description: Synthesis for Sample 9913 (single material, 231103-K7-1, Cantor alloy for EC (100 nm))

[no file attached]

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All properties (except table)

Include all template properties
Type Name Value Comment
general process parameters
Float start vacuum 5.1e-007 Torr
Float process duration 3030 s
String substrate temperature RT °C
Float substrate rotation 30 RPM
String process gas Ar
String table height std mm
Float process pressure 3.7 mTorr
target source configuration
Cathode 3
String target material HEA
String target ID 1
Mag3-DC
Float ignition power cathode 3 30 W
Float pre clean power 3 30 W
Float pre clean time 3 600 s
Float pre clean pressure cathode 3 3.7 mTorr
Float power cathode 3 30 W
Float voltage cathode 3 267 V
Float current cathode 3 0.111 A

The table

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