8561 synthesis (single material, 230323-K1-1, id=68023)

Type: Synthesis

ObjectId: 55567 ExternalId: 68023

Created: 11/11/2023 11:15:58 PM by Savan Alan [alans327@gmail.com]

Access: Public Sort Code (asc): 0

Description: Synthesis for Sample 8561 (single material, 230323-K1-1, other / external, Ti54NiCu15 target rate & stoichiometry)

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Type Name Value Comment
general process parameters
Float start vacuum 6e-008 Torr
Float process duration 900 s
Float substrate temperature 25.6 °C
String process gas Ar
Float table height 141 mm
Float process pressure 5 mTorr
Float flow PG 60 sccm
target source configuration
Cathode 1
String target material Ti54NiCu
Mag1-DC
Float ignition power cathode 1 100 W
Float pre clean power 1 100 W
Float pre clean time 1 900 s
String pre clean pressure cathode 1 15 mTorr
Float power cathode 1 250 W
Float voltage cathode 1 250.6 V
Float current cathode 1 0.99 A

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