7033 Synthesis 220826-K7-1

Type: Synthesis

ObjectId: 54076 ExternalId: 61420

Created: 11/11/2023 11:11:37 PM by Banko Lars [lbmdirub@gmail.com]

Updated: 1/27/2025 4:14:24 PM by Dudarev Victor gmail [vic.dudarev@gmail.com]

Access: Public Sort Code (asc): 0

Description: Synthesis for Sample 7033 (co deposition, 220826-K7-1, 1st)

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All properties (except table)

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Type Name Value Comment
general process parameters
Float start vacuum 1.2e-006 Torr
Float process duration 360 s
Float substrate temperature 25 °C
Float substrate rotation 0 RPM
String process gas Ar
String table height std mm
String substrate position #3 °
Float process pressure 3.7 mTorr
target source configuration
Cathode 1
String target material Ag
String target ID 2
Mag1-DC
Float power cathode 1 10 W
Float voltage cathode 1 289 V
Float current cathode 1 0.034 A
Cathode 2
String target material Pt
String target ID 1
Mag2-DC
Float power cathode 2 20 W
Float voltage cathode 2 335 V
Float current cathode 2 0.061 A
Cathode 3
String target material Pd
String target ID 1
Mag3-DC
Float power cathode 3 10 W
Float voltage cathode 3 284 V
Float current cathode 3 0.034 A

The table

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