6758 Synthesis 220411-K7-1

Type: Synthesis

ObjectId: 53143 ExternalId: 58593

Created: 11/11/2023 11:09:26 PM by Banko Lars [lbmdirub@gmail.com]

Updated: 1/27/2025 4:13:54 PM by Dudarev Victor gmail [vic.dudarev@gmail.com]

Access: Public Sort Code (asc): 0

Description: Synthesis for Sample 6758 (co deposition, 220411-K7-1, test 1)

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Type Name Value Comment
general process parameters
Float start vacuum 8.94e-007 Torr
Float process duration 225 s
Float substrate temperature 25 °C
Float substrate rotation 0 RPM
String process gas Ar
String table height std mm
String substrate position #3 °
Float process pressure 3.75 mTorr
target source configuration
Cathode 1
String target material Pd
String target ID 1
Mag1-DC
Float pre clean power 1 20 W
Float pre clean time 1 60 s
String pre clean pressure cathode 1 10 mTorr
Float power cathode 1 22 W
Float voltage cathode 1 287 V
Float current cathode 1 0.08 A
Cathode 2
String target material Ag
String target ID 1
Mag2-DC
Float pre clean power 2 20 W
Float pre clean time 2 60 s
Float pre clean pressure cathode 2 10 mTorr
Float power cathode 2 14 W
Float voltage cathode 2 297 V
Float current cathode 2 0.053 A
Cathode 3
String target material Ru
String target ID 1
Mag3-DC
Float pre clean power 3 20 W
Float pre clean time 3 60 s
Float pre clean pressure cathode 3 10 mTorr
Float power cathode 3 38 W
Float voltage cathode 3 291 V
Float current cathode 3 0.132 A

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