260709-K2-1

Type: Synthesis

ObjectId: 231424

Created: 7/21/2026 1:03:06 PM by Zerdoumi Ridha [ridha.zerdoumi@ruhr-uni-bochum.de]

Access: Public Sort Code (asc): 0

License: CC BY 4.0

Description: 30 Loops: (Ni-Co-Fe) 45 sec. + Pt 122.5 sec. Deposition @ 950 °C (80nm) + cooling under Ar (25 mT)

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Type Name Value Comment
Int Main4Printing 1 Set it up to 1 for the main synthesis document for printing
general process parameters
String chamber K2 K<i> (for example, "K7")
Int problem occured? 0 1 - Yes, 0 - No
String problem description 0
String operator Ridha Zerdoumi
Float start vacuum 2.1e-008 Torr
Float process duration 1872 s
Float substrate temperature 950 °C
Float substrate rotation 20 RPM
String process gas Ar
Float table height 88.6 mm
Float process pressure 5 mTorr
Float flow PG 60 sccm
Float preheat duration 3600 min
target source configuration
Cathode 1
String target material Ni
String target ID #12 Sindlhauser 4N5
Mag1-DC
Float ignition power cathode 1 50 W
Float pre clean power 1 50 W
Float pre clean time 1 180 s
String pre clean pressure cathode 1 20 mTorr
Float power cathode 1 21 W
Float set power cathode 1 26 W
Float act power cathode 1 25 W
Float voltage cathode 1 278 V
Float current cathode 1 0.07 A
Cathode 2
String target material Cr
Mag2-RF
Float ignition power cathode 2 50 W
Float pre clean power 2 50 W
Float pre clean time 2 180 s
Float pre clean pressure cathode 2 20 mTorr
Float power forward cathode 2 50 W
Float set power forward cathode 2 110 W
Float act power forward cathode 2 110 W
Float power reflected cathode 2 0 W
Cathode 3
Mag3-DC
Float ignition power cathode 3 50 W
Float pre clean power 3 50 W
Float pre clean time 3 180 s
Float pre clean pressure cathode 3 20 mTorr
Float power cathode 3 30 W
Float set power cathode 3 30 W
Float act power cathode 3 29 W
Cathode 4
String target material Pt
String target ID #1 MaTecK 4N
Mag4-RF
Float ignition power cathode 4 50 W
Float pre clean power 4 50 W
Float pre clean time 4 30 s
Float pre clean pressure cathode 4 20 mTorr
Float power forward cathode 4 120 W
Float set power forward cathode 4 120 W
Float act power forward cathode 4 120 W
Float power reflected cathode 4 0 W
Cathode 5
String target material Fe
Mag5-RF
Float ignition power cathode 5 50 W
Float pre clean power 5 50 W
Float pre clean time 5 180 s
Float pre clean pressure cathode 5 20 mTorr
Float power forward cathode 5 125 W
Float set power forward cathode 5 125 W
Float act power forward cathode 5 125 W
Float power reflected cathode 5 0 W

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