260226-K7-1

Type: Synthesis

ObjectId: 210836

Created: 4/24/2026 9:59:00 AM by Katona Palma [palma.katona@rub.de]

Access: Public Sort Code (asc): 0

License: CC BY 4.0

Description:

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Type Name Value Comment
Int Main4Printing 1 Set it up to 1 for the main synthesis document for printing
general process parameters
String chamber K7 K<i> (for example, "K7")
Int problem occured? 0 1 - Yes, 0 - No
String operator Palma
Float start vacuum 2.29e-006 Torr
Float process duration 55 s
Float substrate temperature 23 °C
Float substrate rotation 30 RPM
String process gas Ar
Float cathode tilt 10 mm
Float process pressure 3.75 mTorr
target source configuration
Cathode 1
String target material Ag
String target ID #3
Mag1-DC
Float ignition power cathode 1 20 W
Float pre clean power 1 20 W
Float pre clean time 1 300 s
String pre clean pressure cathode 1 10 mTorr
Float power cathode 1 20 W
Float set power cathode 1 20 W
Float act power cathode 1 19 W
Float voltage cathode 1 311 V
Float current cathode 1 0.063 A

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