231205-K1-6

Type: Synthesis

ObjectId: 62619

Created: 3/15/2024 10:07:44 AM by Akbarnejad Elaheh [elaheh.akbarnejad@rub.de]

Access: Public Sort Code (asc): 0

Description:

[no file attached]

Associated Objects

No associated objects found.

Referenced Objects (Reverse Association)

All properties (except table)

Include all template properties
Type Name Value Comment
Float flow deposition 60 sccm
Float flow preclean 80 sccm
Float deposition pressure cathode 6 0.0031 mTorr
Float Mag6-RF=> Deposition time 6 240 s
Float Mag6-RF=> pre clean time 6 400 s
general process parameters
Float start vacuum 1.3e-008 Torr
target source configuration
Cathode 6
String target material Ta
Mag6-DC
Float power cathode 6 150 W
Float deposition rate 6 0.083 nm/s
Mag6-RF
Float pre clean power 6 200 W
Float pre clean pressure cathode 6 0.0093 mTorr
substrate bias
RF substrate bias
Float bias power forward 30 W

The table

   Download properties in Excel

No properties for rendering in a table found