231205-K1-5

Type: Synthesis

ObjectId: 60317

Created: 2/6/2024 11:26:59 AM by Akbarnejad Elaheh [elaheh.akbarnejad@rub.de]

Access: Public Sort Code (asc): 0

Description:

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Type Name Value Comment
Float flow deposition 60 sccm
Float flow preclean 90 sccm
Float Deposition time 1 2325 s
Float deposition pressure cathode 1 0.0031 mTorr
general process parameters
Float start vacuum 2.4e-008 Torr
String process gas Ar
Float table height 141 mm
target source configuration
Cathode 1
String target material TiNiCu
Mag1-DC
Float pre clean power 1 100 W
Float pre clean time 1 300 s
String pre clean pressure cathode 1 0.0092 mTorr
Float power cathode 1 250 W
Float deposition rate 1 0.42 nm/s
Cathode 6
Mag6-RF

The table

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