231204-K1-2

Type: Synthesis

ObjectId: 62616

Created: 3/15/2024 9:48:07 AM by Akbarnejad Elaheh [elaheh.akbarnejad@rub.de]

Access: Public Sort Code (asc): 0

Description:

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All properties (except table)

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Type Name Value Comment
Float flow deposition 60 sccm
Float flow preclean 80 sccm
Float deposition pressure cathode 6 0.0031 mTorr
Float Mag6-RF=> Deposition time 6 240 s
Float Mag6-RF=> pre clean time 6 400 s
general process parameters
Float start vacuum 1.1e-008 Torr
target source configuration
Cathode 6
String target material Ta
Mag6-DC
Float power cathode 6 150 W
Float deposition rate 6 0.083 nm/s
Mag6-RF
Float pre clean power 6 200 W
Float pre clean pressure cathode 6 0.0093 mTorr
substrate bias
RF substrate bias
Float bias power forward 30 W

The table

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