231129-K1-3

Type: Synthesis

ObjectId: 56753

Created: 11/30/2023 3:40:43 PM by Akbarnejad Elaheh [elaheh.akbarnejad@rub.de]

Access: Public Sort Code (asc): 0

Description:

[no file attached]

Associated Objects

No associated objects found.

Referenced Objects (Reverse Association)

All properties (except table)

Include all template properties
Type Name Value Comment
Float flow deposition 60 sccm
Float flow preclean 90 sccm
Float Deposition time 1 350 s
Float deposition pressure cathode 1 0.0031 mTorr
general process parameters
Float start vacuum 6.5e-008 Torr
String process gas Ar
Float table height 141 mm
target source configuration
Cathode 1
String target material TiNiCu
Mag1-DC
Float pre clean power 1 100 W
Float pre clean time 1 300 s
String pre clean pressure cathode 1 0.0093 mTorr
Float power cathode 1 250 W
Float deposition rate 1 0.42 nm/s
Cathode 6
Mag6-RF

The table

   Download properties in Excel

No properties for rendering in a table found