Date:"09.12.2023" Folder:"C:\MESSUNGEN\USER\Philip\10013" Sample-ID:"0010013" Process-ID:"231130-k1-1" Measurement Current(mA):"Automatisch" Number of Loops:"2" Tmin:"-20" Tmax:"120" Trate:"5" Comment:"300nm x-6250 y6750" T, R, X, Y 1.209000E+2,7.200245E-1,-1.800000E+4,6.000000E+4 1.212000E+2,7.200818E-1,-1.800000E+4,6.000000E+4 1.214000E+2,7.201383E-1,-1.800000E+4,6.000000E+4 1.216000E+2,7.200825E-1,-1.800000E+4,6.000000E+4 1.216000E+2,7.200218E-1,-1.800000E+4,6.000000E+4 1.217000E+2,7.199234E-1,-1.800000E+4,6.000000E+4 1.217000E+2,7.198504E-1,-1.800000E+4,6.000000E+4 1.214000E+2,7.197147E-1,-1.800000E+4,6.000000E+4 1.212000E+2,7.196163E-1,-1.800000E+4,6.000000E+4 1.209000E+2,7.194779E-1,-1.800000E+4,6.000000E+4 1.207000E+2,7.193702E-1,-1.800000E+4,6.000000E+4 1.204000E+2,7.192836E-1,-1.800000E+4,6.000000E+4 1.200000E+2,7.191912E-1,-1.800000E+4,6.000000E+4 1.197000E+2,7.190577E-1,-1.800000E+4,6.000000E+4 1.194000E+2,7.189667E-1,-1.800000E+4,6.000000E+4 1.191000E+2,7.188302E-1,-1.800000E+4,6.000000E+4 1.187000E+2,7.186953E-1,-1.800000E+4,6.000000E+4 1.184000E+2,7.185880E-1,-1.800000E+4,6.000000E+4 1.181000E+2,7.184556E-1,-1.800000E+4,6.000000E+4 1.177000E+2,7.183862E-1,-1.800000E+4,6.000000E+4 1.174000E+2,7.182650E-1,-1.800000E+4,6.000000E+4 1.170000E+2,7.180561E-1,-1.800000E+4,6.000000E+4 1.166000E+2,7.179569E-1,-1.800000E+4,6.000000E+4 1.163000E+2,7.178304E-1,-1.800000E+4,6.000000E+4 1.160000E+2,7.176650E-1,-1.800000E+4,6.000000E+4 1.156000E+2,7.175859E-1,-1.800000E+4,6.000000E+4 1.152000E+2,7.174170E-1,-1.800000E+4,6.000000E+4 1.148000E+2,7.172587E-1,-1.800000E+4,6.000000E+4 1.145000E+2,7.170378E-1,-1.800000E+4,6.000000E+4 1.141000E+2,7.169352E-1,-1.800000E+4,6.000000E+4 1.137000E+2,7.167373E-1,-1.800000E+4,6.000000E+4 1.134000E+2,7.166047E-1,-1.800000E+4,6.000000E+4 1.129000E+2,7.164819E-1,-1.800000E+4,6.000000E+4 1.126000E+2,7.163177E-1,-1.800000E+4,6.000000E+4 1.122000E+2,7.161456E-1,-1.800000E+4,6.000000E+4 1.118000E+2,7.160061E-1,-1.800000E+4,6.000000E+4 1.114000E+2,7.158762E-1,-1.800000E+4,6.000000E+4 1.111000E+2,7.156921E-1,-1.800000E+4,6.000000E+4 1.107000E+2,7.155301E-1,-1.800000E+4,6.000000E+4 1.103000E+2,7.153900E-1,-1.800000E+4,6.000000E+4 1.099000E+2,7.152550E-1,-1.800000E+4,6.000000E+4 1.095000E+2,7.150933E-1,-1.800000E+4,6.000000E+4 1.092000E+2,7.149784E-1,-1.800000E+4,6.000000E+4 1.088000E+2,7.148033E-1,-1.800000E+4,6.000000E+4 1.084000E+2,7.146562E-1,-1.800000E+4,6.000000E+4 1.080000E+2,7.144642E-1,-1.800000E+4,6.000000E+4 1.076000E+2,7.142968E-1,-1.800000E+4,6.000000E+4 1.071000E+2,7.141258E-1,-1.800000E+4,6.000000E+4 1.068000E+2,7.140152E-1,-1.800000E+4,6.000000E+4 1.064000E+2,7.138746E-1,-1.800000E+4,6.000000E+4 1.059000E+2,7.136931E-1,-1.800000E+4,6.000000E+4 1.056000E+2,7.134938E-1,-1.800000E+4,6.000000E+4 1.051000E+2,7.132394E-1,-1.800000E+4,6.000000E+4 1.047000E+2,7.130870E-1,-1.800000E+4,6.000000E+4 1.043000E+2,7.129426E-1,-1.800000E+4,6.000000E+4 1.038000E+2,7.127857E-1,-1.800000E+4,6.000000E+4 1.034000E+2,7.125671E-1,-1.800000E+4,6.000000E+4 1.030000E+2,7.123816E-1,-1.800000E+4,6.000000E+4 1.025000E+2,7.122543E-1,-1.800000E+4,6.000000E+4 1.021000E+2,7.120596E-1,-1.800000E+4,6.000000E+4 1.016000E+2,7.118910E-1,-1.800000E+4,6.000000E+4 1.011000E+2,7.117442E-1,-1.800000E+4,6.000000E+4 1.006000E+2,7.114161E-1,-1.800000E+4,6.000000E+4 1.001000E+2,7.112562E-1,-1.800000E+4,6.000000E+4 9.960000E+1,7.111136E-1,-1.800000E+4,6.000000E+4 9.930000E+1,7.109545E-1,-1.800000E+4,6.000000E+4 9.880000E+1,7.107881E-1,-1.800000E+4,6.000000E+4 9.820000E+1,7.106054E-1,-1.800000E+4,6.000000E+4 9.780000E+1,7.104410E-1,-1.800000E+4,6.000000E+4 9.730000E+1,7.102816E-1,-1.800000E+4,6.000000E+4 9.680000E+1,7.101054E-1,-1.800000E+4,6.000000E+4 9.640000E+1,7.099221E-1,-1.800000E+4,6.000000E+4 9.590000E+1,7.097465E-1,-1.800000E+4,6.000000E+4 9.540000E+1,7.095531E-1,-1.800000E+4,6.000000E+4 9.480000E+1,7.094015E-1,-1.800000E+4,6.000000E+4 9.450000E+1,7.092708E-1,-1.800000E+4,6.000000E+4 9.390000E+1,7.092056E-1,-1.800000E+4,6.000000E+4 9.350000E+1,7.090631E-1,-1.800000E+4,6.000000E+4 9.300000E+1,7.089465E-1,-1.800000E+4,6.000000E+4 9.260000E+1,7.088307E-1,-1.800000E+4,6.000000E+4 9.220000E+1,7.086796E-1,-1.800000E+4,6.000000E+4 9.190000E+1,7.085397E-1,-1.800000E+4,6.000000E+4 9.150000E+1,7.084668E-1,-1.800000E+4,6.000000E+4 9.110000E+1,7.083049E-1,-1.800000E+4,6.000000E+4 9.060000E+1,7.082216E-1,-1.800000E+4,6.000000E+4 9.020000E+1,7.080907E-1,-1.800000E+4,6.000000E+4 8.990000E+1,7.080106E-1,-1.800000E+4,6.000000E+4 8.950000E+1,7.078821E-1,-1.800000E+4,6.000000E+4 8.910000E+1,7.077895E-1,-1.800000E+4,6.000000E+4 8.870000E+1,7.076681E-1,-1.800000E+4,6.000000E+4 8.850000E+1,7.075617E-1,-1.800000E+4,6.000000E+4 8.800000E+1,7.074603E-1,-1.800000E+4,6.000000E+4 8.770000E+1,7.073252E-1,-1.800000E+4,6.000000E+4 8.730000E+1,7.072086E-1,-1.800000E+4,6.000000E+4 8.700000E+1,7.071424E-1,-1.800000E+4,6.000000E+4 8.680000E+1,7.070031E-1,-1.800000E+4,6.000000E+4 8.640000E+1,7.068997E-1,-1.800000E+4,6.000000E+4 8.600000E+1,7.067957E-1,-1.800000E+4,6.000000E+4 8.560000E+1,7.066991E-1,-1.800000E+4,6.000000E+4 8.540000E+1,7.065901E-1,-1.800000E+4,6.000000E+4 8.510000E+1,7.064843E-1,-1.800000E+4,6.000000E+4 8.470000E+1,7.063989E-1,-1.800000E+4,6.000000E+4 8.450000E+1,7.062894E-1,-1.800000E+4,6.000000E+4 8.420000E+1,7.061794E-1,-1.800000E+4,6.000000E+4 8.380000E+1,7.060875E-1,-1.800000E+4,6.000000E+4 8.350000E+1,7.059827E-1,-1.800000E+4,6.000000E+4 8.310000E+1,7.059051E-1,-1.800000E+4,6.000000E+4 8.290000E+1,7.058055E-1,-1.800000E+4,6.000000E+4 8.250000E+1,7.056898E-1,-1.800000E+4,6.000000E+4 8.220000E+1,7.056478E-1,-1.800000E+4,6.000000E+4 8.200000E+1,7.055563E-1,-1.800000E+4,6.000000E+4 8.170000E+1,7.052799E-1,-1.800000E+4,6.000000E+4 8.130000E+1,7.052053E-1,-1.800000E+4,6.000000E+4 8.100000E+1,7.051120E-1,-1.800000E+4,6.000000E+4 8.070000E+1,7.050250E-1,-1.800000E+4,6.000000E+4 8.030000E+1,7.049482E-1,-1.800000E+4,6.000000E+4 8.000000E+1,7.048461E-1,-1.800000E+4,6.000000E+4 7.970000E+1,7.047819E-1,-1.800000E+4,6.000000E+4 7.940000E+1,7.047126E-1,-1.800000E+4,6.000000E+4 7.900000E+1,7.046012E-1,-1.800000E+4,6.000000E+4 7.870000E+1,7.045025E-1,-1.800000E+4,6.000000E+4 7.840000E+1,7.044604E-1,-1.800000E+4,6.000000E+4 7.810000E+1,7.043757E-1,-1.800000E+4,6.000000E+4 7.770000E+1,7.042777E-1,-1.800000E+4,6.000000E+4 7.730000E+1,7.042002E-1,-1.800000E+4,6.000000E+4 7.700000E+1,7.041000E-1,-1.800000E+4,6.000000E+4 7.660000E+1,7.040079E-1,-1.800000E+4,6.000000E+4 7.630000E+1,7.039236E-1,-1.800000E+4,6.000000E+4 7.580000E+1,7.037625E-1,-1.800000E+4,6.000000E+4 7.540000E+1,7.036787E-1,-1.800000E+4,6.000000E+4 7.510000E+1,7.035791E-1,-1.800000E+4,6.000000E+4 7.470000E+1,7.034978E-1,-1.800000E+4,6.000000E+4 7.430000E+1,7.034301E-1,-1.800000E+4,6.000000E+4 7.390000E+1,7.033696E-1,-1.800000E+4,6.000000E+4 7.350000E+1,7.032844E-1,-1.800000E+4,6.000000E+4 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5.050000E+1,7.112501E-1,-1.800000E+4,6.000000E+4 5.020000E+1,7.115126E-1,-1.800000E+4,6.000000E+4 4.980000E+1,7.117978E-1,-1.800000E+4,6.000000E+4 4.950000E+1,7.120501E-1,-1.800000E+4,6.000000E+4 4.910000E+1,7.123162E-1,-1.800000E+4,6.000000E+4 4.880000E+1,7.125665E-1,-1.800000E+4,6.000000E+4 4.850000E+1,7.128251E-1,-1.800000E+4,6.000000E+4 4.820000E+1,7.130326E-1,-1.800000E+4,6.000000E+4 4.780000E+1,7.132542E-1,-1.800000E+4,6.000000E+4 4.750000E+1,7.134843E-1,-1.800000E+4,6.000000E+4 4.720000E+1,7.137504E-1,-1.800000E+4,6.000000E+4 4.680000E+1,7.139666E-1,-1.800000E+4,6.000000E+4 4.650000E+1,7.135155E-1,-1.800000E+4,6.000000E+4 4.630000E+1,7.138864E-1,-1.800000E+4,6.000000E+4 4.590000E+1,7.138042E-1,-1.800000E+4,6.000000E+4 4.560000E+1,7.138946E-1,-1.800000E+4,6.000000E+4 4.520000E+1,7.140746E-1,-1.800000E+4,6.000000E+4 4.490000E+1,7.143294E-1,-1.800000E+4,6.000000E+4 4.460000E+1,7.145745E-1,-1.800000E+4,6.000000E+4 4.420000E+1,7.148080E-1,-1.800000E+4,6.000000E+4 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