Date:"06.12.2023" Folder:"C:\MESSUNGEN\USER\Philip" Sample-ID:"10012" Process-ID:"231129-k1-3" Measurement Current(mA):"Automatisch" Number of Loops:"2" Tmin:"-20" Tmax:"120" Trate:"5" Comment:"150nm" T, R, X, Y 1.208000E+2,1.245636E+0,-1.350000E+4,6.500000E+4 1.211000E+2,1.246067E+0,-1.350000E+4,6.500000E+4 1.214000E+2,1.245803E+0,-1.350000E+4,6.500000E+4 1.215000E+2,1.245357E+0,-1.350000E+4,6.500000E+4 1.216000E+2,1.245142E+0,-1.350000E+4,6.500000E+4 1.215000E+2,1.244767E+0,-1.350000E+4,6.500000E+4 1.214000E+2,1.244524E+0,-1.350000E+4,6.500000E+4 1.212000E+2,1.244305E+0,-1.350000E+4,6.500000E+4 1.209000E+2,1.243928E+0,-1.350000E+4,6.500000E+4 1.206000E+2,1.243622E+0,-1.350000E+4,6.500000E+4 1.204000E+2,1.243202E+0,-1.350000E+4,6.500000E+4 1.200000E+2,1.242814E+0,-1.350000E+4,6.500000E+4 1.197000E+2,1.242119E+0,-1.350000E+4,6.500000E+4 1.194000E+2,1.241570E+0,-1.350000E+4,6.500000E+4 1.191000E+2,1.241002E+0,-1.350000E+4,6.500000E+4 1.187000E+2,1.240925E+0,-1.350000E+4,6.500000E+4 1.184000E+2,1.240850E+0,-1.350000E+4,6.500000E+4 1.181000E+2,1.240041E+0,-1.350000E+4,6.500000E+4 1.177000E+2,1.239948E+0,-1.350000E+4,6.500000E+4 1.174000E+2,1.240048E+0,-1.350000E+4,6.500000E+4 1.171000E+2,1.239495E+0,-1.350000E+4,6.500000E+4 1.168000E+2,1.239036E+0,-1.350000E+4,6.500000E+4 1.164000E+2,1.238631E+0,-1.350000E+4,6.500000E+4 1.160000E+2,1.238897E+0,-1.350000E+4,6.500000E+4 1.156000E+2,1.238531E+0,-1.350000E+4,6.500000E+4 1.153000E+2,1.237560E+0,-1.350000E+4,6.500000E+4 1.150000E+2,1.236872E+0,-1.350000E+4,6.500000E+4 1.146000E+2,1.237071E+0,-1.350000E+4,6.500000E+4 1.141000E+2,1.237184E+0,-1.350000E+4,6.500000E+4 1.138000E+2,1.236973E+0,-1.350000E+4,6.500000E+4 1.134000E+2,1.237102E+0,-1.350000E+4,6.500000E+4 1.129000E+2,1.237484E+0,-1.350000E+4,6.500000E+4 1.125000E+2,1.237135E+0,-1.350000E+4,6.500000E+4 1.122000E+2,1.236915E+0,-1.350000E+4,6.500000E+4 1.117000E+2,1.237134E+0,-1.350000E+4,6.500000E+4 1.113000E+2,1.237141E+0,-1.350000E+4,6.500000E+4 1.109000E+2,1.237326E+0,-1.350000E+4,6.500000E+4 1.105000E+2,1.237007E+0,-1.350000E+4,6.500000E+4 1.101000E+2,1.236566E+0,-1.350000E+4,6.500000E+4 1.097000E+2,1.236440E+0,-1.350000E+4,6.500000E+4 1.093000E+2,1.236431E+0,-1.350000E+4,6.500000E+4 1.089000E+2,1.236011E+0,-1.350000E+4,6.500000E+4 1.085000E+2,1.235598E+0,-1.350000E+4,6.500000E+4 1.081000E+2,1.235025E+0,-1.350000E+4,6.500000E+4 1.076000E+2,1.230055E+0,-1.350000E+4,6.500000E+4 1.072000E+2,1.229785E+0,-1.350000E+4,6.500000E+4 1.069000E+2,1.229243E+0,-1.350000E+4,6.500000E+4 1.065000E+2,1.228507E+0,-1.350000E+4,6.500000E+4 1.061000E+2,1.228420E+0,-1.350000E+4,6.500000E+4 1.057000E+2,1.228187E+0,-1.350000E+4,6.500000E+4 1.053000E+2,1.226860E+0,-1.350000E+4,6.500000E+4 1.049000E+2,1.223597E+0,-1.350000E+4,6.500000E+4 1.044000E+2,1.221314E+0,-1.350000E+4,6.500000E+4 1.041000E+2,1.219516E+0,-1.350000E+4,6.500000E+4 1.036000E+2,1.218973E+0,-1.350000E+4,6.500000E+4 1.031000E+2,1.219140E+0,-1.350000E+4,6.500000E+4 1.027000E+2,1.217944E+0,-1.350000E+4,6.500000E+4 1.023000E+2,1.217299E+0,-1.350000E+4,6.500000E+4 1.019000E+2,1.217652E+0,-1.350000E+4,6.500000E+4 1.014000E+2,1.217792E+0,-1.350000E+4,6.500000E+4 1.009000E+2,1.218073E+0,-1.350000E+4,6.500000E+4 1.005000E+2,1.216815E+0,-1.350000E+4,6.500000E+4 1.000000E+2,1.215827E+0,-1.350000E+4,6.500000E+4 9.960000E+1,1.215408E+0,-1.350000E+4,6.500000E+4 9.910000E+1,1.214029E+0,-1.350000E+4,6.500000E+4 9.870000E+1,1.213481E+0,-1.350000E+4,6.500000E+4 9.820000E+1,1.212551E+0,-1.350000E+4,6.500000E+4 9.780000E+1,1.211945E+0,-1.350000E+4,6.500000E+4 9.740000E+1,1.211187E+0,-1.350000E+4,6.500000E+4 9.680000E+1,1.210512E+0,-1.350000E+4,6.500000E+4 9.640000E+1,1.209634E+0,-1.350000E+4,6.500000E+4 9.600000E+1,1.209077E+0,-1.350000E+4,6.500000E+4 9.560000E+1,1.208917E+0,-1.350000E+4,6.500000E+4 9.520000E+1,1.208485E+0,-1.350000E+4,6.500000E+4 9.480000E+1,1.208075E+0,-1.350000E+4,6.500000E+4 9.430000E+1,1.208013E+0,-1.350000E+4,6.500000E+4 9.400000E+1,1.207811E+0,-1.350000E+4,6.500000E+4 9.360000E+1,1.207693E+0,-1.350000E+4,6.500000E+4 9.320000E+1,1.207126E+0,-1.350000E+4,6.500000E+4 9.290000E+1,1.206478E+0,-1.350000E+4,6.500000E+4 9.250000E+1,1.206015E+0,-1.350000E+4,6.500000E+4 9.210000E+1,1.205665E+0,-1.350000E+4,6.500000E+4 9.170000E+1,1.205084E+0,-1.350000E+4,6.500000E+4 9.130000E+1,1.204771E+0,-1.350000E+4,6.500000E+4 9.100000E+1,1.204206E+0,-1.350000E+4,6.500000E+4 9.060000E+1,1.203715E+0,-1.350000E+4,6.500000E+4 9.030000E+1,1.203504E+0,-1.350000E+4,6.500000E+4 9.000000E+1,1.202681E+0,-1.350000E+4,6.500000E+4 8.960000E+1,1.202100E+0,-1.350000E+4,6.500000E+4 8.930000E+1,1.201768E+0,-1.350000E+4,6.500000E+4 8.890000E+1,1.201299E+0,-1.350000E+4,6.500000E+4 8.850000E+1,1.200854E+0,-1.350000E+4,6.500000E+4 8.820000E+1,1.200246E+0,-1.350000E+4,6.500000E+4 8.780000E+1,1.199501E+0,-1.350000E+4,6.500000E+4 8.750000E+1,1.199653E+0,-1.350000E+4,6.500000E+4 8.720000E+1,1.199450E+0,-1.350000E+4,6.500000E+4 8.680000E+1,1.198041E+0,-1.350000E+4,6.500000E+4 8.650000E+1,1.197282E+0,-1.350000E+4,6.500000E+4 8.610000E+1,1.196890E+0,-1.350000E+4,6.500000E+4 8.570000E+1,1.196069E+0,-1.350000E+4,6.500000E+4 8.530000E+1,1.195740E+0,-1.350000E+4,6.500000E+4 8.490000E+1,1.195421E+0,-1.350000E+4,6.500000E+4 8.460000E+1,1.194171E+0,-1.350000E+4,6.500000E+4 8.420000E+1,1.193249E+0,-1.350000E+4,6.500000E+4 8.380000E+1,1.192154E+0,-1.350000E+4,6.500000E+4 8.340000E+1,1.191184E+0,-1.350000E+4,6.500000E+4 8.300000E+1,1.190252E+0,-1.350000E+4,6.500000E+4 8.250000E+1,1.189873E+0,-1.350000E+4,6.500000E+4 8.220000E+1,1.188982E+0,-1.350000E+4,6.500000E+4 8.170000E+1,1.187956E+0,-1.350000E+4,6.500000E+4 8.140000E+1,1.187158E+0,-1.350000E+4,6.500000E+4 8.090000E+1,1.185356E+0,-1.350000E+4,6.500000E+4 8.040000E+1,1.184627E+0,-1.350000E+4,6.500000E+4 8.010000E+1,1.183891E+0,-1.350000E+4,6.500000E+4 7.960000E+1,1.183102E+0,-1.350000E+4,6.500000E+4 7.920000E+1,1.182438E+0,-1.350000E+4,6.500000E+4 7.870000E+1,1.181949E+0,-1.350000E+4,6.500000E+4 7.840000E+1,1.181174E+0,-1.350000E+4,6.500000E+4 7.790000E+1,1.180578E+0,-1.350000E+4,6.500000E+4 7.750000E+1,1.181412E+0,-1.350000E+4,6.500000E+4 7.710000E+1,1.181519E+0,-1.350000E+4,6.500000E+4 7.660000E+1,1.179956E+0,-1.350000E+4,6.500000E+4 7.630000E+1,1.178780E+0,-1.350000E+4,6.500000E+4 7.590000E+1,1.179707E+0,-1.350000E+4,6.500000E+4 7.550000E+1,1.179131E+0,-1.350000E+4,6.500000E+4 7.520000E+1,1.179381E+0,-1.350000E+4,6.500000E+4 7.480000E+1,1.178067E+0,-1.350000E+4,6.500000E+4 7.440000E+1,1.177269E+0,-1.350000E+4,6.500000E+4 7.400000E+1,1.176838E+0,-1.350000E+4,6.500000E+4 7.360000E+1,1.176348E+0,-1.350000E+4,6.500000E+4 7.320000E+1,1.175429E+0,-1.350000E+4,6.500000E+4 7.280000E+1,1.174747E+0,-1.350000E+4,6.500000E+4 7.250000E+1,1.173835E+0,-1.350000E+4,6.500000E+4 7.200000E+1,1.173688E+0,-1.350000E+4,6.500000E+4 7.170000E+1,1.173217E+0,-1.350000E+4,6.500000E+4 7.130000E+1,1.172430E+0,-1.350000E+4,6.500000E+4 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