Date:"06.12.2023" Folder:"C:\MESSUNGEN\USER\Philip" Sample-ID:"10012" Process-ID:"231129-k1-3" Measurement Current(mA):"Automatisch" Number of Loops:"2" Tmin:"-20" Tmax:"120" Trate:"5" Comment:"150nm" T, R, X, Y 1.208000E+2,1.510711E+0,-9.000000E+3,6.500000E+4 1.211000E+2,1.511346E+0,-9.000000E+3,6.500000E+4 1.214000E+2,1.511683E+0,-9.000000E+3,6.500000E+4 1.215000E+2,1.511561E+0,-9.000000E+3,6.500000E+4 1.216000E+2,1.511367E+0,-9.000000E+3,6.500000E+4 1.215000E+2,1.510698E+0,-9.000000E+3,6.500000E+4 1.214000E+2,1.510659E+0,-9.000000E+3,6.500000E+4 1.212000E+2,1.509675E+0,-9.000000E+3,6.500000E+4 1.209000E+2,1.509090E+0,-9.000000E+3,6.500000E+4 1.206000E+2,1.508800E+0,-9.000000E+3,6.500000E+4 1.204000E+2,1.508205E+0,-9.000000E+3,6.500000E+4 1.200000E+2,1.508327E+0,-9.000000E+3,6.500000E+4 1.197000E+2,1.507546E+0,-9.000000E+3,6.500000E+4 1.194000E+2,1.506532E+0,-9.000000E+3,6.500000E+4 1.191000E+2,1.506191E+0,-9.000000E+3,6.500000E+4 1.187000E+2,1.506133E+0,-9.000000E+3,6.500000E+4 1.184000E+2,1.505866E+0,-9.000000E+3,6.500000E+4 1.181000E+2,1.505679E+0,-9.000000E+3,6.500000E+4 1.177000E+2,1.505733E+0,-9.000000E+3,6.500000E+4 1.174000E+2,1.505475E+0,-9.000000E+3,6.500000E+4 1.171000E+2,1.505347E+0,-9.000000E+3,6.500000E+4 1.168000E+2,1.505331E+0,-9.000000E+3,6.500000E+4 1.164000E+2,1.504666E+0,-9.000000E+3,6.500000E+4 1.160000E+2,1.504260E+0,-9.000000E+3,6.500000E+4 1.156000E+2,1.503169E+0,-9.000000E+3,6.500000E+4 1.153000E+2,1.503147E+0,-9.000000E+3,6.500000E+4 1.150000E+2,1.501999E+0,-9.000000E+3,6.500000E+4 1.146000E+2,1.500500E+0,-9.000000E+3,6.500000E+4 1.141000E+2,1.501284E+0,-9.000000E+3,6.500000E+4 1.138000E+2,1.500786E+0,-9.000000E+3,6.500000E+4 1.134000E+2,1.498309E+0,-9.000000E+3,6.500000E+4 1.129000E+2,1.496741E+0,-9.000000E+3,6.500000E+4 1.125000E+2,1.496456E+0,-9.000000E+3,6.500000E+4 1.122000E+2,1.496249E+0,-9.000000E+3,6.500000E+4 1.117000E+2,1.495789E+0,-9.000000E+3,6.500000E+4 1.113000E+2,1.494590E+0,-9.000000E+3,6.500000E+4 1.109000E+2,1.493696E+0,-9.000000E+3,6.500000E+4 1.105000E+2,1.491956E+0,-9.000000E+3,6.500000E+4 1.101000E+2,1.491810E+0,-9.000000E+3,6.500000E+4 1.097000E+2,1.491395E+0,-9.000000E+3,6.500000E+4 1.093000E+2,1.490736E+0,-9.000000E+3,6.500000E+4 1.089000E+2,1.490197E+0,-9.000000E+3,6.500000E+4 1.085000E+2,1.489150E+0,-9.000000E+3,6.500000E+4 1.081000E+2,1.488042E+0,-9.000000E+3,6.500000E+4 1.076000E+2,1.486638E+0,-9.000000E+3,6.500000E+4 1.072000E+2,1.485987E+0,-9.000000E+3,6.500000E+4 1.069000E+2,1.484760E+0,-9.000000E+3,6.500000E+4 1.065000E+2,1.483542E+0,-9.000000E+3,6.500000E+4 1.061000E+2,1.482767E+0,-9.000000E+3,6.500000E+4 1.057000E+2,1.481442E+0,-9.000000E+3,6.500000E+4 1.053000E+2,1.479192E+0,-9.000000E+3,6.500000E+4 1.049000E+2,1.477013E+0,-9.000000E+3,6.500000E+4 1.044000E+2,1.474928E+0,-9.000000E+3,6.500000E+4 1.041000E+2,1.471878E+0,-9.000000E+3,6.500000E+4 1.036000E+2,1.470794E+0,-9.000000E+3,6.500000E+4 1.031000E+2,1.469459E+0,-9.000000E+3,6.500000E+4 1.027000E+2,1.465926E+0,-9.000000E+3,6.500000E+4 1.023000E+2,1.464382E+0,-9.000000E+3,6.500000E+4 1.019000E+2,1.463039E+0,-9.000000E+3,6.500000E+4 1.014000E+2,1.461486E+0,-9.000000E+3,6.500000E+4 1.009000E+2,1.460224E+0,-9.000000E+3,6.500000E+4 1.005000E+2,1.458802E+0,-9.000000E+3,6.500000E+4 1.000000E+2,1.455497E+0,-9.000000E+3,6.500000E+4 9.960000E+1,1.454530E+0,-9.000000E+3,6.500000E+4 9.910000E+1,1.453634E+0,-9.000000E+3,6.500000E+4 9.870000E+1,1.452242E+0,-9.000000E+3,6.500000E+4 9.820000E+1,1.451223E+0,-9.000000E+3,6.500000E+4 9.780000E+1,1.450838E+0,-9.000000E+3,6.500000E+4 9.740000E+1,1.449845E+0,-9.000000E+3,6.500000E+4 9.680000E+1,1.448915E+0,-9.000000E+3,6.500000E+4 9.640000E+1,1.448545E+0,-9.000000E+3,6.500000E+4 9.600000E+1,1.446812E+0,-9.000000E+3,6.500000E+4 9.560000E+1,1.445980E+0,-9.000000E+3,6.500000E+4 9.520000E+1,1.445486E+0,-9.000000E+3,6.500000E+4 9.480000E+1,1.445186E+0,-9.000000E+3,6.500000E+4 9.430000E+1,1.444868E+0,-9.000000E+3,6.500000E+4 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8.680000E+1,1.434757E+0,-9.000000E+3,6.500000E+4 8.650000E+1,1.434343E+0,-9.000000E+3,6.500000E+4 8.610000E+1,1.433896E+0,-9.000000E+3,6.500000E+4 8.570000E+1,1.432822E+0,-9.000000E+3,6.500000E+4 8.530000E+1,1.432469E+0,-9.000000E+3,6.500000E+4 8.490000E+1,1.432017E+0,-9.000000E+3,6.500000E+4 8.460000E+1,1.431121E+0,-9.000000E+3,6.500000E+4 8.420000E+1,1.430575E+0,-9.000000E+3,6.500000E+4 8.380000E+1,1.429907E+0,-9.000000E+3,6.500000E+4 8.340000E+1,1.428659E+0,-9.000000E+3,6.500000E+4 8.300000E+1,1.427909E+0,-9.000000E+3,6.500000E+4 8.250000E+1,1.426829E+0,-9.000000E+3,6.500000E+4 8.220000E+1,1.425885E+0,-9.000000E+3,6.500000E+4 8.170000E+1,1.425455E+0,-9.000000E+3,6.500000E+4 8.140000E+1,1.424434E+0,-9.000000E+3,6.500000E+4 8.090000E+1,1.424031E+0,-9.000000E+3,6.500000E+4 8.040000E+1,1.423056E+0,-9.000000E+3,6.500000E+4 8.010000E+1,1.422375E+0,-9.000000E+3,6.500000E+4 7.960000E+1,1.421259E+0,-9.000000E+3,6.500000E+4 7.920000E+1,1.420585E+0,-9.000000E+3,6.500000E+4 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