Date:"06.12.2023" Folder:"C:\MESSUNGEN\USER\Philip" Sample-ID:"10012" Process-ID:"231129-k1-3" Measurement Current(mA):"Automatisch" Number of Loops:"2" Tmin:"-20" Tmax:"120" Trate:"5" Comment:"150nm" T, R, X, Y 1.208000E+2,1.156632E+0,-4.500000E+3,6.500000E+4 1.211000E+2,1.156848E+0,-4.500000E+3,6.500000E+4 1.214000E+2,1.156883E+0,-4.500000E+3,6.500000E+4 1.215000E+2,1.156781E+0,-4.500000E+3,6.500000E+4 1.216000E+2,1.156595E+0,-4.500000E+3,6.500000E+4 1.215000E+2,1.156363E+0,-4.500000E+3,6.500000E+4 1.214000E+2,1.156139E+0,-4.500000E+3,6.500000E+4 1.212000E+2,1.155882E+0,-4.500000E+3,6.500000E+4 1.209000E+2,1.155633E+0,-4.500000E+3,6.500000E+4 1.206000E+2,1.155383E+0,-4.500000E+3,6.500000E+4 1.204000E+2,1.155106E+0,-4.500000E+3,6.500000E+4 1.200000E+2,1.154878E+0,-4.500000E+3,6.500000E+4 1.197000E+2,1.154613E+0,-4.500000E+3,6.500000E+4 1.194000E+2,1.154371E+0,-4.500000E+3,6.500000E+4 1.191000E+2,1.154135E+0,-4.500000E+3,6.500000E+4 1.187000E+2,1.153830E+0,-4.500000E+3,6.500000E+4 1.184000E+2,1.153517E+0,-4.500000E+3,6.500000E+4 1.181000E+2,1.153198E+0,-4.500000E+3,6.500000E+4 1.177000E+2,1.153036E+0,-4.500000E+3,6.500000E+4 1.174000E+2,1.152740E+0,-4.500000E+3,6.500000E+4 1.171000E+2,1.152427E+0,-4.500000E+3,6.500000E+4 1.168000E+2,1.152172E+0,-4.500000E+3,6.500000E+4 1.164000E+2,1.151865E+0,-4.500000E+3,6.500000E+4 1.160000E+2,1.151522E+0,-4.500000E+3,6.500000E+4 1.156000E+2,1.151210E+0,-4.500000E+3,6.500000E+4 1.153000E+2,1.150885E+0,-4.500000E+3,6.500000E+4 1.150000E+2,1.150463E+0,-4.500000E+3,6.500000E+4 1.146000E+2,1.150049E+0,-4.500000E+3,6.500000E+4 1.141000E+2,1.149685E+0,-4.500000E+3,6.500000E+4 1.138000E+2,1.149336E+0,-4.500000E+3,6.500000E+4 1.134000E+2,1.148991E+0,-4.500000E+3,6.500000E+4 1.129000E+2,1.148646E+0,-4.500000E+3,6.500000E+4 1.125000E+2,1.148320E+0,-4.500000E+3,6.500000E+4 1.122000E+2,1.147983E+0,-4.500000E+3,6.500000E+4 1.117000E+2,1.147831E+0,-4.500000E+3,6.500000E+4 1.113000E+2,1.147473E+0,-4.500000E+3,6.500000E+4 1.109000E+2,1.147082E+0,-4.500000E+3,6.500000E+4 1.105000E+2,1.146823E+0,-4.500000E+3,6.500000E+4 1.101000E+2,1.146440E+0,-4.500000E+3,6.500000E+4 1.097000E+2,1.146045E+0,-4.500000E+3,6.500000E+4 1.093000E+2,1.145735E+0,-4.500000E+3,6.500000E+4 1.089000E+2,1.145403E+0,-4.500000E+3,6.500000E+4 1.085000E+2,1.145154E+0,-4.500000E+3,6.500000E+4 1.081000E+2,1.144804E+0,-4.500000E+3,6.500000E+4 1.076000E+2,1.144411E+0,-4.500000E+3,6.500000E+4 1.072000E+2,1.144053E+0,-4.500000E+3,6.500000E+4 1.069000E+2,1.143758E+0,-4.500000E+3,6.500000E+4 1.065000E+2,1.143323E+0,-4.500000E+3,6.500000E+4 1.061000E+2,1.142998E+0,-4.500000E+3,6.500000E+4 1.057000E+2,1.142570E+0,-4.500000E+3,6.500000E+4 1.053000E+2,1.142141E+0,-4.500000E+3,6.500000E+4 1.049000E+2,1.141732E+0,-4.500000E+3,6.500000E+4 1.044000E+2,1.141284E+0,-4.500000E+3,6.500000E+4 1.041000E+2,1.140683E+0,-4.500000E+3,6.500000E+4 1.036000E+2,1.140251E+0,-4.500000E+3,6.500000E+4 1.031000E+2,1.139783E+0,-4.500000E+3,6.500000E+4 1.027000E+2,1.139316E+0,-4.500000E+3,6.500000E+4 1.023000E+2,1.138965E+0,-4.500000E+3,6.500000E+4 1.019000E+2,1.138678E+0,-4.500000E+3,6.500000E+4 1.014000E+2,1.138251E+0,-4.500000E+3,6.500000E+4 1.009000E+2,1.137965E+0,-4.500000E+3,6.500000E+4 1.005000E+2,1.137689E+0,-4.500000E+3,6.500000E+4 1.000000E+2,1.137069E+0,-4.500000E+3,6.500000E+4 9.960000E+1,1.136660E+0,-4.500000E+3,6.500000E+4 9.910000E+1,1.136312E+0,-4.500000E+3,6.500000E+4 9.870000E+1,1.135925E+0,-4.500000E+3,6.500000E+4 9.820000E+1,1.135461E+0,-4.500000E+3,6.500000E+4 9.780000E+1,1.134960E+0,-4.500000E+3,6.500000E+4 9.740000E+1,1.134646E+0,-4.500000E+3,6.500000E+4 9.680000E+1,1.134242E+0,-4.500000E+3,6.500000E+4 9.640000E+1,1.133829E+0,-4.500000E+3,6.500000E+4 9.600000E+1,1.133463E+0,-4.500000E+3,6.500000E+4 9.560000E+1,1.133079E+0,-4.500000E+3,6.500000E+4 9.520000E+1,1.132738E+0,-4.500000E+3,6.500000E+4 9.480000E+1,1.132289E+0,-4.500000E+3,6.500000E+4 9.430000E+1,1.131834E+0,-4.500000E+3,6.500000E+4 9.400000E+1,1.131357E+0,-4.500000E+3,6.500000E+4 9.360000E+1,1.130958E+0,-4.500000E+3,6.500000E+4 9.320000E+1,1.130660E+0,-4.500000E+3,6.500000E+4 9.290000E+1,1.130296E+0,-4.500000E+3,6.500000E+4 9.250000E+1,1.129927E+0,-4.500000E+3,6.500000E+4 9.210000E+1,1.129597E+0,-4.500000E+3,6.500000E+4 9.170000E+1,1.129227E+0,-4.500000E+3,6.500000E+4 9.130000E+1,1.129003E+0,-4.500000E+3,6.500000E+4 9.100000E+1,1.128581E+0,-4.500000E+3,6.500000E+4 9.060000E+1,1.128174E+0,-4.500000E+3,6.500000E+4 9.030000E+1,1.127955E+0,-4.500000E+3,6.500000E+4 9.000000E+1,1.127684E+0,-4.500000E+3,6.500000E+4 8.960000E+1,1.127358E+0,-4.500000E+3,6.500000E+4 8.930000E+1,1.126979E+0,-4.500000E+3,6.500000E+4 8.890000E+1,1.126654E+0,-4.500000E+3,6.500000E+4 8.850000E+1,1.126338E+0,-4.500000E+3,6.500000E+4 8.820000E+1,1.126028E+0,-4.500000E+3,6.500000E+4 8.780000E+1,1.125713E+0,-4.500000E+3,6.500000E+4 8.750000E+1,1.125232E+0,-4.500000E+3,6.500000E+4 8.720000E+1,1.124840E+0,-4.500000E+3,6.500000E+4 8.680000E+1,1.124420E+0,-4.500000E+3,6.500000E+4 8.650000E+1,1.123956E+0,-4.500000E+3,6.500000E+4 8.610000E+1,1.123519E+0,-4.500000E+3,6.500000E+4 8.570000E+1,1.123204E+0,-4.500000E+3,6.500000E+4 8.530000E+1,1.122861E+0,-4.500000E+3,6.500000E+4 8.490000E+1,1.122458E+0,-4.500000E+3,6.500000E+4 8.460000E+1,1.121752E+0,-4.500000E+3,6.500000E+4 8.420000E+1,1.121329E+0,-4.500000E+3,6.500000E+4 8.380000E+1,1.120811E+0,-4.500000E+3,6.500000E+4 8.340000E+1,1.120080E+0,-4.500000E+3,6.500000E+4 8.300000E+1,1.119692E+0,-4.500000E+3,6.500000E+4 8.250000E+1,1.118967E+0,-4.500000E+3,6.500000E+4 8.220000E+1,1.118135E+0,-4.500000E+3,6.500000E+4 8.170000E+1,1.117451E+0,-4.500000E+3,6.500000E+4 8.140000E+1,1.116713E+0,-4.500000E+3,6.500000E+4 8.090000E+1,1.115950E+0,-4.500000E+3,6.500000E+4 8.040000E+1,1.114901E+0,-4.500000E+3,6.500000E+4 8.010000E+1,1.114226E+0,-4.500000E+3,6.500000E+4 7.960000E+1,1.113635E+0,-4.500000E+3,6.500000E+4 7.920000E+1,1.113192E+0,-4.500000E+3,6.500000E+4 7.870000E+1,1.112709E+0,-4.500000E+3,6.500000E+4 7.840000E+1,1.112080E+0,-4.500000E+3,6.500000E+4 7.790000E+1,1.111571E+0,-4.500000E+3,6.500000E+4 7.750000E+1,1.110903E+0,-4.500000E+3,6.500000E+4 7.710000E+1,1.110268E+0,-4.500000E+3,6.500000E+4 7.660000E+1,1.109819E+0,-4.500000E+3,6.500000E+4 7.630000E+1,1.109421E+0,-4.500000E+3,6.500000E+4 7.590000E+1,1.108909E+0,-4.500000E+3,6.500000E+4 7.550000E+1,1.108660E+0,-4.500000E+3,6.500000E+4 7.520000E+1,1.107896E+0,-4.500000E+3,6.500000E+4 7.480000E+1,1.107477E+0,-4.500000E+3,6.500000E+4 7.440000E+1,1.106933E+0,-4.500000E+3,6.500000E+4 7.400000E+1,1.106533E+0,-4.500000E+3,6.500000E+4 7.360000E+1,1.106144E+0,-4.500000E+3,6.500000E+4 7.320000E+1,1.105462E+0,-4.500000E+3,6.500000E+4 7.280000E+1,1.105029E+0,-4.500000E+3,6.500000E+4 7.250000E+1,1.104668E+0,-4.500000E+3,6.500000E+4 7.200000E+1,1.104156E+0,-4.500000E+3,6.500000E+4 7.170000E+1,1.103944E+0,-4.500000E+3,6.500000E+4 7.130000E+1,1.103500E+0,-4.500000E+3,6.500000E+4 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