Date:"06.12.2023" Folder:"C:\MESSUNGEN\USER\Philip" Sample-ID:"10012" Process-ID:"231129-k1-3" Measurement Current(mA):"Automatisch" Number of Loops:"2" Tmin:"-20" Tmax:"120" Trate:"5" Comment:"150nm" T, R, X, Y 1.208000E+2,1.422327E+0,0.000000E+0,6.500000E+4 1.211000E+2,1.421224E+0,0.000000E+0,6.500000E+4 1.214000E+2,1.420639E+0,0.000000E+0,6.500000E+4 1.215000E+2,1.420718E+0,0.000000E+0,6.500000E+4 1.216000E+2,1.420150E+0,0.000000E+0,6.500000E+4 1.215000E+2,1.419835E+0,0.000000E+0,6.500000E+4 1.214000E+2,1.419541E+0,0.000000E+0,6.500000E+4 1.212000E+2,1.419173E+0,0.000000E+0,6.500000E+4 1.209000E+2,1.418941E+0,0.000000E+0,6.500000E+4 1.206000E+2,1.418505E+0,0.000000E+0,6.500000E+4 1.204000E+2,1.418218E+0,0.000000E+0,6.500000E+4 1.200000E+2,1.417879E+0,0.000000E+0,6.500000E+4 1.197000E+2,1.417541E+0,0.000000E+0,6.500000E+4 1.194000E+2,1.417221E+0,0.000000E+0,6.500000E+4 1.191000E+2,1.416954E+0,0.000000E+0,6.500000E+4 1.187000E+2,1.416646E+0,0.000000E+0,6.500000E+4 1.184000E+2,1.416407E+0,0.000000E+0,6.500000E+4 1.181000E+2,1.415933E+0,0.000000E+0,6.500000E+4 1.177000E+2,1.415580E+0,0.000000E+0,6.500000E+4 1.174000E+2,1.415146E+0,0.000000E+0,6.500000E+4 1.171000E+2,1.414766E+0,0.000000E+0,6.500000E+4 1.168000E+2,1.414450E+0,0.000000E+0,6.500000E+4 1.164000E+2,1.413940E+0,0.000000E+0,6.500000E+4 1.160000E+2,1.413607E+0,0.000000E+0,6.500000E+4 1.156000E+2,1.413107E+0,0.000000E+0,6.500000E+4 1.153000E+2,1.412790E+0,0.000000E+0,6.500000E+4 1.150000E+2,1.412545E+0,0.000000E+0,6.500000E+4 1.146000E+2,1.411974E+0,0.000000E+0,6.500000E+4 1.141000E+2,1.411618E+0,0.000000E+0,6.500000E+4 1.138000E+2,1.411200E+0,0.000000E+0,6.500000E+4 1.134000E+2,1.410774E+0,0.000000E+0,6.500000E+4 1.129000E+2,1.410336E+0,0.000000E+0,6.500000E+4 1.125000E+2,1.409867E+0,0.000000E+0,6.500000E+4 1.122000E+2,1.409533E+0,0.000000E+0,6.500000E+4 1.117000E+2,1.409168E+0,0.000000E+0,6.500000E+4 1.113000E+2,1.408816E+0,0.000000E+0,6.500000E+4 1.109000E+2,1.408371E+0,0.000000E+0,6.500000E+4 1.105000E+2,1.408050E+0,0.000000E+0,6.500000E+4 1.101000E+2,1.407707E+0,0.000000E+0,6.500000E+4 1.097000E+2,1.407211E+0,0.000000E+0,6.500000E+4 1.093000E+2,1.406818E+0,0.000000E+0,6.500000E+4 1.089000E+2,1.406529E+0,0.000000E+0,6.500000E+4 1.085000E+2,1.406099E+0,0.000000E+0,6.500000E+4 1.081000E+2,1.405654E+0,0.000000E+0,6.500000E+4 1.076000E+2,1.405407E+0,0.000000E+0,6.500000E+4 1.072000E+2,1.404955E+0,0.000000E+0,6.500000E+4 1.069000E+2,1.404521E+0,0.000000E+0,6.500000E+4 1.065000E+2,1.404094E+0,0.000000E+0,6.500000E+4 1.061000E+2,1.403671E+0,0.000000E+0,6.500000E+4 1.057000E+2,1.403195E+0,0.000000E+0,6.500000E+4 1.053000E+2,1.402613E+0,0.000000E+0,6.500000E+4 1.049000E+2,1.402102E+0,0.000000E+0,6.500000E+4 1.044000E+2,1.401570E+0,0.000000E+0,6.500000E+4 1.041000E+2,1.401203E+0,0.000000E+0,6.500000E+4 1.036000E+2,1.400766E+0,0.000000E+0,6.500000E+4 1.031000E+2,1.400302E+0,0.000000E+0,6.500000E+4 1.027000E+2,1.399811E+0,0.000000E+0,6.500000E+4 1.023000E+2,1.399587E+0,0.000000E+0,6.500000E+4 1.019000E+2,1.399084E+0,0.000000E+0,6.500000E+4 1.014000E+2,1.398664E+0,0.000000E+0,6.500000E+4 1.009000E+2,1.398421E+0,0.000000E+0,6.500000E+4 1.005000E+2,1.397865E+0,0.000000E+0,6.500000E+4 1.000000E+2,1.397536E+0,0.000000E+0,6.500000E+4 9.960000E+1,1.397147E+0,0.000000E+0,6.500000E+4 9.910000E+1,1.396610E+0,0.000000E+0,6.500000E+4 9.870000E+1,1.396291E+0,0.000000E+0,6.500000E+4 9.820000E+1,1.395852E+0,0.000000E+0,6.500000E+4 9.780000E+1,1.395380E+0,0.000000E+0,6.500000E+4 9.740000E+1,1.395104E+0,0.000000E+0,6.500000E+4 9.680000E+1,1.394781E+0,0.000000E+0,6.500000E+4 9.640000E+1,1.394916E+0,0.000000E+0,6.500000E+4 9.600000E+1,1.394562E+0,0.000000E+0,6.500000E+4 9.560000E+1,1.394172E+0,0.000000E+0,6.500000E+4 9.520000E+1,1.393815E+0,0.000000E+0,6.500000E+4 9.480000E+1,1.393378E+0,0.000000E+0,6.500000E+4 9.430000E+1,1.393083E+0,0.000000E+0,6.500000E+4 9.400000E+1,1.392791E+0,0.000000E+0,6.500000E+4 9.360000E+1,1.392519E+0,0.000000E+0,6.500000E+4 9.320000E+1,1.392200E+0,0.000000E+0,6.500000E+4 9.290000E+1,1.391779E+0,0.000000E+0,6.500000E+4 9.250000E+1,1.391890E+0,0.000000E+0,6.500000E+4 9.210000E+1,1.391483E+0,0.000000E+0,6.500000E+4 9.170000E+1,1.391106E+0,0.000000E+0,6.500000E+4 9.130000E+1,1.390653E+0,0.000000E+0,6.500000E+4 9.100000E+1,1.390478E+0,0.000000E+0,6.500000E+4 9.060000E+1,1.390011E+0,0.000000E+0,6.500000E+4 9.030000E+1,1.389764E+0,0.000000E+0,6.500000E+4 9.000000E+1,1.389315E+0,0.000000E+0,6.500000E+4 8.960000E+1,1.389041E+0,0.000000E+0,6.500000E+4 8.930000E+1,1.388664E+0,0.000000E+0,6.500000E+4 8.890000E+1,1.388242E+0,0.000000E+0,6.500000E+4 8.850000E+1,1.387841E+0,0.000000E+0,6.500000E+4 8.820000E+1,1.387255E+0,0.000000E+0,6.500000E+4 8.780000E+1,1.387130E+0,0.000000E+0,6.500000E+4 8.750000E+1,1.386707E+0,0.000000E+0,6.500000E+4 8.720000E+1,1.386170E+0,0.000000E+0,6.500000E+4 8.680000E+1,1.385969E+0,0.000000E+0,6.500000E+4 8.650000E+1,1.385222E+0,0.000000E+0,6.500000E+4 8.610000E+1,1.384823E+0,0.000000E+0,6.500000E+4 8.570000E+1,1.384400E+0,0.000000E+0,6.500000E+4 8.530000E+1,1.384221E+0,0.000000E+0,6.500000E+4 8.490000E+1,1.383830E+0,0.000000E+0,6.500000E+4 8.460000E+1,1.383214E+0,0.000000E+0,6.500000E+4 8.420000E+1,1.383010E+0,0.000000E+0,6.500000E+4 8.380000E+1,1.382333E+0,0.000000E+0,6.500000E+4 8.340000E+1,1.381840E+0,0.000000E+0,6.500000E+4 8.300000E+1,1.381705E+0,0.000000E+0,6.500000E+4 8.250000E+1,1.381392E+0,0.000000E+0,6.500000E+4 8.220000E+1,1.380993E+0,0.000000E+0,6.500000E+4 8.170000E+1,1.380454E+0,0.000000E+0,6.500000E+4 8.140000E+1,1.379991E+0,0.000000E+0,6.500000E+4 8.090000E+1,1.380285E+0,0.000000E+0,6.500000E+4 8.040000E+1,1.376498E+0,0.000000E+0,6.500000E+4 8.010000E+1,1.375328E+0,0.000000E+0,6.500000E+4 7.960000E+1,1.373958E+0,0.000000E+0,6.500000E+4 7.920000E+1,1.373459E+0,0.000000E+0,6.500000E+4 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