Date:"06.12.2023" Folder:"C:\MESSUNGEN\USER\Philip" Sample-ID:"10012" Process-ID:"231129-k1-3" Measurement Current(mA):"Automatisch" Number of Loops:"2" Tmin:"-20" Tmax:"120" Trate:"5" Comment:"150nm" T, R, X, Y 2.590000E+1,1.118240E+0,-1.800000E+4,2.000000E+4 2.600000E+1,1.115811E+0,-1.800000E+4,2.000000E+4 2.600000E+1,1.115746E+0,-1.800000E+4,2.000000E+4 2.600000E+1,1.116091E+0,-1.800000E+4,2.000000E+4 2.610000E+1,1.116264E+0,-1.800000E+4,2.000000E+4 2.590000E+1,1.116210E+0,-1.800000E+4,2.000000E+4 2.590000E+1,1.116290E+0,-1.800000E+4,2.000000E+4 2.600000E+1,1.116502E+0,-1.800000E+4,2.000000E+4 2.610000E+1,1.116508E+0,-1.800000E+4,2.000000E+4 2.600000E+1,1.116540E+0,-1.800000E+4,2.000000E+4 2.600000E+1,1.116574E+0,-1.800000E+4,2.000000E+4 2.600000E+1,1.116569E+0,-1.800000E+4,2.000000E+4 2.600000E+1,1.116474E+0,-1.800000E+4,2.000000E+4 2.600000E+1,1.117652E+0,-1.800000E+4,2.000000E+4 2.610000E+1,1.117633E+0,-1.800000E+4,2.000000E+4 2.600000E+1,1.117648E+0,-1.800000E+4,2.000000E+4 2.600000E+1,1.117681E+0,-1.800000E+4,2.000000E+4 2.600000E+1,1.117704E+0,-1.800000E+4,2.000000E+4 2.600000E+1,1.117837E+0,-1.800000E+4,2.000000E+4 2.600000E+1,1.117852E+0,-1.800000E+4,2.000000E+4 2.600000E+1,1.118042E+0,-1.800000E+4,2.000000E+4 2.600000E+1,1.118407E+0,-1.800000E+4,2.000000E+4 2.610000E+1,1.118993E+0,-1.800000E+4,2.000000E+4 2.640000E+1,1.119567E+0,-1.800000E+4,2.000000E+4 2.690000E+1,1.120257E+0,-1.800000E+4,2.000000E+4 2.740000E+1,1.120844E+0,-1.800000E+4,2.000000E+4 2.800000E+1,1.121448E+0,-1.800000E+4,2.000000E+4 2.850000E+1,1.122008E+0,-1.800000E+4,2.000000E+4 2.910000E+1,1.122566E+0,-1.800000E+4,2.000000E+4 2.970000E+1,1.123253E+0,-1.800000E+4,2.000000E+4 3.030000E+1,1.123993E+0,-1.800000E+4,2.000000E+4 3.090000E+1,1.124822E+0,-1.800000E+4,2.000000E+4 3.150000E+1,1.125662E+0,-1.800000E+4,2.000000E+4 3.220000E+1,1.126317E+0,-1.800000E+4,2.000000E+4 3.290000E+1,1.126899E+0,-1.800000E+4,2.000000E+4 3.360000E+1,1.127382E+0,-1.800000E+4,2.000000E+4 3.410000E+1,1.127954E+0,-1.800000E+4,2.000000E+4 3.470000E+1,1.128420E+0,-1.800000E+4,2.000000E+4 3.530000E+1,1.128970E+0,-1.800000E+4,2.000000E+4 3.590000E+1,1.129332E+0,-1.800000E+4,2.000000E+4 3.670000E+1,1.129599E+0,-1.800000E+4,2.000000E+4 3.720000E+1,1.130236E+0,-1.800000E+4,2.000000E+4 3.790000E+1,1.130627E+0,-1.800000E+4,2.000000E+4 3.840000E+1,1.131132E+0,-1.800000E+4,2.000000E+4 3.890000E+1,1.131896E+0,-1.800000E+4,2.000000E+4 3.940000E+1,1.133145E+0,-1.800000E+4,2.000000E+4 3.990000E+1,1.133888E+0,-1.800000E+4,2.000000E+4 4.060000E+1,1.134278E+0,-1.800000E+4,2.000000E+4 4.110000E+1,1.134488E+0,-1.800000E+4,2.000000E+4 4.160000E+1,1.134440E+0,-1.800000E+4,2.000000E+4 4.210000E+1,1.134600E+0,-1.800000E+4,2.000000E+4 4.260000E+1,1.135184E+0,-1.800000E+4,2.000000E+4 4.310000E+1,1.135666E+0,-1.800000E+4,2.000000E+4 4.350000E+1,1.136315E+0,-1.800000E+4,2.000000E+4 4.410000E+1,1.136906E+0,-1.800000E+4,2.000000E+4 4.450000E+1,1.137446E+0,-1.800000E+4,2.000000E+4 4.500000E+1,1.137756E+0,-1.800000E+4,2.000000E+4 4.540000E+1,1.138040E+0,-1.800000E+4,2.000000E+4 4.590000E+1,1.138486E+0,-1.800000E+4,2.000000E+4 4.630000E+1,1.138985E+0,-1.800000E+4,2.000000E+4 4.680000E+1,1.139315E+0,-1.800000E+4,2.000000E+4 4.720000E+1,1.139629E+0,-1.800000E+4,2.000000E+4 4.760000E+1,1.140071E+0,-1.800000E+4,2.000000E+4 4.800000E+1,1.140413E+0,-1.800000E+4,2.000000E+4 4.840000E+1,1.140887E+0,-1.800000E+4,2.000000E+4 4.890000E+1,1.141386E+0,-1.800000E+4,2.000000E+4 4.930000E+1,1.141654E+0,-1.800000E+4,2.000000E+4 4.970000E+1,1.141961E+0,-1.800000E+4,2.000000E+4 5.010000E+1,1.142266E+0,-1.800000E+4,2.000000E+4 5.050000E+1,1.142502E+0,-1.800000E+4,2.000000E+4 5.090000E+1,1.142854E+0,-1.800000E+4,2.000000E+4 5.130000E+1,1.143198E+0,-1.800000E+4,2.000000E+4 5.170000E+1,1.143656E+0,-1.800000E+4,2.000000E+4 5.200000E+1,1.144008E+0,-1.800000E+4,2.000000E+4 5.240000E+1,1.144367E+0,-1.800000E+4,2.000000E+4 5.280000E+1,1.144689E+0,-1.800000E+4,2.000000E+4 5.310000E+1,1.145140E+0,-1.800000E+4,2.000000E+4 5.360000E+1,1.145551E+0,-1.800000E+4,2.000000E+4 5.400000E+1,1.145956E+0,-1.800000E+4,2.000000E+4 5.440000E+1,1.146284E+0,-1.800000E+4,2.000000E+4 5.470000E+1,1.146608E+0,-1.800000E+4,2.000000E+4 5.520000E+1,1.146840E+0,-1.800000E+4,2.000000E+4 5.550000E+1,1.147278E+0,-1.800000E+4,2.000000E+4 5.590000E+1,1.147535E+0,-1.800000E+4,2.000000E+4 5.620000E+1,1.147948E+0,-1.800000E+4,2.000000E+4 5.660000E+1,1.148338E+0,-1.800000E+4,2.000000E+4 5.700000E+1,1.148823E+0,-1.800000E+4,2.000000E+4 5.730000E+1,1.149221E+0,-1.800000E+4,2.000000E+4 5.770000E+1,1.149472E+0,-1.800000E+4,2.000000E+4 5.810000E+1,1.149899E+0,-1.800000E+4,2.000000E+4 5.850000E+1,1.150240E+0,-1.800000E+4,2.000000E+4 5.890000E+1,1.150635E+0,-1.800000E+4,2.000000E+4 5.920000E+1,1.150988E+0,-1.800000E+4,2.000000E+4 5.950000E+1,1.151284E+0,-1.800000E+4,2.000000E+4 6.000000E+1,1.151453E+0,-1.800000E+4,2.000000E+4 6.030000E+1,1.151810E+0,-1.800000E+4,2.000000E+4 6.070000E+1,1.152185E+0,-1.800000E+4,2.000000E+4 6.110000E+1,1.152412E+0,-1.800000E+4,2.000000E+4 6.140000E+1,1.152679E+0,-1.800000E+4,2.000000E+4 6.170000E+1,1.152953E+0,-1.800000E+4,2.000000E+4 6.210000E+1,1.153466E+0,-1.800000E+4,2.000000E+4 6.260000E+1,1.153895E+0,-1.800000E+4,2.000000E+4 6.290000E+1,1.154313E+0,-1.800000E+4,2.000000E+4 6.330000E+1,1.154674E+0,-1.800000E+4,2.000000E+4 6.360000E+1,1.154938E+0,-1.800000E+4,2.000000E+4 6.390000E+1,1.155164E+0,-1.800000E+4,2.000000E+4 6.430000E+1,1.155510E+0,-1.800000E+4,2.000000E+4 6.460000E+1,1.155834E+0,-1.800000E+4,2.000000E+4 6.500000E+1,1.155957E+0,-1.800000E+4,2.000000E+4 6.550000E+1,1.156389E+0,-1.800000E+4,2.000000E+4 6.580000E+1,1.156619E+0,-1.800000E+4,2.000000E+4 6.610000E+1,1.156850E+0,-1.800000E+4,2.000000E+4 6.650000E+1,1.156966E+0,-1.800000E+4,2.000000E+4 6.680000E+1,1.157248E+0,-1.800000E+4,2.000000E+4 6.720000E+1,1.157730E+0,-1.800000E+4,2.000000E+4 6.770000E+1,1.157995E+0,-1.800000E+4,2.000000E+4 6.790000E+1,1.158417E+0,-1.800000E+4,2.000000E+4 6.840000E+1,1.158752E+0,-1.800000E+4,2.000000E+4 6.860000E+1,1.159351E+0,-1.800000E+4,2.000000E+4 6.900000E+1,1.160051E+0,-1.800000E+4,2.000000E+4 6.950000E+1,1.160666E+0,-1.800000E+4,2.000000E+4 6.980000E+1,1.161088E+0,-1.800000E+4,2.000000E+4 7.020000E+1,1.161330E+0,-1.800000E+4,2.000000E+4 7.050000E+1,1.161784E+0,-1.800000E+4,2.000000E+4 7.080000E+1,1.162094E+0,-1.800000E+4,2.000000E+4 7.120000E+1,1.162397E+0,-1.800000E+4,2.000000E+4 7.150000E+1,1.162823E+0,-1.800000E+4,2.000000E+4 7.190000E+1,1.163250E+0,-1.800000E+4,2.000000E+4 7.230000E+1,1.163569E+0,-1.800000E+4,2.000000E+4 7.270000E+1,1.163881E+0,-1.800000E+4,2.000000E+4 7.310000E+1,1.164113E+0,-1.800000E+4,2.000000E+4 7.350000E+1,1.164509E+0,-1.800000E+4,2.000000E+4 7.380000E+1,1.164859E+0,-1.800000E+4,2.000000E+4 7.410000E+1,1.165425E+0,-1.800000E+4,2.000000E+4 7.450000E+1,1.165932E+0,-1.800000E+4,2.000000E+4 7.480000E+1,1.166972E+0,-1.800000E+4,2.000000E+4 7.520000E+1,1.167447E+0,-1.800000E+4,2.000000E+4 7.560000E+1,1.167718E+0,-1.800000E+4,2.000000E+4 7.600000E+1,1.168048E+0,-1.800000E+4,2.000000E+4 7.640000E+1,1.168215E+0,-1.800000E+4,2.000000E+4 7.670000E+1,1.168632E+0,-1.800000E+4,2.000000E+4 7.700000E+1,1.169135E+0,-1.800000E+4,2.000000E+4 7.740000E+1,1.169545E+0,-1.800000E+4,2.000000E+4 7.780000E+1,1.170182E+0,-1.800000E+4,2.000000E+4 7.820000E+1,1.170626E+0,-1.800000E+4,2.000000E+4 7.850000E+1,1.171006E+0,-1.800000E+4,2.000000E+4 7.880000E+1,1.171435E+0,-1.800000E+4,2.000000E+4 7.930000E+1,1.172141E+0,-1.800000E+4,2.000000E+4 7.970000E+1,1.172677E+0,-1.800000E+4,2.000000E+4 8.000000E+1,1.173252E+0,-1.800000E+4,2.000000E+4 8.040000E+1,1.173868E+0,-1.800000E+4,2.000000E+4 8.070000E+1,1.174531E+0,-1.800000E+4,2.000000E+4 8.100000E+1,1.175511E+0,-1.800000E+4,2.000000E+4 8.130000E+1,1.176064E+0,-1.800000E+4,2.000000E+4 8.180000E+1,1.178262E+0,-1.800000E+4,2.000000E+4 8.210000E+1,1.178610E+0,-1.800000E+4,2.000000E+4 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