Date:"06.12.2023" Folder:"C:\MESSUNGEN\USER\Philip" Sample-ID:"10012" Process-ID:"231129-k1-3" Measurement Current(mA):"Automatisch" Number of Loops:"2" Tmin:"-20" Tmax:"120" Trate:"5" Comment:"150nm" T, R, X, Y 2.590000E+1,1.137037E+0,-1.350000E+4,2.000000E+4 2.600000E+1,1.135812E+0,-1.350000E+4,2.000000E+4 2.600000E+1,1.136265E+0,-1.350000E+4,2.000000E+4 2.600000E+1,1.136834E+0,-1.350000E+4,2.000000E+4 2.610000E+1,1.136745E+0,-1.350000E+4,2.000000E+4 2.590000E+1,1.136671E+0,-1.350000E+4,2.000000E+4 2.590000E+1,1.136454E+0,-1.350000E+4,2.000000E+4 2.600000E+1,1.137319E+0,-1.350000E+4,2.000000E+4 2.610000E+1,1.136978E+0,-1.350000E+4,2.000000E+4 2.600000E+1,1.137046E+0,-1.350000E+4,2.000000E+4 2.600000E+1,1.137072E+0,-1.350000E+4,2.000000E+4 2.600000E+1,1.136651E+0,-1.350000E+4,2.000000E+4 2.600000E+1,1.137018E+0,-1.350000E+4,2.000000E+4 2.600000E+1,1.137453E+0,-1.350000E+4,2.000000E+4 2.610000E+1,1.137040E+0,-1.350000E+4,2.000000E+4 2.600000E+1,1.137527E+0,-1.350000E+4,2.000000E+4 2.600000E+1,1.137705E+0,-1.350000E+4,2.000000E+4 2.600000E+1,1.137773E+0,-1.350000E+4,2.000000E+4 2.600000E+1,1.137738E+0,-1.350000E+4,2.000000E+4 2.600000E+1,1.136205E+0,-1.350000E+4,2.000000E+4 2.600000E+1,1.136936E+0,-1.350000E+4,2.000000E+4 2.600000E+1,1.137613E+0,-1.350000E+4,2.000000E+4 2.610000E+1,1.138401E+0,-1.350000E+4,2.000000E+4 2.640000E+1,1.139184E+0,-1.350000E+4,2.000000E+4 2.690000E+1,1.140099E+0,-1.350000E+4,2.000000E+4 2.740000E+1,1.140936E+0,-1.350000E+4,2.000000E+4 2.800000E+1,1.141392E+0,-1.350000E+4,2.000000E+4 2.850000E+1,1.141851E+0,-1.350000E+4,2.000000E+4 2.910000E+1,1.142324E+0,-1.350000E+4,2.000000E+4 2.970000E+1,1.142809E+0,-1.350000E+4,2.000000E+4 3.030000E+1,1.143430E+0,-1.350000E+4,2.000000E+4 3.090000E+1,1.144214E+0,-1.350000E+4,2.000000E+4 3.150000E+1,1.144702E+0,-1.350000E+4,2.000000E+4 3.220000E+1,1.144994E+0,-1.350000E+4,2.000000E+4 3.290000E+1,1.145794E+0,-1.350000E+4,2.000000E+4 3.360000E+1,1.145978E+0,-1.350000E+4,2.000000E+4 3.410000E+1,1.145335E+0,-1.350000E+4,2.000000E+4 3.470000E+1,1.146193E+0,-1.350000E+4,2.000000E+4 3.530000E+1,1.148899E+0,-1.350000E+4,2.000000E+4 3.590000E+1,1.149990E+0,-1.350000E+4,2.000000E+4 3.670000E+1,1.150989E+0,-1.350000E+4,2.000000E+4 3.720000E+1,1.151842E+0,-1.350000E+4,2.000000E+4 3.790000E+1,1.149460E+0,-1.350000E+4,2.000000E+4 3.840000E+1,1.151363E+0,-1.350000E+4,2.000000E+4 3.890000E+1,1.152149E+0,-1.350000E+4,2.000000E+4 3.940000E+1,1.152545E+0,-1.350000E+4,2.000000E+4 3.990000E+1,1.153793E+0,-1.350000E+4,2.000000E+4 4.060000E+1,1.154892E+0,-1.350000E+4,2.000000E+4 4.110000E+1,1.153447E+0,-1.350000E+4,2.000000E+4 4.160000E+1,1.154190E+0,-1.350000E+4,2.000000E+4 4.210000E+1,1.154046E+0,-1.350000E+4,2.000000E+4 4.260000E+1,1.154157E+0,-1.350000E+4,2.000000E+4 4.310000E+1,1.154268E+0,-1.350000E+4,2.000000E+4 4.350000E+1,1.154672E+0,-1.350000E+4,2.000000E+4 4.410000E+1,1.155389E+0,-1.350000E+4,2.000000E+4 4.450000E+1,1.155287E+0,-1.350000E+4,2.000000E+4 4.500000E+1,1.157910E+0,-1.350000E+4,2.000000E+4 4.540000E+1,1.158638E+0,-1.350000E+4,2.000000E+4 4.590000E+1,1.158503E+0,-1.350000E+4,2.000000E+4 4.630000E+1,1.158958E+0,-1.350000E+4,2.000000E+4 4.680000E+1,1.158975E+0,-1.350000E+4,2.000000E+4 4.720000E+1,1.159189E+0,-1.350000E+4,2.000000E+4 4.760000E+1,1.160380E+0,-1.350000E+4,2.000000E+4 4.800000E+1,1.161216E+0,-1.350000E+4,2.000000E+4 4.840000E+1,1.161710E+0,-1.350000E+4,2.000000E+4 4.890000E+1,1.162608E+0,-1.350000E+4,2.000000E+4 4.930000E+1,1.162992E+0,-1.350000E+4,2.000000E+4 4.970000E+1,1.162926E+0,-1.350000E+4,2.000000E+4 5.010000E+1,1.164267E+0,-1.350000E+4,2.000000E+4 5.050000E+1,1.164345E+0,-1.350000E+4,2.000000E+4 5.090000E+1,1.164658E+0,-1.350000E+4,2.000000E+4 5.130000E+1,1.166232E+0,-1.350000E+4,2.000000E+4 5.170000E+1,1.166275E+0,-1.350000E+4,2.000000E+4 5.200000E+1,1.166924E+0,-1.350000E+4,2.000000E+4 5.240000E+1,1.167339E+0,-1.350000E+4,2.000000E+4 5.280000E+1,1.167103E+0,-1.350000E+4,2.000000E+4 5.310000E+1,1.167983E+0,-1.350000E+4,2.000000E+4 5.360000E+1,1.169191E+0,-1.350000E+4,2.000000E+4 5.400000E+1,1.169660E+0,-1.350000E+4,2.000000E+4 5.440000E+1,1.169805E+0,-1.350000E+4,2.000000E+4 5.470000E+1,1.170623E+0,-1.350000E+4,2.000000E+4 5.520000E+1,1.170993E+0,-1.350000E+4,2.000000E+4 5.550000E+1,1.168664E+0,-1.350000E+4,2.000000E+4 5.590000E+1,1.168912E+0,-1.350000E+4,2.000000E+4 5.620000E+1,1.169142E+0,-1.350000E+4,2.000000E+4 5.660000E+1,1.169744E+0,-1.350000E+4,2.000000E+4 5.700000E+1,1.170028E+0,-1.350000E+4,2.000000E+4 5.730000E+1,1.169815E+0,-1.350000E+4,2.000000E+4 5.770000E+1,1.170649E+0,-1.350000E+4,2.000000E+4 5.810000E+1,1.170947E+0,-1.350000E+4,2.000000E+4 5.850000E+1,1.171236E+0,-1.350000E+4,2.000000E+4 5.890000E+1,1.171606E+0,-1.350000E+4,2.000000E+4 5.920000E+1,1.172208E+0,-1.350000E+4,2.000000E+4 5.950000E+1,1.172481E+0,-1.350000E+4,2.000000E+4 6.000000E+1,1.172765E+0,-1.350000E+4,2.000000E+4 6.030000E+1,1.172694E+0,-1.350000E+4,2.000000E+4 6.070000E+1,1.173283E+0,-1.350000E+4,2.000000E+4 6.110000E+1,1.174063E+0,-1.350000E+4,2.000000E+4 6.140000E+1,1.174342E+0,-1.350000E+4,2.000000E+4 6.170000E+1,1.174698E+0,-1.350000E+4,2.000000E+4 6.210000E+1,1.175037E+0,-1.350000E+4,2.000000E+4 6.260000E+1,1.175753E+0,-1.350000E+4,2.000000E+4 6.290000E+1,1.176419E+0,-1.350000E+4,2.000000E+4 6.330000E+1,1.176782E+0,-1.350000E+4,2.000000E+4 6.360000E+1,1.177280E+0,-1.350000E+4,2.000000E+4 6.390000E+1,1.177511E+0,-1.350000E+4,2.000000E+4 6.430000E+1,1.177807E+0,-1.350000E+4,2.000000E+4 6.460000E+1,1.178423E+0,-1.350000E+4,2.000000E+4 6.500000E+1,1.178509E+0,-1.350000E+4,2.000000E+4 6.550000E+1,1.179240E+0,-1.350000E+4,2.000000E+4 6.580000E+1,1.178273E+0,-1.350000E+4,2.000000E+4 6.610000E+1,1.178507E+0,-1.350000E+4,2.000000E+4 6.650000E+1,1.178906E+0,-1.350000E+4,2.000000E+4 6.680000E+1,1.179067E+0,-1.350000E+4,2.000000E+4 6.720000E+1,1.179521E+0,-1.350000E+4,2.000000E+4 6.770000E+1,1.180046E+0,-1.350000E+4,2.000000E+4 6.790000E+1,1.180510E+0,-1.350000E+4,2.000000E+4 6.840000E+1,1.181016E+0,-1.350000E+4,2.000000E+4 6.860000E+1,1.180937E+0,-1.350000E+4,2.000000E+4 6.900000E+1,1.181158E+0,-1.350000E+4,2.000000E+4 6.950000E+1,1.181625E+0,-1.350000E+4,2.000000E+4 6.980000E+1,1.182026E+0,-1.350000E+4,2.000000E+4 7.020000E+1,1.182154E+0,-1.350000E+4,2.000000E+4 7.050000E+1,1.182458E+0,-1.350000E+4,2.000000E+4 7.080000E+1,1.182726E+0,-1.350000E+4,2.000000E+4 7.120000E+1,1.182906E+0,-1.350000E+4,2.000000E+4 7.150000E+1,1.183495E+0,-1.350000E+4,2.000000E+4 7.190000E+1,1.183807E+0,-1.350000E+4,2.000000E+4 7.230000E+1,1.184289E+0,-1.350000E+4,2.000000E+4 7.270000E+1,1.184864E+0,-1.350000E+4,2.000000E+4 7.310000E+1,1.185618E+0,-1.350000E+4,2.000000E+4 7.350000E+1,1.186436E+0,-1.350000E+4,2.000000E+4 7.380000E+1,1.186878E+0,-1.350000E+4,2.000000E+4 7.410000E+1,1.187148E+0,-1.350000E+4,2.000000E+4 7.450000E+1,1.187560E+0,-1.350000E+4,2.000000E+4 7.480000E+1,1.188147E+0,-1.350000E+4,2.000000E+4 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