Date:"06.12.2023" Folder:"C:\MESSUNGEN\USER\Philip" Sample-ID:"10012" Process-ID:"231129-k1-3" Measurement Current(mA):"Automatisch" Number of Loops:"2" Tmin:"-20" Tmax:"120" Trate:"5" Comment:"150nm" T, R, X, Y 2.590000E+1,1.382201E+0,-9.000000E+3,2.000000E+4 2.600000E+1,1.381732E+0,-9.000000E+3,2.000000E+4 2.600000E+1,1.382874E+0,-9.000000E+3,2.000000E+4 2.600000E+1,1.381941E+0,-9.000000E+3,2.000000E+4 2.610000E+1,1.380766E+0,-9.000000E+3,2.000000E+4 2.590000E+1,1.381847E+0,-9.000000E+3,2.000000E+4 2.590000E+1,1.381058E+0,-9.000000E+3,2.000000E+4 2.600000E+1,1.380344E+0,-9.000000E+3,2.000000E+4 2.610000E+1,1.380756E+0,-9.000000E+3,2.000000E+4 2.600000E+1,1.380158E+0,-9.000000E+3,2.000000E+4 2.600000E+1,1.381012E+0,-9.000000E+3,2.000000E+4 2.600000E+1,1.381109E+0,-9.000000E+3,2.000000E+4 2.600000E+1,1.381101E+0,-9.000000E+3,2.000000E+4 2.600000E+1,1.380945E+0,-9.000000E+3,2.000000E+4 2.610000E+1,1.380849E+0,-9.000000E+3,2.000000E+4 2.600000E+1,1.380694E+0,-9.000000E+3,2.000000E+4 2.600000E+1,1.380100E+0,-9.000000E+3,2.000000E+4 2.600000E+1,1.380455E+0,-9.000000E+3,2.000000E+4 2.600000E+1,1.379891E+0,-9.000000E+3,2.000000E+4 2.600000E+1,1.380030E+0,-9.000000E+3,2.000000E+4 2.600000E+1,1.379949E+0,-9.000000E+3,2.000000E+4 2.600000E+1,1.380238E+0,-9.000000E+3,2.000000E+4 2.610000E+1,1.380911E+0,-9.000000E+3,2.000000E+4 2.640000E+1,1.381689E+0,-9.000000E+3,2.000000E+4 2.690000E+1,1.382208E+0,-9.000000E+3,2.000000E+4 2.740000E+1,1.382950E+0,-9.000000E+3,2.000000E+4 2.800000E+1,1.383597E+0,-9.000000E+3,2.000000E+4 2.850000E+1,1.383991E+0,-9.000000E+3,2.000000E+4 2.910000E+1,1.384696E+0,-9.000000E+3,2.000000E+4 2.970000E+1,1.385247E+0,-9.000000E+3,2.000000E+4 3.030000E+1,1.386240E+0,-9.000000E+3,2.000000E+4 3.090000E+1,1.387145E+0,-9.000000E+3,2.000000E+4 3.150000E+1,1.387871E+0,-9.000000E+3,2.000000E+4 3.220000E+1,1.388722E+0,-9.000000E+3,2.000000E+4 3.290000E+1,1.389467E+0,-9.000000E+3,2.000000E+4 3.360000E+1,1.390162E+0,-9.000000E+3,2.000000E+4 3.410000E+1,1.390702E+0,-9.000000E+3,2.000000E+4 3.470000E+1,1.391830E+0,-9.000000E+3,2.000000E+4 3.530000E+1,1.393030E+0,-9.000000E+3,2.000000E+4 3.590000E+1,1.393939E+0,-9.000000E+3,2.000000E+4 3.670000E+1,1.394759E+0,-9.000000E+3,2.000000E+4 3.720000E+1,1.395512E+0,-9.000000E+3,2.000000E+4 3.790000E+1,1.396207E+0,-9.000000E+3,2.000000E+4 3.840000E+1,1.396513E+0,-9.000000E+3,2.000000E+4 3.890000E+1,1.396855E+0,-9.000000E+3,2.000000E+4 3.940000E+1,1.398201E+0,-9.000000E+3,2.000000E+4 3.990000E+1,1.399552E+0,-9.000000E+3,2.000000E+4 4.060000E+1,1.400190E+0,-9.000000E+3,2.000000E+4 4.110000E+1,1.400740E+0,-9.000000E+3,2.000000E+4 4.160000E+1,1.401198E+0,-9.000000E+3,2.000000E+4 4.210000E+1,1.401831E+0,-9.000000E+3,2.000000E+4 4.260000E+1,1.402617E+0,-9.000000E+3,2.000000E+4 4.310000E+1,1.403040E+0,-9.000000E+3,2.000000E+4 4.350000E+1,1.403527E+0,-9.000000E+3,2.000000E+4 4.410000E+1,1.404166E+0,-9.000000E+3,2.000000E+4 4.450000E+1,1.404599E+0,-9.000000E+3,2.000000E+4 4.500000E+1,1.405185E+0,-9.000000E+3,2.000000E+4 4.540000E+1,1.405879E+0,-9.000000E+3,2.000000E+4 4.590000E+1,1.406431E+0,-9.000000E+3,2.000000E+4 4.630000E+1,1.406998E+0,-9.000000E+3,2.000000E+4 4.680000E+1,1.407471E+0,-9.000000E+3,2.000000E+4 4.720000E+1,1.407865E+0,-9.000000E+3,2.000000E+4 4.760000E+1,1.408447E+0,-9.000000E+3,2.000000E+4 4.800000E+1,1.409039E+0,-9.000000E+3,2.000000E+4 4.840000E+1,1.409810E+0,-9.000000E+3,2.000000E+4 4.890000E+1,1.410264E+0,-9.000000E+3,2.000000E+4 4.930000E+1,1.410766E+0,-9.000000E+3,2.000000E+4 4.970000E+1,1.411180E+0,-9.000000E+3,2.000000E+4 5.010000E+1,1.411387E+0,-9.000000E+3,2.000000E+4 5.050000E+1,1.411853E+0,-9.000000E+3,2.000000E+4 5.090000E+1,1.412333E+0,-9.000000E+3,2.000000E+4 5.130000E+1,1.412748E+0,-9.000000E+3,2.000000E+4 5.170000E+1,1.413157E+0,-9.000000E+3,2.000000E+4 5.200000E+1,1.413612E+0,-9.000000E+3,2.000000E+4 5.240000E+1,1.413872E+0,-9.000000E+3,2.000000E+4 5.280000E+1,1.414279E+0,-9.000000E+3,2.000000E+4 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