Date:"06.12.2023" Folder:"C:\MESSUNGEN\USER\Philip" Sample-ID:"10012" Process-ID:"231129-k1-3" Measurement Current(mA):"Automatisch" Number of Loops:"2" Tmin:"-20" Tmax:"120" Trate:"5" Comment:"150nm" T, R, X, Y 2.590000E+1,1.080315E+0,-4.500000E+3,2.000000E+4 2.600000E+1,1.080324E+0,-4.500000E+3,2.000000E+4 2.600000E+1,1.080334E+0,-4.500000E+3,2.000000E+4 2.600000E+1,1.080333E+0,-4.500000E+3,2.000000E+4 2.610000E+1,1.080326E+0,-4.500000E+3,2.000000E+4 2.590000E+1,1.080326E+0,-4.500000E+3,2.000000E+4 2.590000E+1,1.080320E+0,-4.500000E+3,2.000000E+4 2.600000E+1,1.080328E+0,-4.500000E+3,2.000000E+4 2.610000E+1,1.080310E+0,-4.500000E+3,2.000000E+4 2.600000E+1,1.080319E+0,-4.500000E+3,2.000000E+4 2.600000E+1,1.080311E+0,-4.500000E+3,2.000000E+4 2.600000E+1,1.080425E+0,-4.500000E+3,2.000000E+4 2.600000E+1,1.080426E+0,-4.500000E+3,2.000000E+4 2.600000E+1,1.080416E+0,-4.500000E+3,2.000000E+4 2.610000E+1,1.080444E+0,-4.500000E+3,2.000000E+4 2.600000E+1,1.080220E+0,-4.500000E+3,2.000000E+4 2.600000E+1,1.080071E+0,-4.500000E+3,2.000000E+4 2.600000E+1,1.080055E+0,-4.500000E+3,2.000000E+4 2.600000E+1,1.080078E+0,-4.500000E+3,2.000000E+4 2.600000E+1,1.080082E+0,-4.500000E+3,2.000000E+4 2.600000E+1,1.080116E+0,-4.500000E+3,2.000000E+4 2.600000E+1,1.080341E+0,-4.500000E+3,2.000000E+4 2.610000E+1,1.080367E+0,-4.500000E+3,2.000000E+4 2.640000E+1,1.080950E+0,-4.500000E+3,2.000000E+4 2.690000E+1,1.081544E+0,-4.500000E+3,2.000000E+4 2.740000E+1,1.082069E+0,-4.500000E+3,2.000000E+4 2.800000E+1,1.082597E+0,-4.500000E+3,2.000000E+4 2.850000E+1,1.083054E+0,-4.500000E+3,2.000000E+4 2.910000E+1,1.083607E+0,-4.500000E+3,2.000000E+4 2.970000E+1,1.084259E+0,-4.500000E+3,2.000000E+4 3.030000E+1,1.084830E+0,-4.500000E+3,2.000000E+4 3.090000E+1,1.085330E+0,-4.500000E+3,2.000000E+4 3.150000E+1,1.085971E+0,-4.500000E+3,2.000000E+4 3.220000E+1,1.086686E+0,-4.500000E+3,2.000000E+4 3.290000E+1,1.087199E+0,-4.500000E+3,2.000000E+4 3.360000E+1,1.087661E+0,-4.500000E+3,2.000000E+4 3.410000E+1,1.088188E+0,-4.500000E+3,2.000000E+4 3.470000E+1,1.088666E+0,-4.500000E+3,2.000000E+4 3.530000E+1,1.089342E+0,-4.500000E+3,2.000000E+4 3.590000E+1,1.089946E+0,-4.500000E+3,2.000000E+4 3.670000E+1,1.090507E+0,-4.500000E+3,2.000000E+4 3.720000E+1,1.091057E+0,-4.500000E+3,2.000000E+4 3.790000E+1,1.091560E+0,-4.500000E+3,2.000000E+4 3.840000E+1,1.092038E+0,-4.500000E+3,2.000000E+4 3.890000E+1,1.092731E+0,-4.500000E+3,2.000000E+4 3.940000E+1,1.093446E+0,-4.500000E+3,2.000000E+4 3.990000E+1,1.094072E+0,-4.500000E+3,2.000000E+4 4.060000E+1,1.094614E+0,-4.500000E+3,2.000000E+4 4.110000E+1,1.095052E+0,-4.500000E+3,2.000000E+4 4.160000E+1,1.095419E+0,-4.500000E+3,2.000000E+4 4.210000E+1,1.095889E+0,-4.500000E+3,2.000000E+4 4.260000E+1,1.096399E+0,-4.500000E+3,2.000000E+4 4.310000E+1,1.096912E+0,-4.500000E+3,2.000000E+4 4.350000E+1,1.097345E+0,-4.500000E+3,2.000000E+4 4.410000E+1,1.097879E+0,-4.500000E+3,2.000000E+4 4.450000E+1,1.098309E+0,-4.500000E+3,2.000000E+4 4.500000E+1,1.098806E+0,-4.500000E+3,2.000000E+4 4.540000E+1,1.099225E+0,-4.500000E+3,2.000000E+4 4.590000E+1,1.099613E+0,-4.500000E+3,2.000000E+4 4.630000E+1,1.099987E+0,-4.500000E+3,2.000000E+4 4.680000E+1,1.100397E+0,-4.500000E+3,2.000000E+4 4.720000E+1,1.100761E+0,-4.500000E+3,2.000000E+4 4.760000E+1,1.101184E+0,-4.500000E+3,2.000000E+4 4.800000E+1,1.101614E+0,-4.500000E+3,2.000000E+4 4.840000E+1,1.101949E+0,-4.500000E+3,2.000000E+4 4.890000E+1,1.102341E+0,-4.500000E+3,2.000000E+4 4.930000E+1,1.102675E+0,-4.500000E+3,2.000000E+4 4.970000E+1,1.102970E+0,-4.500000E+3,2.000000E+4 5.010000E+1,1.103260E+0,-4.500000E+3,2.000000E+4 5.050000E+1,1.103613E+0,-4.500000E+3,2.000000E+4 5.090000E+1,1.103973E+0,-4.500000E+3,2.000000E+4 5.130000E+1,1.104403E+0,-4.500000E+3,2.000000E+4 5.170000E+1,1.104712E+0,-4.500000E+3,2.000000E+4 5.200000E+1,1.105056E+0,-4.500000E+3,2.000000E+4 5.240000E+1,1.105391E+0,-4.500000E+3,2.000000E+4 5.280000E+1,1.105770E+0,-4.500000E+3,2.000000E+4 5.310000E+1,1.106091E+0,-4.500000E+3,2.000000E+4 5.360000E+1,1.106451E+0,-4.500000E+3,2.000000E+4 5.400000E+1,1.106782E+0,-4.500000E+3,2.000000E+4 5.440000E+1,1.107094E+0,-4.500000E+3,2.000000E+4 5.470000E+1,1.107440E+0,-4.500000E+3,2.000000E+4 5.520000E+1,1.107752E+0,-4.500000E+3,2.000000E+4 5.550000E+1,1.108082E+0,-4.500000E+3,2.000000E+4 5.590000E+1,1.108396E+0,-4.500000E+3,2.000000E+4 5.620000E+1,1.108771E+0,-4.500000E+3,2.000000E+4 5.660000E+1,1.109119E+0,-4.500000E+3,2.000000E+4 5.700000E+1,1.109474E+0,-4.500000E+3,2.000000E+4 5.730000E+1,1.109747E+0,-4.500000E+3,2.000000E+4 5.770000E+1,1.110038E+0,-4.500000E+3,2.000000E+4 5.810000E+1,1.110342E+0,-4.500000E+3,2.000000E+4 5.850000E+1,1.110661E+0,-4.500000E+3,2.000000E+4 5.890000E+1,1.110932E+0,-4.500000E+3,2.000000E+4 5.920000E+1,1.111254E+0,-4.500000E+3,2.000000E+4 5.950000E+1,1.111525E+0,-4.500000E+3,2.000000E+4 6.000000E+1,1.111778E+0,-4.500000E+3,2.000000E+4 6.030000E+1,1.112043E+0,-4.500000E+3,2.000000E+4 6.070000E+1,1.112424E+0,-4.500000E+3,2.000000E+4 6.110000E+1,1.112730E+0,-4.500000E+3,2.000000E+4 6.140000E+1,1.113104E+0,-4.500000E+3,2.000000E+4 6.170000E+1,1.113524E+0,-4.500000E+3,2.000000E+4 6.210000E+1,1.113837E+0,-4.500000E+3,2.000000E+4 6.260000E+1,1.114085E+0,-4.500000E+3,2.000000E+4 6.290000E+1,1.114370E+0,-4.500000E+3,2.000000E+4 6.330000E+1,1.114655E+0,-4.500000E+3,2.000000E+4 6.360000E+1,1.114903E+0,-4.500000E+3,2.000000E+4 6.390000E+1,1.115208E+0,-4.500000E+3,2.000000E+4 6.430000E+1,1.115571E+0,-4.500000E+3,2.000000E+4 6.460000E+1,1.115930E+0,-4.500000E+3,2.000000E+4 6.500000E+1,1.116252E+0,-4.500000E+3,2.000000E+4 6.550000E+1,1.116526E+0,-4.500000E+3,2.000000E+4 6.580000E+1,1.116836E+0,-4.500000E+3,2.000000E+4 6.610000E+1,1.117136E+0,-4.500000E+3,2.000000E+4 6.650000E+1,1.117467E+0,-4.500000E+3,2.000000E+4 6.680000E+1,1.117795E+0,-4.500000E+3,2.000000E+4 6.720000E+1,1.118175E+0,-4.500000E+3,2.000000E+4 6.770000E+1,1.118478E+0,-4.500000E+3,2.000000E+4 6.790000E+1,1.118762E+0,-4.500000E+3,2.000000E+4 6.840000E+1,1.119036E+0,-4.500000E+3,2.000000E+4 6.860000E+1,1.119368E+0,-4.500000E+3,2.000000E+4 6.900000E+1,1.119704E+0,-4.500000E+3,2.000000E+4 6.950000E+1,1.120090E+0,-4.500000E+3,2.000000E+4 6.980000E+1,1.120376E+0,-4.500000E+3,2.000000E+4 7.020000E+1,1.120544E+0,-4.500000E+3,2.000000E+4 7.050000E+1,1.120817E+0,-4.500000E+3,2.000000E+4 7.080000E+1,1.121122E+0,-4.500000E+3,2.000000E+4 7.120000E+1,1.121426E+0,-4.500000E+3,2.000000E+4 7.150000E+1,1.121694E+0,-4.500000E+3,2.000000E+4 7.190000E+1,1.122072E+0,-4.500000E+3,2.000000E+4 7.230000E+1,1.122445E+0,-4.500000E+3,2.000000E+4 7.270000E+1,1.122760E+0,-4.500000E+3,2.000000E+4 7.310000E+1,1.123062E+0,-4.500000E+3,2.000000E+4 7.350000E+1,1.123310E+0,-4.500000E+3,2.000000E+4 7.380000E+1,1.123552E+0,-4.500000E+3,2.000000E+4 7.410000E+1,1.123852E+0,-4.500000E+3,2.000000E+4 7.450000E+1,1.124164E+0,-4.500000E+3,2.000000E+4 7.480000E+1,1.124497E+0,-4.500000E+3,2.000000E+4 7.520000E+1,1.124839E+0,-4.500000E+3,2.000000E+4 7.560000E+1,1.125168E+0,-4.500000E+3,2.000000E+4 7.600000E+1,1.125509E+0,-4.500000E+3,2.000000E+4 7.640000E+1,1.125828E+0,-4.500000E+3,2.000000E+4 7.670000E+1,1.126128E+0,-4.500000E+3,2.000000E+4 7.700000E+1,1.126445E+0,-4.500000E+3,2.000000E+4 7.740000E+1,1.126791E+0,-4.500000E+3,2.000000E+4 7.780000E+1,1.127165E+0,-4.500000E+3,2.000000E+4 7.820000E+1,1.127459E+0,-4.500000E+3,2.000000E+4 7.850000E+1,1.127806E+0,-4.500000E+3,2.000000E+4 7.880000E+1,1.128175E+0,-4.500000E+3,2.000000E+4 7.930000E+1,1.128495E+0,-4.500000E+3,2.000000E+4 7.970000E+1,1.128783E+0,-4.500000E+3,2.000000E+4 8.000000E+1,1.129053E+0,-4.500000E+3,2.000000E+4 8.040000E+1,1.129354E+0,-4.500000E+3,2.000000E+4 8.070000E+1,1.129677E+0,-4.500000E+3,2.000000E+4 8.100000E+1,1.130055E+0,-4.500000E+3,2.000000E+4 8.130000E+1,1.130444E+0,-4.500000E+3,2.000000E+4 8.180000E+1,1.130821E+0,-4.500000E+3,2.000000E+4 8.210000E+1,1.131149E+0,-4.500000E+3,2.000000E+4 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