Date:"06.12.2023" Folder:"C:\MESSUNGEN\USER\Philip" Sample-ID:"10012" Process-ID:"231129-k1-3" Measurement Current(mA):"Automatisch" Number of Loops:"2" Tmin:"-20" Tmax:"120" Trate:"5" Comment:"150nm" T, R, X, Y 1.207000E+2,1.254941E+0,1.700000E+4,4.000000E+4 1.210000E+2,1.252235E+0,1.700000E+4,4.000000E+4 1.213000E+2,1.252448E+0,1.700000E+4,4.000000E+4 1.214000E+2,1.252391E+0,1.700000E+4,4.000000E+4 1.214000E+2,1.252190E+0,1.700000E+4,4.000000E+4 1.215000E+2,1.251961E+0,1.700000E+4,4.000000E+4 1.213000E+2,1.251626E+0,1.700000E+4,4.000000E+4 1.211000E+2,1.251418E+0,1.700000E+4,4.000000E+4 1.208000E+2,1.251182E+0,1.700000E+4,4.000000E+4 1.205000E+2,1.251015E+0,1.700000E+4,4.000000E+4 1.203000E+2,1.250733E+0,1.700000E+4,4.000000E+4 1.199000E+2,1.250505E+0,1.700000E+4,4.000000E+4 1.196000E+2,1.250178E+0,1.700000E+4,4.000000E+4 1.193000E+2,1.249753E+0,1.700000E+4,4.000000E+4 1.190000E+2,1.249379E+0,1.700000E+4,4.000000E+4 1.186000E+2,1.248994E+0,1.700000E+4,4.000000E+4 1.183000E+2,1.248673E+0,1.700000E+4,4.000000E+4 1.179000E+2,1.248147E+0,1.700000E+4,4.000000E+4 1.176000E+2,1.247762E+0,1.700000E+4,4.000000E+4 1.173000E+2,1.247284E+0,1.700000E+4,4.000000E+4 1.169000E+2,1.246750E+0,1.700000E+4,4.000000E+4 1.165000E+2,1.246415E+0,1.700000E+4,4.000000E+4 1.162000E+2,1.245845E+0,1.700000E+4,4.000000E+4 1.158000E+2,1.245247E+0,1.700000E+4,4.000000E+4 1.154000E+2,1.245138E+0,1.700000E+4,4.000000E+4 1.151000E+2,1.245316E+0,1.700000E+4,4.000000E+4 1.147000E+2,1.244930E+0,1.700000E+4,4.000000E+4 1.144000E+2,1.245282E+0,1.700000E+4,4.000000E+4 1.139000E+2,1.244873E+0,1.700000E+4,4.000000E+4 1.136000E+2,1.244766E+0,1.700000E+4,4.000000E+4 1.132000E+2,1.244463E+0,1.700000E+4,4.000000E+4 1.128000E+2,1.243943E+0,1.700000E+4,4.000000E+4 1.124000E+2,1.243442E+0,1.700000E+4,4.000000E+4 1.120000E+2,1.242727E+0,1.700000E+4,4.000000E+4 1.117000E+2,1.241949E+0,1.700000E+4,4.000000E+4 1.112000E+2,1.241115E+0,1.700000E+4,4.000000E+4 1.109000E+2,1.240257E+0,1.700000E+4,4.000000E+4 1.105000E+2,1.239149E+0,1.700000E+4,4.000000E+4 1.101000E+2,1.238986E+0,1.700000E+4,4.000000E+4 1.097000E+2,1.238561E+0,1.700000E+4,4.000000E+4 1.093000E+2,1.237653E+0,1.700000E+4,4.000000E+4 1.089000E+2,1.237533E+0,1.700000E+4,4.000000E+4 1.085000E+2,1.242569E+0,1.700000E+4,4.000000E+4 1.082000E+2,1.242150E+0,1.700000E+4,4.000000E+4 1.078000E+2,1.241251E+0,1.700000E+4,4.000000E+4 1.073000E+2,1.240757E+0,1.700000E+4,4.000000E+4 1.069000E+2,1.240003E+0,1.700000E+4,4.000000E+4 1.065000E+2,1.239566E+0,1.700000E+4,4.000000E+4 1.061000E+2,1.239051E+0,1.700000E+4,4.000000E+4 1.057000E+2,1.238355E+0,1.700000E+4,4.000000E+4 1.053000E+2,1.237260E+0,1.700000E+4,4.000000E+4 1.048000E+2,1.233381E+0,1.700000E+4,4.000000E+4 1.044000E+2,1.232780E+0,1.700000E+4,4.000000E+4 1.040000E+2,1.232361E+0,1.700000E+4,4.000000E+4 1.036000E+2,1.231688E+0,1.700000E+4,4.000000E+4 1.031000E+2,1.231302E+0,1.700000E+4,4.000000E+4 1.026000E+2,1.230704E+0,1.700000E+4,4.000000E+4 1.022000E+2,1.230239E+0,1.700000E+4,4.000000E+4 1.017000E+2,1.229859E+0,1.700000E+4,4.000000E+4 1.013000E+2,1.229397E+0,1.700000E+4,4.000000E+4 1.008000E+2,1.228591E+0,1.700000E+4,4.000000E+4 1.004000E+2,1.228250E+0,1.700000E+4,4.000000E+4 9.980000E+1,1.227866E+0,1.700000E+4,4.000000E+4 9.940000E+1,1.227597E+0,1.700000E+4,4.000000E+4 9.890000E+1,1.227017E+0,1.700000E+4,4.000000E+4 9.850000E+1,1.226611E+0,1.700000E+4,4.000000E+4 9.800000E+1,1.226020E+0,1.700000E+4,4.000000E+4 9.750000E+1,1.225756E+0,1.700000E+4,4.000000E+4 9.700000E+1,1.225571E+0,1.700000E+4,4.000000E+4 9.660000E+1,1.225770E+0,1.700000E+4,4.000000E+4 9.620000E+1,1.225728E+0,1.700000E+4,4.000000E+4 9.570000E+1,1.225560E+0,1.700000E+4,4.000000E+4 9.520000E+1,1.226043E+0,1.700000E+4,4.000000E+4 9.480000E+1,1.225735E+0,1.700000E+4,4.000000E+4 9.440000E+1,1.225598E+0,1.700000E+4,4.000000E+4 9.400000E+1,1.225733E+0,1.700000E+4,4.000000E+4 9.350000E+1,1.225281E+0,1.700000E+4,4.000000E+4 9.300000E+1,1.225745E+0,1.700000E+4,4.000000E+4 9.270000E+1,1.224416E+0,1.700000E+4,4.000000E+4 9.240000E+1,1.224279E+0,1.700000E+4,4.000000E+4 9.190000E+1,1.224311E+0,1.700000E+4,4.000000E+4 9.160000E+1,1.224209E+0,1.700000E+4,4.000000E+4 9.110000E+1,1.223655E+0,1.700000E+4,4.000000E+4 9.080000E+1,1.222474E+0,1.700000E+4,4.000000E+4 9.050000E+1,1.223280E+0,1.700000E+4,4.000000E+4 9.010000E+1,1.223124E+0,1.700000E+4,4.000000E+4 8.980000E+1,1.223307E+0,1.700000E+4,4.000000E+4 8.940000E+1,1.223104E+0,1.700000E+4,4.000000E+4 8.920000E+1,1.223198E+0,1.700000E+4,4.000000E+4 8.880000E+1,1.222603E+0,1.700000E+4,4.000000E+4 8.850000E+1,1.223184E+0,1.700000E+4,4.000000E+4 8.820000E+1,1.222857E+0,1.700000E+4,4.000000E+4 8.780000E+1,1.222887E+0,1.700000E+4,4.000000E+4 8.750000E+1,1.222830E+0,1.700000E+4,4.000000E+4 8.710000E+1,1.222779E+0,1.700000E+4,4.000000E+4 8.680000E+1,1.222393E+0,1.700000E+4,4.000000E+4 8.640000E+1,1.222193E+0,1.700000E+4,4.000000E+4 8.610000E+1,1.221923E+0,1.700000E+4,4.000000E+4 8.580000E+1,1.221595E+0,1.700000E+4,4.000000E+4 8.550000E+1,1.221102E+0,1.700000E+4,4.000000E+4 8.510000E+1,1.220849E+0,1.700000E+4,4.000000E+4 8.480000E+1,1.220567E+0,1.700000E+4,4.000000E+4 8.450000E+1,1.220111E+0,1.700000E+4,4.000000E+4 8.420000E+1,1.219746E+0,1.700000E+4,4.000000E+4 8.390000E+1,1.219319E+0,1.700000E+4,4.000000E+4 8.350000E+1,1.219007E+0,1.700000E+4,4.000000E+4 8.320000E+1,1.218827E+0,1.700000E+4,4.000000E+4 8.290000E+1,1.218089E+0,1.700000E+4,4.000000E+4 8.250000E+1,1.217939E+0,1.700000E+4,4.000000E+4 8.220000E+1,1.217797E+0,1.700000E+4,4.000000E+4 8.190000E+1,1.217540E+0,1.700000E+4,4.000000E+4 8.150000E+1,1.217484E+0,1.700000E+4,4.000000E+4 8.110000E+1,1.217372E+0,1.700000E+4,4.000000E+4 8.070000E+1,1.217186E+0,1.700000E+4,4.000000E+4 8.030000E+1,1.217008E+0,1.700000E+4,4.000000E+4 8.000000E+1,1.216716E+0,1.700000E+4,4.000000E+4 7.960000E+1,1.216836E+0,1.700000E+4,4.000000E+4 7.910000E+1,1.225809E+0,1.700000E+4,4.000000E+4 7.870000E+1,1.225663E+0,1.700000E+4,4.000000E+4 7.830000E+1,1.225639E+0,1.700000E+4,4.000000E+4 7.790000E+1,1.225207E+0,1.700000E+4,4.000000E+4 7.750000E+1,1.224545E+0,1.700000E+4,4.000000E+4 7.710000E+1,1.224448E+0,1.700000E+4,4.000000E+4 7.660000E+1,1.223688E+0,1.700000E+4,4.000000E+4 7.620000E+1,1.222651E+0,1.700000E+4,4.000000E+4 7.570000E+1,1.222268E+0,1.700000E+4,4.000000E+4 7.530000E+1,1.221663E+0,1.700000E+4,4.000000E+4 7.480000E+1,1.221438E+0,1.700000E+4,4.000000E+4 7.450000E+1,1.221228E+0,1.700000E+4,4.000000E+4 7.400000E+1,1.221054E+0,1.700000E+4,4.000000E+4 7.360000E+1,1.221078E+0,1.700000E+4,4.000000E+4 7.310000E+1,1.221123E+0,1.700000E+4,4.000000E+4 7.270000E+1,1.220919E+0,1.700000E+4,4.000000E+4 7.230000E+1,1.220513E+0,1.700000E+4,4.000000E+4 7.180000E+1,1.220393E+0,1.700000E+4,4.000000E+4 7.150000E+1,1.220423E+0,1.700000E+4,4.000000E+4 7.110000E+1,1.220047E+0,1.700000E+4,4.000000E+4 7.070000E+1,1.219834E+0,1.700000E+4,4.000000E+4 7.020000E+1,1.219761E+0,1.700000E+4,4.000000E+4 6.990000E+1,1.219570E+0,1.700000E+4,4.000000E+4 6.960000E+1,1.219710E+0,1.700000E+4,4.000000E+4 6.910000E+1,1.219569E+0,1.700000E+4,4.000000E+4 6.870000E+1,1.219433E+0,1.700000E+4,4.000000E+4 6.830000E+1,1.219676E+0,1.700000E+4,4.000000E+4 6.790000E+1,1.219300E+0,1.700000E+4,4.000000E+4 6.760000E+1,1.219077E+0,1.700000E+4,4.000000E+4 6.720000E+1,1.219131E+0,1.700000E+4,4.000000E+4 6.680000E+1,1.218499E+0,1.700000E+4,4.000000E+4 6.650000E+1,1.218457E+0,1.700000E+4,4.000000E+4 6.610000E+1,1.218764E+0,1.700000E+4,4.000000E+4 6.590000E+1,1.218765E+0,1.700000E+4,4.000000E+4 6.540000E+1,1.219051E+0,1.700000E+4,4.000000E+4 6.510000E+1,1.219536E+0,1.700000E+4,4.000000E+4 6.470000E+1,1.219610E+0,1.700000E+4,4.000000E+4 6.440000E+1,1.219301E+0,1.700000E+4,4.000000E+4 6.400000E+1,1.219456E+0,1.700000E+4,4.000000E+4 6.370000E+1,1.219113E+0,1.700000E+4,4.000000E+4 6.330000E+1,1.219013E+0,1.700000E+4,4.000000E+4 6.310000E+1,1.218665E+0,1.700000E+4,4.000000E+4 6.260000E+1,1.218238E+0,1.700000E+4,4.000000E+4 6.240000E+1,1.218014E+0,1.700000E+4,4.000000E+4 6.200000E+1,1.217931E+0,1.700000E+4,4.000000E+4 6.170000E+1,1.217597E+0,1.700000E+4,4.000000E+4 6.130000E+1,1.216943E+0,1.700000E+4,4.000000E+4 6.100000E+1,1.217226E+0,1.700000E+4,4.000000E+4 6.070000E+1,1.217247E+0,1.700000E+4,4.000000E+4 6.030000E+1,1.216995E+0,1.700000E+4,4.000000E+4 6.000000E+1,1.216869E+0,1.700000E+4,4.000000E+4 5.960000E+1,1.217124E+0,1.700000E+4,4.000000E+4 5.930000E+1,1.216963E+0,1.700000E+4,4.000000E+4 5.900000E+1,1.216923E+0,1.700000E+4,4.000000E+4 5.860000E+1,1.216547E+0,1.700000E+4,4.000000E+4 5.830000E+1,1.215789E+0,1.700000E+4,4.000000E+4 5.800000E+1,1.215302E+0,1.700000E+4,4.000000E+4 5.760000E+1,1.215127E+0,1.700000E+4,4.000000E+4 5.720000E+1,1.215158E+0,1.700000E+4,4.000000E+4 5.690000E+1,1.215017E+0,1.700000E+4,4.000000E+4 5.660000E+1,1.214617E+0,1.700000E+4,4.000000E+4 5.620000E+1,1.214202E+0,1.700000E+4,4.000000E+4 5.580000E+1,1.214190E+0,1.700000E+4,4.000000E+4 5.550000E+1,1.214186E+0,1.700000E+4,4.000000E+4 5.510000E+1,1.214404E+0,1.700000E+4,4.000000E+4 5.480000E+1,1.214416E+0,1.700000E+4,4.000000E+4 5.440000E+1,1.214076E+0,1.700000E+4,4.000000E+4 5.410000E+1,1.213759E+0,1.700000E+4,4.000000E+4 5.380000E+1,1.213741E+0,1.700000E+4,4.000000E+4 5.340000E+1,1.213369E+0,1.700000E+4,4.000000E+4 5.310000E+1,1.213096E+0,1.700000E+4,4.000000E+4 5.270000E+1,1.212941E+0,1.700000E+4,4.000000E+4 5.240000E+1,1.212744E+0,1.700000E+4,4.000000E+4 5.210000E+1,1.212390E+0,1.700000E+4,4.000000E+4 5.170000E+1,1.212068E+0,1.700000E+4,4.000000E+4 5.140000E+1,1.211814E+0,1.700000E+4,4.000000E+4 5.100000E+1,1.211351E+0,1.700000E+4,4.000000E+4 5.060000E+1,1.211052E+0,1.700000E+4,4.000000E+4 5.030000E+1,1.210865E+0,1.700000E+4,4.000000E+4 5.000000E+1,1.210665E+0,1.700000E+4,4.000000E+4 4.970000E+1,1.210318E+0,1.700000E+4,4.000000E+4 4.930000E+1,1.210045E+0,1.700000E+4,4.000000E+4 4.900000E+1,1.209763E+0,1.700000E+4,4.000000E+4 4.860000E+1,1.209490E+0,1.700000E+4,4.000000E+4 4.830000E+1,1.209057E+0,1.700000E+4,4.000000E+4 4.790000E+1,1.208824E+0,1.700000E+4,4.000000E+4 4.760000E+1,1.208490E+0,1.700000E+4,4.000000E+4 4.710000E+1,1.208215E+0,1.700000E+4,4.000000E+4 4.680000E+1,1.207814E+0,1.700000E+4,4.000000E+4 4.650000E+1,1.207413E+0,1.700000E+4,4.000000E+4 4.620000E+1,1.207046E+0,1.700000E+4,4.000000E+4 4.580000E+1,1.206738E+0,1.700000E+4,4.000000E+4 4.550000E+1,1.206335E+0,1.700000E+4,4.000000E+4 4.520000E+1,1.205993E+0,1.700000E+4,4.000000E+4 4.480000E+1,1.205572E+0,1.700000E+4,4.000000E+4 4.440000E+1,1.205139E+0,1.700000E+4,4.000000E+4 4.410000E+1,1.204767E+0,1.700000E+4,4.000000E+4 4.370000E+1,1.204422E+0,1.700000E+4,4.000000E+4 4.340000E+1,1.204034E+0,1.700000E+4,4.000000E+4 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