Date:"06.12.2023" Folder:"C:\MESSUNGEN\USER\Philip" Sample-ID:"10012" Process-ID:"231129-k1-3" Measurement Current(mA):"Automatisch" Number of Loops:"2" Tmin:"-20" Tmax:"120" Trate:"5" Comment:"150nm" T, R, X, Y 2.590000E+1,1.311806E+0,0.000000E+0,2.000000E+4 2.600000E+1,1.312048E+0,0.000000E+0,2.000000E+4 2.600000E+1,1.312161E+0,0.000000E+0,2.000000E+4 2.600000E+1,1.312084E+0,0.000000E+0,2.000000E+4 2.610000E+1,1.312075E+0,0.000000E+0,2.000000E+4 2.590000E+1,1.312081E+0,0.000000E+0,2.000000E+4 2.590000E+1,1.312045E+0,0.000000E+0,2.000000E+4 2.600000E+1,1.312024E+0,0.000000E+0,2.000000E+4 2.610000E+1,1.312054E+0,0.000000E+0,2.000000E+4 2.600000E+1,1.312068E+0,0.000000E+0,2.000000E+4 2.600000E+1,1.312058E+0,0.000000E+0,2.000000E+4 2.600000E+1,1.311553E+0,0.000000E+0,2.000000E+4 2.600000E+1,1.311569E+0,0.000000E+0,2.000000E+4 2.600000E+1,1.311600E+0,0.000000E+0,2.000000E+4 2.610000E+1,1.311575E+0,0.000000E+0,2.000000E+4 2.600000E+1,1.311559E+0,0.000000E+0,2.000000E+4 2.600000E+1,1.311360E+0,0.000000E+0,2.000000E+4 2.600000E+1,1.311369E+0,0.000000E+0,2.000000E+4 2.600000E+1,1.311416E+0,0.000000E+0,2.000000E+4 2.600000E+1,1.311427E+0,0.000000E+0,2.000000E+4 2.600000E+1,1.311437E+0,0.000000E+0,2.000000E+4 2.600000E+1,1.311616E+0,0.000000E+0,2.000000E+4 2.610000E+1,1.312099E+0,0.000000E+0,2.000000E+4 2.640000E+1,1.312736E+0,0.000000E+0,2.000000E+4 2.690000E+1,1.313382E+0,0.000000E+0,2.000000E+4 2.740000E+1,1.314028E+0,0.000000E+0,2.000000E+4 2.800000E+1,1.314531E+0,0.000000E+0,2.000000E+4 2.850000E+1,1.315172E+0,0.000000E+0,2.000000E+4 2.910000E+1,1.315797E+0,0.000000E+0,2.000000E+4 2.970000E+1,1.316505E+0,0.000000E+0,2.000000E+4 3.030000E+1,1.317267E+0,0.000000E+0,2.000000E+4 3.090000E+1,1.318024E+0,0.000000E+0,2.000000E+4 3.150000E+1,1.318828E+0,0.000000E+0,2.000000E+4 3.220000E+1,1.319535E+0,0.000000E+0,2.000000E+4 3.290000E+1,1.320237E+0,0.000000E+0,2.000000E+4 3.360000E+1,1.320918E+0,0.000000E+0,2.000000E+4 3.410000E+1,1.321624E+0,0.000000E+0,2.000000E+4 3.470000E+1,1.322343E+0,0.000000E+0,2.000000E+4 3.530000E+1,1.323131E+0,0.000000E+0,2.000000E+4 3.590000E+1,1.323775E+0,0.000000E+0,2.000000E+4 3.670000E+1,1.324455E+0,0.000000E+0,2.000000E+4 3.720000E+1,1.325106E+0,0.000000E+0,2.000000E+4 3.790000E+1,1.325691E+0,0.000000E+0,2.000000E+4 3.840000E+1,1.326233E+0,0.000000E+0,2.000000E+4 3.890000E+1,1.326811E+0,0.000000E+0,2.000000E+4 3.940000E+1,1.327495E+0,0.000000E+0,2.000000E+4 3.990000E+1,1.328216E+0,0.000000E+0,2.000000E+4 4.060000E+1,1.328853E+0,0.000000E+0,2.000000E+4 4.110000E+1,1.329414E+0,0.000000E+0,2.000000E+4 4.160000E+1,1.329924E+0,0.000000E+0,2.000000E+4 4.210000E+1,1.330473E+0,0.000000E+0,2.000000E+4 4.260000E+1,1.331064E+0,0.000000E+0,2.000000E+4 4.310000E+1,1.331646E+0,0.000000E+0,2.000000E+4 4.350000E+1,1.332125E+0,0.000000E+0,2.000000E+4 4.410000E+1,1.332665E+0,0.000000E+0,2.000000E+4 4.450000E+1,1.333116E+0,0.000000E+0,2.000000E+4 4.500000E+1,1.333651E+0,0.000000E+0,2.000000E+4 4.540000E+1,1.334190E+0,0.000000E+0,2.000000E+4 4.590000E+1,1.334680E+0,0.000000E+0,2.000000E+4 4.630000E+1,1.335137E+0,0.000000E+0,2.000000E+4 4.680000E+1,1.335584E+0,0.000000E+0,2.000000E+4 4.720000E+1,1.335958E+0,0.000000E+0,2.000000E+4 4.760000E+1,1.336452E+0,0.000000E+0,2.000000E+4 4.800000E+1,1.336921E+0,0.000000E+0,2.000000E+4 4.840000E+1,1.337401E+0,0.000000E+0,2.000000E+4 4.890000E+1,1.337940E+0,0.000000E+0,2.000000E+4 4.930000E+1,1.338423E+0,0.000000E+0,2.000000E+4 4.970000E+1,1.338855E+0,0.000000E+0,2.000000E+4 5.010000E+1,1.339238E+0,0.000000E+0,2.000000E+4 5.050000E+1,1.339655E+0,0.000000E+0,2.000000E+4 5.090000E+1,1.340100E+0,0.000000E+0,2.000000E+4 5.130000E+1,1.340546E+0,0.000000E+0,2.000000E+4 5.170000E+1,1.340924E+0,0.000000E+0,2.000000E+4 5.200000E+1,1.341361E+0,0.000000E+0,2.000000E+4 5.240000E+1,1.341803E+0,0.000000E+0,2.000000E+4 5.280000E+1,1.342243E+0,0.000000E+0,2.000000E+4 5.310000E+1,1.342661E+0,0.000000E+0,2.000000E+4 5.360000E+1,1.343165E+0,0.000000E+0,2.000000E+4 5.400000E+1,1.343573E+0,0.000000E+0,2.000000E+4 5.440000E+1,1.343980E+0,0.000000E+0,2.000000E+4 5.470000E+1,1.344328E+0,0.000000E+0,2.000000E+4 5.520000E+1,1.344695E+0,0.000000E+0,2.000000E+4 5.550000E+1,1.345106E+0,0.000000E+0,2.000000E+4 5.590000E+1,1.345521E+0,0.000000E+0,2.000000E+4 5.620000E+1,1.345955E+0,0.000000E+0,2.000000E+4 5.660000E+1,1.346423E+0,0.000000E+0,2.000000E+4 5.700000E+1,1.346866E+0,0.000000E+0,2.000000E+4 5.730000E+1,1.347227E+0,0.000000E+0,2.000000E+4 5.770000E+1,1.347690E+0,0.000000E+0,2.000000E+4 5.810000E+1,1.348089E+0,0.000000E+0,2.000000E+4 5.850000E+1,1.348425E+0,0.000000E+0,2.000000E+4 5.890000E+1,1.348880E+0,0.000000E+0,2.000000E+4 5.920000E+1,1.349295E+0,0.000000E+0,2.000000E+4 5.950000E+1,1.349738E+0,0.000000E+0,2.000000E+4 6.000000E+1,1.350191E+0,0.000000E+0,2.000000E+4 6.030000E+1,1.350574E+0,0.000000E+0,2.000000E+4 6.070000E+1,1.350966E+0,0.000000E+0,2.000000E+4 6.110000E+1,1.351318E+0,0.000000E+0,2.000000E+4 6.140000E+1,1.351699E+0,0.000000E+0,2.000000E+4 6.170000E+1,1.352166E+0,0.000000E+0,2.000000E+4 6.210000E+1,1.352592E+0,0.000000E+0,2.000000E+4 6.260000E+1,1.352956E+0,0.000000E+0,2.000000E+4 6.290000E+1,1.353291E+0,0.000000E+0,2.000000E+4 6.330000E+1,1.353698E+0,0.000000E+0,2.000000E+4 6.360000E+1,1.353992E+0,0.000000E+0,2.000000E+4 6.390000E+1,1.354399E+0,0.000000E+0,2.000000E+4 6.430000E+1,1.354821E+0,0.000000E+0,2.000000E+4 6.460000E+1,1.355228E+0,0.000000E+0,2.000000E+4 6.500000E+1,1.355650E+0,0.000000E+0,2.000000E+4 6.550000E+1,1.356124E+0,0.000000E+0,2.000000E+4 6.580000E+1,1.356451E+0,0.000000E+0,2.000000E+4 6.610000E+1,1.356822E+0,0.000000E+0,2.000000E+4 6.650000E+1,1.357241E+0,0.000000E+0,2.000000E+4 6.680000E+1,1.357639E+0,0.000000E+0,2.000000E+4 6.720000E+1,1.358040E+0,0.000000E+0,2.000000E+4 6.770000E+1,1.358430E+0,0.000000E+0,2.000000E+4 6.790000E+1,1.358815E+0,0.000000E+0,2.000000E+4 6.840000E+1,1.359214E+0,0.000000E+0,2.000000E+4 6.860000E+1,1.359610E+0,0.000000E+0,2.000000E+4 6.900000E+1,1.360041E+0,0.000000E+0,2.000000E+4 6.950000E+1,1.360549E+0,0.000000E+0,2.000000E+4 6.980000E+1,1.360904E+0,0.000000E+0,2.000000E+4 7.020000E+1,1.361337E+0,0.000000E+0,2.000000E+4 7.050000E+1,1.361709E+0,0.000000E+0,2.000000E+4 7.080000E+1,1.362080E+0,0.000000E+0,2.000000E+4 7.120000E+1,1.362444E+0,0.000000E+0,2.000000E+4 7.150000E+1,1.362921E+0,0.000000E+0,2.000000E+4 7.190000E+1,1.363493E+0,0.000000E+0,2.000000E+4 7.230000E+1,1.363915E+0,0.000000E+0,2.000000E+4 7.270000E+1,1.364226E+0,0.000000E+0,2.000000E+4 7.310000E+1,1.364458E+0,0.000000E+0,2.000000E+4 7.350000E+1,1.364812E+0,0.000000E+0,2.000000E+4 7.380000E+1,1.365088E+0,0.000000E+0,2.000000E+4 7.410000E+1,1.365496E+0,0.000000E+0,2.000000E+4 7.450000E+1,1.365953E+0,0.000000E+0,2.000000E+4 7.480000E+1,1.366388E+0,0.000000E+0,2.000000E+4 7.520000E+1,1.366912E+0,0.000000E+0,2.000000E+4 7.560000E+1,1.367202E+0,0.000000E+0,2.000000E+4 7.600000E+1,1.367634E+0,0.000000E+0,2.000000E+4 7.640000E+1,1.367979E+0,0.000000E+0,2.000000E+4 7.670000E+1,1.368286E+0,0.000000E+0,2.000000E+4 7.700000E+1,1.368673E+0,0.000000E+0,2.000000E+4 7.740000E+1,1.368963E+0,0.000000E+0,2.000000E+4 7.780000E+1,1.369330E+0,0.000000E+0,2.000000E+4 7.820000E+1,1.369638E+0,0.000000E+0,2.000000E+4 7.850000E+1,1.369984E+0,0.000000E+0,2.000000E+4 7.880000E+1,1.370422E+0,0.000000E+0,2.000000E+4 7.930000E+1,1.370766E+0,0.000000E+0,2.000000E+4 7.970000E+1,1.371236E+0,0.000000E+0,2.000000E+4 8.000000E+1,1.371541E+0,0.000000E+0,2.000000E+4 8.040000E+1,1.371802E+0,0.000000E+0,2.000000E+4 8.070000E+1,1.372081E+0,0.000000E+0,2.000000E+4 8.100000E+1,1.372534E+0,0.000000E+0,2.000000E+4 8.130000E+1,1.372941E+0,0.000000E+0,2.000000E+4 8.180000E+1,1.373449E+0,0.000000E+0,2.000000E+4 8.210000E+1,1.373800E+0,0.000000E+0,2.000000E+4 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