Date:"06.12.2023" Folder:"C:\MESSUNGEN\USER\Philip" Sample-ID:"10012" Process-ID:"231129-k1-3" Measurement Current(mA):"Automatisch" Number of Loops:"2" Tmin:"-20" Tmax:"120" Trate:"5" Comment:"150nm" T, R, X, Y 1.207000E+2,1.574375E+0,2.600000E+4,4.000000E+4 1.210000E+2,1.574908E+0,2.600000E+4,4.000000E+4 1.213000E+2,1.575080E+0,2.600000E+4,4.000000E+4 1.214000E+2,1.574985E+0,2.600000E+4,4.000000E+4 1.214000E+2,1.574800E+0,2.600000E+4,4.000000E+4 1.215000E+2,1.574538E+0,2.600000E+4,4.000000E+4 1.213000E+2,1.574207E+0,2.600000E+4,4.000000E+4 1.211000E+2,1.573914E+0,2.600000E+4,4.000000E+4 1.208000E+2,1.573479E+0,2.600000E+4,4.000000E+4 1.205000E+2,1.573182E+0,2.600000E+4,4.000000E+4 1.203000E+2,1.572892E+0,2.600000E+4,4.000000E+4 1.199000E+2,1.572106E+0,2.600000E+4,4.000000E+4 1.196000E+2,1.572963E+0,2.600000E+4,4.000000E+4 1.193000E+2,1.572909E+0,2.600000E+4,4.000000E+4 1.190000E+2,1.572485E+0,2.600000E+4,4.000000E+4 1.186000E+2,1.571731E+0,2.600000E+4,4.000000E+4 1.183000E+2,1.571283E+0,2.600000E+4,4.000000E+4 1.179000E+2,1.570518E+0,2.600000E+4,4.000000E+4 1.176000E+2,1.570248E+0,2.600000E+4,4.000000E+4 1.173000E+2,1.569785E+0,2.600000E+4,4.000000E+4 1.169000E+2,1.569088E+0,2.600000E+4,4.000000E+4 1.165000E+2,1.568844E+0,2.600000E+4,4.000000E+4 1.162000E+2,1.568607E+0,2.600000E+4,4.000000E+4 1.158000E+2,1.568475E+0,2.600000E+4,4.000000E+4 1.154000E+2,1.567593E+0,2.600000E+4,4.000000E+4 1.151000E+2,1.566862E+0,2.600000E+4,4.000000E+4 1.147000E+2,1.566790E+0,2.600000E+4,4.000000E+4 1.144000E+2,1.565814E+0,2.600000E+4,4.000000E+4 1.139000E+2,1.565762E+0,2.600000E+4,4.000000E+4 1.136000E+2,1.565060E+0,2.600000E+4,4.000000E+4 1.132000E+2,1.564616E+0,2.600000E+4,4.000000E+4 1.128000E+2,1.564176E+0,2.600000E+4,4.000000E+4 1.124000E+2,1.563802E+0,2.600000E+4,4.000000E+4 1.120000E+2,1.563070E+0,2.600000E+4,4.000000E+4 1.117000E+2,1.561988E+0,2.600000E+4,4.000000E+4 1.112000E+2,1.562392E+0,2.600000E+4,4.000000E+4 1.109000E+2,1.562181E+0,2.600000E+4,4.000000E+4 1.105000E+2,1.560731E+0,2.600000E+4,4.000000E+4 1.101000E+2,1.560519E+0,2.600000E+4,4.000000E+4 1.097000E+2,1.560463E+0,2.600000E+4,4.000000E+4 1.093000E+2,1.560504E+0,2.600000E+4,4.000000E+4 1.089000E+2,1.559953E+0,2.600000E+4,4.000000E+4 1.085000E+2,1.560193E+0,2.600000E+4,4.000000E+4 1.082000E+2,1.560161E+0,2.600000E+4,4.000000E+4 1.078000E+2,1.558477E+0,2.600000E+4,4.000000E+4 1.073000E+2,1.557571E+0,2.600000E+4,4.000000E+4 1.069000E+2,1.558036E+0,2.600000E+4,4.000000E+4 1.065000E+2,1.557116E+0,2.600000E+4,4.000000E+4 1.061000E+2,1.557565E+0,2.600000E+4,4.000000E+4 1.057000E+2,1.557410E+0,2.600000E+4,4.000000E+4 1.053000E+2,1.555714E+0,2.600000E+4,4.000000E+4 1.048000E+2,1.556909E+0,2.600000E+4,4.000000E+4 1.044000E+2,1.555599E+0,2.600000E+4,4.000000E+4 1.040000E+2,1.555123E+0,2.600000E+4,4.000000E+4 1.036000E+2,1.553949E+0,2.600000E+4,4.000000E+4 1.031000E+2,1.551991E+0,2.600000E+4,4.000000E+4 1.026000E+2,1.549600E+0,2.600000E+4,4.000000E+4 1.022000E+2,1.547287E+0,2.600000E+4,4.000000E+4 1.017000E+2,1.546216E+0,2.600000E+4,4.000000E+4 1.013000E+2,1.545188E+0,2.600000E+4,4.000000E+4 1.008000E+2,1.542908E+0,2.600000E+4,4.000000E+4 1.004000E+2,1.542264E+0,2.600000E+4,4.000000E+4 9.980000E+1,1.540743E+0,2.600000E+4,4.000000E+4 9.940000E+1,1.539572E+0,2.600000E+4,4.000000E+4 9.890000E+1,1.537573E+0,2.600000E+4,4.000000E+4 9.850000E+1,1.536581E+0,2.600000E+4,4.000000E+4 9.800000E+1,1.535601E+0,2.600000E+4,4.000000E+4 9.750000E+1,1.534493E+0,2.600000E+4,4.000000E+4 9.700000E+1,1.534271E+0,2.600000E+4,4.000000E+4 9.660000E+1,1.534155E+0,2.600000E+4,4.000000E+4 9.620000E+1,1.533284E+0,2.600000E+4,4.000000E+4 9.570000E+1,1.532088E+0,2.600000E+4,4.000000E+4 9.520000E+1,1.530776E+0,2.600000E+4,4.000000E+4 9.480000E+1,1.530538E+0,2.600000E+4,4.000000E+4 9.440000E+1,1.528553E+0,2.600000E+4,4.000000E+4 9.400000E+1,1.527644E+0,2.600000E+4,4.000000E+4 9.350000E+1,1.526000E+0,2.600000E+4,4.000000E+4 9.300000E+1,1.525143E+0,2.600000E+4,4.000000E+4 9.270000E+1,1.524348E+0,2.600000E+4,4.000000E+4 9.240000E+1,1.522851E+0,2.600000E+4,4.000000E+4 9.190000E+1,1.522106E+0,2.600000E+4,4.000000E+4 9.160000E+1,1.521897E+0,2.600000E+4,4.000000E+4 9.110000E+1,1.520883E+0,2.600000E+4,4.000000E+4 9.080000E+1,1.519859E+0,2.600000E+4,4.000000E+4 9.050000E+1,1.518734E+0,2.600000E+4,4.000000E+4 9.010000E+1,1.518388E+0,2.600000E+4,4.000000E+4 8.980000E+1,1.517486E+0,2.600000E+4,4.000000E+4 8.940000E+1,1.516397E+0,2.600000E+4,4.000000E+4 8.920000E+1,1.515807E+0,2.600000E+4,4.000000E+4 8.880000E+1,1.514693E+0,2.600000E+4,4.000000E+4 8.850000E+1,1.513541E+0,2.600000E+4,4.000000E+4 8.820000E+1,1.512424E+0,2.600000E+4,4.000000E+4 8.780000E+1,1.511704E+0,2.600000E+4,4.000000E+4 8.750000E+1,1.511365E+0,2.600000E+4,4.000000E+4 8.710000E+1,1.510407E+0,2.600000E+4,4.000000E+4 8.680000E+1,1.509688E+0,2.600000E+4,4.000000E+4 8.640000E+1,1.509063E+0,2.600000E+4,4.000000E+4 8.610000E+1,1.508280E+0,2.600000E+4,4.000000E+4 8.580000E+1,1.507620E+0,2.600000E+4,4.000000E+4 8.550000E+1,1.506962E+0,2.600000E+4,4.000000E+4 8.510000E+1,1.506089E+0,2.600000E+4,4.000000E+4 8.480000E+1,1.505587E+0,2.600000E+4,4.000000E+4 8.450000E+1,1.504908E+0,2.600000E+4,4.000000E+4 8.420000E+1,1.504289E+0,2.600000E+4,4.000000E+4 8.390000E+1,1.503809E+0,2.600000E+4,4.000000E+4 8.350000E+1,1.503305E+0,2.600000E+4,4.000000E+4 8.320000E+1,1.502808E+0,2.600000E+4,4.000000E+4 8.290000E+1,1.502313E+0,2.600000E+4,4.000000E+4 8.250000E+1,1.501622E+0,2.600000E+4,4.000000E+4 8.220000E+1,1.500989E+0,2.600000E+4,4.000000E+4 8.190000E+1,1.500118E+0,2.600000E+4,4.000000E+4 8.150000E+1,1.498971E+0,2.600000E+4,4.000000E+4 8.110000E+1,1.497971E+0,2.600000E+4,4.000000E+4 8.070000E+1,1.497488E+0,2.600000E+4,4.000000E+4 8.030000E+1,1.496914E+0,2.600000E+4,4.000000E+4 8.000000E+1,1.496391E+0,2.600000E+4,4.000000E+4 7.960000E+1,1.495922E+0,2.600000E+4,4.000000E+4 7.910000E+1,1.495001E+0,2.600000E+4,4.000000E+4 7.870000E+1,1.494345E+0,2.600000E+4,4.000000E+4 7.830000E+1,1.493494E+0,2.600000E+4,4.000000E+4 7.790000E+1,1.493177E+0,2.600000E+4,4.000000E+4 7.750000E+1,1.493293E+0,2.600000E+4,4.000000E+4 7.710000E+1,1.492712E+0,2.600000E+4,4.000000E+4 7.660000E+1,1.491841E+0,2.600000E+4,4.000000E+4 7.620000E+1,1.490067E+0,2.600000E+4,4.000000E+4 7.570000E+1,1.489098E+0,2.600000E+4,4.000000E+4 7.530000E+1,1.488398E+0,2.600000E+4,4.000000E+4 7.480000E+1,1.487562E+0,2.600000E+4,4.000000E+4 7.450000E+1,1.486924E+0,2.600000E+4,4.000000E+4 7.400000E+1,1.485654E+0,2.600000E+4,4.000000E+4 7.360000E+1,1.484246E+0,2.600000E+4,4.000000E+4 7.310000E+1,1.483234E+0,2.600000E+4,4.000000E+4 7.270000E+1,1.482529E+0,2.600000E+4,4.000000E+4 7.230000E+1,1.482070E+0,2.600000E+4,4.000000E+4 7.180000E+1,1.481244E+0,2.600000E+4,4.000000E+4 7.150000E+1,1.480506E+0,2.600000E+4,4.000000E+4 7.110000E+1,1.480004E+0,2.600000E+4,4.000000E+4 7.070000E+1,1.479124E+0,2.600000E+4,4.000000E+4 7.020000E+1,1.478360E+0,2.600000E+4,4.000000E+4 6.990000E+1,1.477297E+0,2.600000E+4,4.000000E+4 6.960000E+1,1.476693E+0,2.600000E+4,4.000000E+4 6.910000E+1,1.476106E+0,2.600000E+4,4.000000E+4 6.870000E+1,1.475419E+0,2.600000E+4,4.000000E+4 6.830000E+1,1.474796E+0,2.600000E+4,4.000000E+4 6.790000E+1,1.474169E+0,2.600000E+4,4.000000E+4 6.760000E+1,1.473480E+0,2.600000E+4,4.000000E+4 6.720000E+1,1.472742E+0,2.600000E+4,4.000000E+4 6.680000E+1,1.472079E+0,2.600000E+4,4.000000E+4 6.650000E+1,1.471602E+0,2.600000E+4,4.000000E+4 6.610000E+1,1.471097E+0,2.600000E+4,4.000000E+4 6.590000E+1,1.470695E+0,2.600000E+4,4.000000E+4 6.540000E+1,1.470405E+0,2.600000E+4,4.000000E+4 6.510000E+1,1.469712E+0,2.600000E+4,4.000000E+4 6.470000E+1,1.469265E+0,2.600000E+4,4.000000E+4 6.440000E+1,1.468647E+0,2.600000E+4,4.000000E+4 6.400000E+1,1.467995E+0,2.600000E+4,4.000000E+4 6.370000E+1,1.467277E+0,2.600000E+4,4.000000E+4 6.330000E+1,1.466277E+0,2.600000E+4,4.000000E+4 6.310000E+1,1.465911E+0,2.600000E+4,4.000000E+4 6.260000E+1,1.465178E+0,2.600000E+4,4.000000E+4 6.240000E+1,1.464589E+0,2.600000E+4,4.000000E+4 6.200000E+1,1.464258E+0,2.600000E+4,4.000000E+4 6.170000E+1,1.463542E+0,2.600000E+4,4.000000E+4 6.130000E+1,1.463382E+0,2.600000E+4,4.000000E+4 6.100000E+1,1.462738E+0,2.600000E+4,4.000000E+4 6.070000E+1,1.462405E+0,2.600000E+4,4.000000E+4 6.030000E+1,1.461838E+0,2.600000E+4,4.000000E+4 6.000000E+1,1.461468E+0,2.600000E+4,4.000000E+4 5.960000E+1,1.460790E+0,2.600000E+4,4.000000E+4 5.930000E+1,1.460588E+0,2.600000E+4,4.000000E+4 5.900000E+1,1.460124E+0,2.600000E+4,4.000000E+4 5.860000E+1,1.459613E+0,2.600000E+4,4.000000E+4 5.830000E+1,1.459467E+0,2.600000E+4,4.000000E+4 5.800000E+1,1.459087E+0,2.600000E+4,4.000000E+4 5.760000E+1,1.458613E+0,2.600000E+4,4.000000E+4 5.720000E+1,1.458230E+0,2.600000E+4,4.000000E+4 5.690000E+1,1.457862E+0,2.600000E+4,4.000000E+4 5.660000E+1,1.457467E+0,2.600000E+4,4.000000E+4 5.620000E+1,1.457050E+0,2.600000E+4,4.000000E+4 5.580000E+1,1.456673E+0,2.600000E+4,4.000000E+4 5.550000E+1,1.456280E+0,2.600000E+4,4.000000E+4 5.510000E+1,1.455914E+0,2.600000E+4,4.000000E+4 5.480000E+1,1.455291E+0,2.600000E+4,4.000000E+4 5.440000E+1,1.454755E+0,2.600000E+4,4.000000E+4 5.410000E+1,1.454395E+0,2.600000E+4,4.000000E+4 5.380000E+1,1.453889E+0,2.600000E+4,4.000000E+4 5.340000E+1,1.453293E+0,2.600000E+4,4.000000E+4 5.310000E+1,1.452702E+0,2.600000E+4,4.000000E+4 5.270000E+1,1.452232E+0,2.600000E+4,4.000000E+4 5.240000E+1,1.451682E+0,2.600000E+4,4.000000E+4 5.210000E+1,1.451156E+0,2.600000E+4,4.000000E+4 5.170000E+1,1.450824E+0,2.600000E+4,4.000000E+4 5.140000E+1,1.450344E+0,2.600000E+4,4.000000E+4 5.100000E+1,1.449804E+0,2.600000E+4,4.000000E+4 5.060000E+1,1.449361E+0,2.600000E+4,4.000000E+4 5.030000E+1,1.448938E+0,2.600000E+4,4.000000E+4 5.000000E+1,1.448487E+0,2.600000E+4,4.000000E+4 4.970000E+1,1.448027E+0,2.600000E+4,4.000000E+4 4.930000E+1,1.447604E+0,2.600000E+4,4.000000E+4 4.900000E+1,1.447184E+0,2.600000E+4,4.000000E+4 4.860000E+1,1.446808E+0,2.600000E+4,4.000000E+4 4.830000E+1,1.446422E+0,2.600000E+4,4.000000E+4 4.790000E+1,1.445976E+0,2.600000E+4,4.000000E+4 4.760000E+1,1.445462E+0,2.600000E+4,4.000000E+4 4.710000E+1,1.445069E+0,2.600000E+4,4.000000E+4 4.680000E+1,1.444694E+0,2.600000E+4,4.000000E+4 4.650000E+1,1.444338E+0,2.600000E+4,4.000000E+4 4.620000E+1,1.444005E+0,2.600000E+4,4.000000E+4 4.580000E+1,1.443577E+0,2.600000E+4,4.000000E+4 4.550000E+1,1.443167E+0,2.600000E+4,4.000000E+4 4.520000E+1,1.442747E+0,2.600000E+4,4.000000E+4 4.480000E+1,1.442397E+0,2.600000E+4,4.000000E+4 4.440000E+1,1.441944E+0,2.600000E+4,4.000000E+4 4.410000E+1,1.441534E+0,2.600000E+4,4.000000E+4 4.370000E+1,1.441146E+0,2.600000E+4,4.000000E+4 4.340000E+1,1.440707E+0,2.600000E+4,4.000000E+4 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