Date:"06.12.2023" Folder:"C:\MESSUNGEN\USER\Philip" Sample-ID:"10012" Process-ID:"231129-k1-3" Measurement Current(mA):"Automatisch" Number of Loops:"2" Tmin:"-20" Tmax:"120" Trate:"5" Comment:"150nm" T, R, X, Y 1.207000E+2,1.225297E+0,3.050000E+4,4.000000E+4 1.210000E+2,1.225552E+0,3.050000E+4,4.000000E+4 1.213000E+2,1.225701E+0,3.050000E+4,4.000000E+4 1.214000E+2,1.225689E+0,3.050000E+4,4.000000E+4 1.214000E+2,1.225593E+0,3.050000E+4,4.000000E+4 1.215000E+2,1.225395E+0,3.050000E+4,4.000000E+4 1.213000E+2,1.225135E+0,3.050000E+4,4.000000E+4 1.211000E+2,1.224931E+0,3.050000E+4,4.000000E+4 1.208000E+2,1.224698E+0,3.050000E+4,4.000000E+4 1.205000E+2,1.224408E+0,3.050000E+4,4.000000E+4 1.203000E+2,1.224107E+0,3.050000E+4,4.000000E+4 1.199000E+2,1.223796E+0,3.050000E+4,4.000000E+4 1.196000E+2,1.223433E+0,3.050000E+4,4.000000E+4 1.193000E+2,1.223121E+0,3.050000E+4,4.000000E+4 1.190000E+2,1.222820E+0,3.050000E+4,4.000000E+4 1.186000E+2,1.222499E+0,3.050000E+4,4.000000E+4 1.183000E+2,1.222166E+0,3.050000E+4,4.000000E+4 1.179000E+2,1.221833E+0,3.050000E+4,4.000000E+4 1.176000E+2,1.221565E+0,3.050000E+4,4.000000E+4 1.173000E+2,1.221292E+0,3.050000E+4,4.000000E+4 1.169000E+2,1.220909E+0,3.050000E+4,4.000000E+4 1.165000E+2,1.220644E+0,3.050000E+4,4.000000E+4 1.162000E+2,1.220287E+0,3.050000E+4,4.000000E+4 1.158000E+2,1.219953E+0,3.050000E+4,4.000000E+4 1.154000E+2,1.219608E+0,3.050000E+4,4.000000E+4 1.151000E+2,1.219255E+0,3.050000E+4,4.000000E+4 1.147000E+2,1.218920E+0,3.050000E+4,4.000000E+4 1.144000E+2,1.218618E+0,3.050000E+4,4.000000E+4 1.139000E+2,1.218227E+0,3.050000E+4,4.000000E+4 1.136000E+2,1.217862E+0,3.050000E+4,4.000000E+4 1.132000E+2,1.217542E+0,3.050000E+4,4.000000E+4 1.128000E+2,1.217301E+0,3.050000E+4,4.000000E+4 1.124000E+2,1.216920E+0,3.050000E+4,4.000000E+4 1.120000E+2,1.216582E+0,3.050000E+4,4.000000E+4 1.117000E+2,1.216152E+0,3.050000E+4,4.000000E+4 1.112000E+2,1.215850E+0,3.050000E+4,4.000000E+4 1.109000E+2,1.215480E+0,3.050000E+4,4.000000E+4 1.105000E+2,1.215176E+0,3.050000E+4,4.000000E+4 1.101000E+2,1.214828E+0,3.050000E+4,4.000000E+4 1.097000E+2,1.214454E+0,3.050000E+4,4.000000E+4 1.093000E+2,1.214082E+0,3.050000E+4,4.000000E+4 1.089000E+2,1.213718E+0,3.050000E+4,4.000000E+4 1.085000E+2,1.213379E+0,3.050000E+4,4.000000E+4 1.082000E+2,1.212903E+0,3.050000E+4,4.000000E+4 1.078000E+2,1.212502E+0,3.050000E+4,4.000000E+4 1.073000E+2,1.212163E+0,3.050000E+4,4.000000E+4 1.069000E+2,1.211780E+0,3.050000E+4,4.000000E+4 1.065000E+2,1.211450E+0,3.050000E+4,4.000000E+4 1.061000E+2,1.211012E+0,3.050000E+4,4.000000E+4 1.057000E+2,1.210637E+0,3.050000E+4,4.000000E+4 1.053000E+2,1.210386E+0,3.050000E+4,4.000000E+4 1.048000E+2,1.209950E+0,3.050000E+4,4.000000E+4 1.044000E+2,1.209529E+0,3.050000E+4,4.000000E+4 1.040000E+2,1.208986E+0,3.050000E+4,4.000000E+4 1.036000E+2,1.208603E+0,3.050000E+4,4.000000E+4 1.031000E+2,1.208115E+0,3.050000E+4,4.000000E+4 1.026000E+2,1.207684E+0,3.050000E+4,4.000000E+4 1.022000E+2,1.207211E+0,3.050000E+4,4.000000E+4 1.017000E+2,1.206774E+0,3.050000E+4,4.000000E+4 1.013000E+2,1.206382E+0,3.050000E+4,4.000000E+4 1.008000E+2,1.206007E+0,3.050000E+4,4.000000E+4 1.004000E+2,1.205585E+0,3.050000E+4,4.000000E+4 9.980000E+1,1.205155E+0,3.050000E+4,4.000000E+4 9.940000E+1,1.204703E+0,3.050000E+4,4.000000E+4 9.890000E+1,1.204226E+0,3.050000E+4,4.000000E+4 9.850000E+1,1.203752E+0,3.050000E+4,4.000000E+4 9.800000E+1,1.203309E+0,3.050000E+4,4.000000E+4 9.750000E+1,1.202758E+0,3.050000E+4,4.000000E+4 9.700000E+1,1.202283E+0,3.050000E+4,4.000000E+4 9.660000E+1,1.201801E+0,3.050000E+4,4.000000E+4 9.620000E+1,1.201244E+0,3.050000E+4,4.000000E+4 9.570000E+1,1.200814E+0,3.050000E+4,4.000000E+4 9.520000E+1,1.200305E+0,3.050000E+4,4.000000E+4 9.480000E+1,1.199818E+0,3.050000E+4,4.000000E+4 9.440000E+1,1.199354E+0,3.050000E+4,4.000000E+4 9.400000E+1,1.198951E+0,3.050000E+4,4.000000E+4 9.350000E+1,1.198523E+0,3.050000E+4,4.000000E+4 9.300000E+1,1.198197E+0,3.050000E+4,4.000000E+4 9.270000E+1,1.197832E+0,3.050000E+4,4.000000E+4 9.240000E+1,1.197416E+0,3.050000E+4,4.000000E+4 9.190000E+1,1.197069E+0,3.050000E+4,4.000000E+4 9.160000E+1,1.196648E+0,3.050000E+4,4.000000E+4 9.110000E+1,1.196317E+0,3.050000E+4,4.000000E+4 9.080000E+1,1.195944E+0,3.050000E+4,4.000000E+4 9.050000E+1,1.195552E+0,3.050000E+4,4.000000E+4 9.010000E+1,1.195207E+0,3.050000E+4,4.000000E+4 8.980000E+1,1.194858E+0,3.050000E+4,4.000000E+4 8.940000E+1,1.194475E+0,3.050000E+4,4.000000E+4 8.920000E+1,1.194157E+0,3.050000E+4,4.000000E+4 8.880000E+1,1.193783E+0,3.050000E+4,4.000000E+4 8.850000E+1,1.193483E+0,3.050000E+4,4.000000E+4 8.820000E+1,1.193152E+0,3.050000E+4,4.000000E+4 8.780000E+1,1.192790E+0,3.050000E+4,4.000000E+4 8.750000E+1,1.192545E+0,3.050000E+4,4.000000E+4 8.710000E+1,1.192162E+0,3.050000E+4,4.000000E+4 8.680000E+1,1.191851E+0,3.050000E+4,4.000000E+4 8.640000E+1,1.191530E+0,3.050000E+4,4.000000E+4 8.610000E+1,1.191179E+0,3.050000E+4,4.000000E+4 8.580000E+1,1.190849E+0,3.050000E+4,4.000000E+4 8.550000E+1,1.190484E+0,3.050000E+4,4.000000E+4 8.510000E+1,1.190194E+0,3.050000E+4,4.000000E+4 8.480000E+1,1.189824E+0,3.050000E+4,4.000000E+4 8.450000E+1,1.189488E+0,3.050000E+4,4.000000E+4 8.420000E+1,1.189112E+0,3.050000E+4,4.000000E+4 8.390000E+1,1.188736E+0,3.050000E+4,4.000000E+4 8.350000E+1,1.188402E+0,3.050000E+4,4.000000E+4 8.320000E+1,1.187970E+0,3.050000E+4,4.000000E+4 8.290000E+1,1.187639E+0,3.050000E+4,4.000000E+4 8.250000E+1,1.187261E+0,3.050000E+4,4.000000E+4 8.220000E+1,1.186873E+0,3.050000E+4,4.000000E+4 8.190000E+1,1.186465E+0,3.050000E+4,4.000000E+4 8.150000E+1,1.186061E+0,3.050000E+4,4.000000E+4 8.110000E+1,1.185714E+0,3.050000E+4,4.000000E+4 8.070000E+1,1.185322E+0,3.050000E+4,4.000000E+4 8.030000E+1,1.184874E+0,3.050000E+4,4.000000E+4 8.000000E+1,1.184376E+0,3.050000E+4,4.000000E+4 7.960000E+1,1.184007E+0,3.050000E+4,4.000000E+4 7.910000E+1,1.183553E+0,3.050000E+4,4.000000E+4 7.870000E+1,1.183151E+0,3.050000E+4,4.000000E+4 7.830000E+1,1.182763E+0,3.050000E+4,4.000000E+4 7.790000E+1,1.182341E+0,3.050000E+4,4.000000E+4 7.750000E+1,1.181961E+0,3.050000E+4,4.000000E+4 7.710000E+1,1.181585E+0,3.050000E+4,4.000000E+4 7.660000E+1,1.181173E+0,3.050000E+4,4.000000E+4 7.620000E+1,1.180768E+0,3.050000E+4,4.000000E+4 7.570000E+1,1.180406E+0,3.050000E+4,4.000000E+4 7.530000E+1,1.179981E+0,3.050000E+4,4.000000E+4 7.480000E+1,1.179588E+0,3.050000E+4,4.000000E+4 7.450000E+1,1.179204E+0,3.050000E+4,4.000000E+4 7.400000E+1,1.178820E+0,3.050000E+4,4.000000E+4 7.360000E+1,1.178390E+0,3.050000E+4,4.000000E+4 7.310000E+1,1.177952E+0,3.050000E+4,4.000000E+4 7.270000E+1,1.177592E+0,3.050000E+4,4.000000E+4 7.230000E+1,1.177223E+0,3.050000E+4,4.000000E+4 7.180000E+1,1.176731E+0,3.050000E+4,4.000000E+4 7.150000E+1,1.176239E+0,3.050000E+4,4.000000E+4 7.110000E+1,1.175851E+0,3.050000E+4,4.000000E+4 7.070000E+1,1.175400E+0,3.050000E+4,4.000000E+4 7.020000E+1,1.174946E+0,3.050000E+4,4.000000E+4 6.990000E+1,1.174569E+0,3.050000E+4,4.000000E+4 6.960000E+1,1.174116E+0,3.050000E+4,4.000000E+4 6.910000E+1,1.173629E+0,3.050000E+4,4.000000E+4 6.870000E+1,1.173142E+0,3.050000E+4,4.000000E+4 6.830000E+1,1.172576E+0,3.050000E+4,4.000000E+4 6.790000E+1,1.172209E+0,3.050000E+4,4.000000E+4 6.760000E+1,1.171231E+0,3.050000E+4,4.000000E+4 6.720000E+1,1.170438E+0,3.050000E+4,4.000000E+4 6.680000E+1,1.169503E+0,3.050000E+4,4.000000E+4 6.650000E+1,1.168689E+0,3.050000E+4,4.000000E+4 6.610000E+1,1.168146E+0,3.050000E+4,4.000000E+4 6.590000E+1,1.167796E+0,3.050000E+4,4.000000E+4 6.540000E+1,1.167326E+0,3.050000E+4,4.000000E+4 6.510000E+1,1.166690E+0,3.050000E+4,4.000000E+4 6.470000E+1,1.166377E+0,3.050000E+4,4.000000E+4 6.440000E+1,1.166003E+0,3.050000E+4,4.000000E+4 6.400000E+1,1.165629E+0,3.050000E+4,4.000000E+4 6.370000E+1,1.165323E+0,3.050000E+4,4.000000E+4 6.330000E+1,1.165039E+0,3.050000E+4,4.000000E+4 6.310000E+1,1.164734E+0,3.050000E+4,4.000000E+4 6.260000E+1,1.164251E+0,3.050000E+4,4.000000E+4 6.240000E+1,1.163966E+0,3.050000E+4,4.000000E+4 6.200000E+1,1.163586E+0,3.050000E+4,4.000000E+4 6.170000E+1,1.163257E+0,3.050000E+4,4.000000E+4 6.130000E+1,1.162887E+0,3.050000E+4,4.000000E+4 6.100000E+1,1.162597E+0,3.050000E+4,4.000000E+4 6.070000E+1,1.162204E+0,3.050000E+4,4.000000E+4 6.030000E+1,1.161867E+0,3.050000E+4,4.000000E+4 6.000000E+1,1.161461E+0,3.050000E+4,4.000000E+4 5.960000E+1,1.161129E+0,3.050000E+4,4.000000E+4 5.930000E+1,1.160712E+0,3.050000E+4,4.000000E+4 5.900000E+1,1.160307E+0,3.050000E+4,4.000000E+4 5.860000E+1,1.160027E+0,3.050000E+4,4.000000E+4 5.830000E+1,1.159668E+0,3.050000E+4,4.000000E+4 5.800000E+1,1.159283E+0,3.050000E+4,4.000000E+4 5.760000E+1,1.158878E+0,3.050000E+4,4.000000E+4 5.720000E+1,1.158499E+0,3.050000E+4,4.000000E+4 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