Date:"06.12.2023" Folder:"C:\MESSUNGEN\USER\Philip" Sample-ID:"10012" Process-ID:"231129-k1-3" Measurement Current(mA):"Automatisch" Number of Loops:"2" Tmin:"-20" Tmax:"120" Trate:"5" Comment:"150nm" T, R, X, Y 1.207000E+2,1.489473E+0,3.500000E+4,4.000000E+4 1.210000E+2,1.489774E+0,3.500000E+4,4.000000E+4 1.213000E+2,1.489996E+0,3.500000E+4,4.000000E+4 1.214000E+2,1.489940E+0,3.500000E+4,4.000000E+4 1.214000E+2,1.489807E+0,3.500000E+4,4.000000E+4 1.215000E+2,1.489644E+0,3.500000E+4,4.000000E+4 1.213000E+2,1.489345E+0,3.500000E+4,4.000000E+4 1.211000E+2,1.489127E+0,3.500000E+4,4.000000E+4 1.208000E+2,1.488849E+0,3.500000E+4,4.000000E+4 1.205000E+2,1.488531E+0,3.500000E+4,4.000000E+4 1.203000E+2,1.488152E+0,3.500000E+4,4.000000E+4 1.199000E+2,1.487771E+0,3.500000E+4,4.000000E+4 1.196000E+2,1.487396E+0,3.500000E+4,4.000000E+4 1.193000E+2,1.487045E+0,3.500000E+4,4.000000E+4 1.190000E+2,1.486674E+0,3.500000E+4,4.000000E+4 1.186000E+2,1.486297E+0,3.500000E+4,4.000000E+4 1.183000E+2,1.485938E+0,3.500000E+4,4.000000E+4 1.179000E+2,1.485591E+0,3.500000E+4,4.000000E+4 1.176000E+2,1.485245E+0,3.500000E+4,4.000000E+4 1.173000E+2,1.484878E+0,3.500000E+4,4.000000E+4 1.169000E+2,1.484543E+0,3.500000E+4,4.000000E+4 1.165000E+2,1.484205E+0,3.500000E+4,4.000000E+4 1.162000E+2,1.483828E+0,3.500000E+4,4.000000E+4 1.158000E+2,1.483493E+0,3.500000E+4,4.000000E+4 1.154000E+2,1.483150E+0,3.500000E+4,4.000000E+4 1.151000E+2,1.482742E+0,3.500000E+4,4.000000E+4 1.147000E+2,1.482310E+0,3.500000E+4,4.000000E+4 1.144000E+2,1.481983E+0,3.500000E+4,4.000000E+4 1.139000E+2,1.481624E+0,3.500000E+4,4.000000E+4 1.136000E+2,1.481190E+0,3.500000E+4,4.000000E+4 1.132000E+2,1.480807E+0,3.500000E+4,4.000000E+4 1.128000E+2,1.480368E+0,3.500000E+4,4.000000E+4 1.124000E+2,1.480005E+0,3.500000E+4,4.000000E+4 1.120000E+2,1.479620E+0,3.500000E+4,4.000000E+4 1.117000E+2,1.479242E+0,3.500000E+4,4.000000E+4 1.112000E+2,1.478782E+0,3.500000E+4,4.000000E+4 1.109000E+2,1.478462E+0,3.500000E+4,4.000000E+4 1.105000E+2,1.478093E+0,3.500000E+4,4.000000E+4 1.101000E+2,1.477736E+0,3.500000E+4,4.000000E+4 1.097000E+2,1.477329E+0,3.500000E+4,4.000000E+4 1.093000E+2,1.476962E+0,3.500000E+4,4.000000E+4 1.089000E+2,1.476622E+0,3.500000E+4,4.000000E+4 1.085000E+2,1.476191E+0,3.500000E+4,4.000000E+4 1.082000E+2,1.475774E+0,3.500000E+4,4.000000E+4 1.078000E+2,1.475377E+0,3.500000E+4,4.000000E+4 1.073000E+2,1.474968E+0,3.500000E+4,4.000000E+4 1.069000E+2,1.474518E+0,3.500000E+4,4.000000E+4 1.065000E+2,1.474066E+0,3.500000E+4,4.000000E+4 1.061000E+2,1.473583E+0,3.500000E+4,4.000000E+4 1.057000E+2,1.473106E+0,3.500000E+4,4.000000E+4 1.053000E+2,1.472625E+0,3.500000E+4,4.000000E+4 1.048000E+2,1.472172E+0,3.500000E+4,4.000000E+4 1.044000E+2,1.471681E+0,3.500000E+4,4.000000E+4 1.040000E+2,1.471274E+0,3.500000E+4,4.000000E+4 1.036000E+2,1.470841E+0,3.500000E+4,4.000000E+4 1.031000E+2,1.470443E+0,3.500000E+4,4.000000E+4 1.026000E+2,1.470156E+0,3.500000E+4,4.000000E+4 1.022000E+2,1.469895E+0,3.500000E+4,4.000000E+4 1.017000E+2,1.469643E+0,3.500000E+4,4.000000E+4 1.013000E+2,1.469392E+0,3.500000E+4,4.000000E+4 1.008000E+2,1.469046E+0,3.500000E+4,4.000000E+4 1.004000E+2,1.468610E+0,3.500000E+4,4.000000E+4 9.980000E+1,1.468241E+0,3.500000E+4,4.000000E+4 9.940000E+1,1.467789E+0,3.500000E+4,4.000000E+4 9.890000E+1,1.467335E+0,3.500000E+4,4.000000E+4 9.850000E+1,1.466834E+0,3.500000E+4,4.000000E+4 9.800000E+1,1.466356E+0,3.500000E+4,4.000000E+4 9.750000E+1,1.465846E+0,3.500000E+4,4.000000E+4 9.700000E+1,1.465379E+0,3.500000E+4,4.000000E+4 9.660000E+1,1.464920E+0,3.500000E+4,4.000000E+4 9.620000E+1,1.464421E+0,3.500000E+4,4.000000E+4 9.570000E+1,1.463840E+0,3.500000E+4,4.000000E+4 9.520000E+1,1.463368E+0,3.500000E+4,4.000000E+4 9.480000E+1,1.462908E+0,3.500000E+4,4.000000E+4 9.440000E+1,1.462397E+0,3.500000E+4,4.000000E+4 9.400000E+1,1.461984E+0,3.500000E+4,4.000000E+4 9.350000E+1,1.461556E+0,3.500000E+4,4.000000E+4 9.300000E+1,1.461145E+0,3.500000E+4,4.000000E+4 9.270000E+1,1.460759E+0,3.500000E+4,4.000000E+4 9.240000E+1,1.460262E+0,3.500000E+4,4.000000E+4 9.190000E+1,1.459833E+0,3.500000E+4,4.000000E+4 9.160000E+1,1.459359E+0,3.500000E+4,4.000000E+4 9.110000E+1,1.458886E+0,3.500000E+4,4.000000E+4 9.080000E+1,1.458424E+0,3.500000E+4,4.000000E+4 9.050000E+1,1.457953E+0,3.500000E+4,4.000000E+4 9.010000E+1,1.457485E+0,3.500000E+4,4.000000E+4 8.980000E+1,1.457045E+0,3.500000E+4,4.000000E+4 8.940000E+1,1.456592E+0,3.500000E+4,4.000000E+4 8.920000E+1,1.456163E+0,3.500000E+4,4.000000E+4 8.880000E+1,1.455710E+0,3.500000E+4,4.000000E+4 8.850000E+1,1.455267E+0,3.500000E+4,4.000000E+4 8.820000E+1,1.454916E+0,3.500000E+4,4.000000E+4 8.780000E+1,1.454508E+0,3.500000E+4,4.000000E+4 8.750000E+1,1.454092E+0,3.500000E+4,4.000000E+4 8.710000E+1,1.453717E+0,3.500000E+4,4.000000E+4 8.680000E+1,1.453297E+0,3.500000E+4,4.000000E+4 8.640000E+1,1.452899E+0,3.500000E+4,4.000000E+4 8.610000E+1,1.452552E+0,3.500000E+4,4.000000E+4 8.580000E+1,1.452182E+0,3.500000E+4,4.000000E+4 8.550000E+1,1.451781E+0,3.500000E+4,4.000000E+4 8.510000E+1,1.451411E+0,3.500000E+4,4.000000E+4 8.480000E+1,1.450993E+0,3.500000E+4,4.000000E+4 8.450000E+1,1.450575E+0,3.500000E+4,4.000000E+4 8.420000E+1,1.450201E+0,3.500000E+4,4.000000E+4 8.390000E+1,1.449814E+0,3.500000E+4,4.000000E+4 8.350000E+1,1.449382E+0,3.500000E+4,4.000000E+4 8.320000E+1,1.449013E+0,3.500000E+4,4.000000E+4 8.290000E+1,1.448604E+0,3.500000E+4,4.000000E+4 8.250000E+1,1.448239E+0,3.500000E+4,4.000000E+4 8.220000E+1,1.447795E+0,3.500000E+4,4.000000E+4 8.190000E+1,1.447384E+0,3.500000E+4,4.000000E+4 8.150000E+1,1.446942E+0,3.500000E+4,4.000000E+4 8.110000E+1,1.446533E+0,3.500000E+4,4.000000E+4 8.070000E+1,1.446148E+0,3.500000E+4,4.000000E+4 8.030000E+1,1.445718E+0,3.500000E+4,4.000000E+4 8.000000E+1,1.445313E+0,3.500000E+4,4.000000E+4 7.960000E+1,1.444870E+0,3.500000E+4,4.000000E+4 7.910000E+1,1.444438E+0,3.500000E+4,4.000000E+4 7.870000E+1,1.444019E+0,3.500000E+4,4.000000E+4 7.830000E+1,1.443515E+0,3.500000E+4,4.000000E+4 7.790000E+1,1.443058E+0,3.500000E+4,4.000000E+4 7.750000E+1,1.442578E+0,3.500000E+4,4.000000E+4 7.710000E+1,1.442063E+0,3.500000E+4,4.000000E+4 7.660000E+1,1.441572E+0,3.500000E+4,4.000000E+4 7.620000E+1,1.441080E+0,3.500000E+4,4.000000E+4 7.570000E+1,1.440559E+0,3.500000E+4,4.000000E+4 7.530000E+1,1.440014E+0,3.500000E+4,4.000000E+4 7.480000E+1,1.439486E+0,3.500000E+4,4.000000E+4 7.450000E+1,1.438959E+0,3.500000E+4,4.000000E+4 7.400000E+1,1.438481E+0,3.500000E+4,4.000000E+4 7.360000E+1,1.437975E+0,3.500000E+4,4.000000E+4 7.310000E+1,1.437474E+0,3.500000E+4,4.000000E+4 7.270000E+1,1.437065E+0,3.500000E+4,4.000000E+4 7.230000E+1,1.436374E+0,3.500000E+4,4.000000E+4 7.180000E+1,1.435935E+0,3.500000E+4,4.000000E+4 7.150000E+1,1.435406E+0,3.500000E+4,4.000000E+4 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