Date:"06.12.2023" Folder:"C:\MESSUNGEN\USER\Philip" Sample-ID:"10012" Process-ID:"231129-k1-3" Measurement Current(mA):"Automatisch" Number of Loops:"2" Tmin:"-20" Tmax:"120" Trate:"5" Comment:"150nm" T, R, X, Y 1.210000E+2,1.272739E+0,-5.300000E+4,4.000000E+4 1.212000E+2,1.272625E+0,-5.300000E+4,4.000000E+4 1.215000E+2,1.272601E+0,-5.300000E+4,4.000000E+4 1.216000E+2,1.272117E+0,-5.300000E+4,4.000000E+4 1.216000E+2,1.271833E+0,-5.300000E+4,4.000000E+4 1.216000E+2,1.271533E+0,-5.300000E+4,4.000000E+4 1.216000E+2,1.270501E+0,-5.300000E+4,4.000000E+4 1.214000E+2,1.270136E+0,-5.300000E+4,4.000000E+4 1.212000E+2,1.269871E+0,-5.300000E+4,4.000000E+4 1.209000E+2,1.268997E+0,-5.300000E+4,4.000000E+4 1.205000E+2,1.269160E+0,-5.300000E+4,4.000000E+4 1.202000E+2,1.268632E+0,-5.300000E+4,4.000000E+4 1.199000E+2,1.268339E+0,-5.300000E+4,4.000000E+4 1.196000E+2,1.268027E+0,-5.300000E+4,4.000000E+4 1.193000E+2,1.267699E+0,-5.300000E+4,4.000000E+4 1.190000E+2,1.267486E+0,-5.300000E+4,4.000000E+4 1.186000E+2,1.267151E+0,-5.300000E+4,4.000000E+4 1.183000E+2,1.266618E+0,-5.300000E+4,4.000000E+4 1.179000E+2,1.267425E+0,-5.300000E+4,4.000000E+4 1.176000E+2,1.266912E+0,-5.300000E+4,4.000000E+4 1.173000E+2,1.266625E+0,-5.300000E+4,4.000000E+4 1.169000E+2,1.266193E+0,-5.300000E+4,4.000000E+4 1.165000E+2,1.265578E+0,-5.300000E+4,4.000000E+4 1.161000E+2,1.265465E+0,-5.300000E+4,4.000000E+4 1.158000E+2,1.265351E+0,-5.300000E+4,4.000000E+4 1.154000E+2,1.265110E+0,-5.300000E+4,4.000000E+4 1.150000E+2,1.264531E+0,-5.300000E+4,4.000000E+4 1.147000E+2,1.264167E+0,-5.300000E+4,4.000000E+4 1.143000E+2,1.263720E+0,-5.300000E+4,4.000000E+4 1.138000E+2,1.263336E+0,-5.300000E+4,4.000000E+4 1.135000E+2,1.263029E+0,-5.300000E+4,4.000000E+4 1.131000E+2,1.262627E+0,-5.300000E+4,4.000000E+4 1.128000E+2,1.262274E+0,-5.300000E+4,4.000000E+4 1.123000E+2,1.261874E+0,-5.300000E+4,4.000000E+4 1.120000E+2,1.261482E+0,-5.300000E+4,4.000000E+4 1.116000E+2,1.261118E+0,-5.300000E+4,4.000000E+4 1.111000E+2,1.260723E+0,-5.300000E+4,4.000000E+4 1.107000E+2,1.260356E+0,-5.300000E+4,4.000000E+4 1.104000E+2,1.259988E+0,-5.300000E+4,4.000000E+4 1.099000E+2,1.259716E+0,-5.300000E+4,4.000000E+4 1.096000E+2,1.259285E+0,-5.300000E+4,4.000000E+4 1.092000E+2,1.259012E+0,-5.300000E+4,4.000000E+4 1.088000E+2,1.258569E+0,-5.300000E+4,4.000000E+4 1.084000E+2,1.258099E+0,-5.300000E+4,4.000000E+4 1.080000E+2,1.257586E+0,-5.300000E+4,4.000000E+4 1.076000E+2,1.257120E+0,-5.300000E+4,4.000000E+4 1.072000E+2,1.256675E+0,-5.300000E+4,4.000000E+4 1.068000E+2,1.256243E+0,-5.300000E+4,4.000000E+4 1.063000E+2,1.255672E+0,-5.300000E+4,4.000000E+4 1.059000E+2,1.255168E+0,-5.300000E+4,4.000000E+4 1.055000E+2,1.254739E+0,-5.300000E+4,4.000000E+4 1.050000E+2,1.254311E+0,-5.300000E+4,4.000000E+4 1.047000E+2,1.253819E+0,-5.300000E+4,4.000000E+4 1.042000E+2,1.253291E+0,-5.300000E+4,4.000000E+4 1.039000E+2,1.253201E+0,-5.300000E+4,4.000000E+4 1.033000E+2,1.252527E+0,-5.300000E+4,4.000000E+4 1.029000E+2,1.252175E+0,-5.300000E+4,4.000000E+4 1.025000E+2,1.252338E+0,-5.300000E+4,4.000000E+4 1.021000E+2,1.251723E+0,-5.300000E+4,4.000000E+4 1.015000E+2,1.250859E+0,-5.300000E+4,4.000000E+4 1.010000E+2,1.250390E+0,-5.300000E+4,4.000000E+4 1.006000E+2,1.249848E+0,-5.300000E+4,4.000000E+4 1.001000E+2,1.249196E+0,-5.300000E+4,4.000000E+4 9.970000E+1,1.248815E+0,-5.300000E+4,4.000000E+4 9.910000E+1,1.248518E+0,-5.300000E+4,4.000000E+4 9.870000E+1,1.247869E+0,-5.300000E+4,4.000000E+4 9.830000E+1,1.247580E+0,-5.300000E+4,4.000000E+4 9.780000E+1,1.247127E+0,-5.300000E+4,4.000000E+4 9.740000E+1,1.246599E+0,-5.300000E+4,4.000000E+4 9.680000E+1,1.246206E+0,-5.300000E+4,4.000000E+4 9.640000E+1,1.245643E+0,-5.300000E+4,4.000000E+4 9.600000E+1,1.245219E+0,-5.300000E+4,4.000000E+4 9.560000E+1,1.244839E+0,-5.300000E+4,4.000000E+4 9.520000E+1,1.244409E+0,-5.300000E+4,4.000000E+4 9.480000E+1,1.244008E+0,-5.300000E+4,4.000000E+4 9.440000E+1,1.243658E+0,-5.300000E+4,4.000000E+4 9.390000E+1,1.243349E+0,-5.300000E+4,4.000000E+4 9.350000E+1,1.242968E+0,-5.300000E+4,4.000000E+4 9.310000E+1,1.242619E+0,-5.300000E+4,4.000000E+4 9.280000E+1,1.242235E+0,-5.300000E+4,4.000000E+4 9.230000E+1,1.241917E+0,-5.300000E+4,4.000000E+4 9.200000E+1,1.241610E+0,-5.300000E+4,4.000000E+4 9.160000E+1,1.241310E+0,-5.300000E+4,4.000000E+4 9.130000E+1,1.240943E+0,-5.300000E+4,4.000000E+4 9.090000E+1,1.240631E+0,-5.300000E+4,4.000000E+4 9.050000E+1,1.240252E+0,-5.300000E+4,4.000000E+4 9.020000E+1,1.239844E+0,-5.300000E+4,4.000000E+4 8.990000E+1,1.239607E+0,-5.300000E+4,4.000000E+4 8.950000E+1,1.239229E+0,-5.300000E+4,4.000000E+4 8.920000E+1,1.238978E+0,-5.300000E+4,4.000000E+4 8.880000E+1,1.238734E+0,-5.300000E+4,4.000000E+4 8.860000E+1,1.238554E+0,-5.300000E+4,4.000000E+4 8.820000E+1,1.238123E+0,-5.300000E+4,4.000000E+4 8.790000E+1,1.237815E+0,-5.300000E+4,4.000000E+4 8.750000E+1,1.237507E+0,-5.300000E+4,4.000000E+4 8.710000E+1,1.237188E+0,-5.300000E+4,4.000000E+4 8.690000E+1,1.236857E+0,-5.300000E+4,4.000000E+4 8.650000E+1,1.236636E+0,-5.300000E+4,4.000000E+4 8.620000E+1,1.236356E+0,-5.300000E+4,4.000000E+4 8.580000E+1,1.236018E+0,-5.300000E+4,4.000000E+4 8.550000E+1,1.235783E+0,-5.300000E+4,4.000000E+4 8.520000E+1,1.235497E+0,-5.300000E+4,4.000000E+4 8.470000E+1,1.235281E+0,-5.300000E+4,4.000000E+4 8.440000E+1,1.234900E+0,-5.300000E+4,4.000000E+4 8.400000E+1,1.234674E+0,-5.300000E+4,4.000000E+4 8.370000E+1,1.234287E+0,-5.300000E+4,4.000000E+4 8.330000E+1,1.233895E+0,-5.300000E+4,4.000000E+4 8.300000E+1,1.233535E+0,-5.300000E+4,4.000000E+4 8.260000E+1,1.233176E+0,-5.300000E+4,4.000000E+4 8.220000E+1,1.232793E+0,-5.300000E+4,4.000000E+4 8.180000E+1,1.232409E+0,-5.300000E+4,4.000000E+4 8.150000E+1,1.231931E+0,-5.300000E+4,4.000000E+4 8.110000E+1,1.231470E+0,-5.300000E+4,4.000000E+4 8.060000E+1,1.230942E+0,-5.300000E+4,4.000000E+4 8.030000E+1,1.230460E+0,-5.300000E+4,4.000000E+4 7.990000E+1,1.230063E+0,-5.300000E+4,4.000000E+4 7.950000E+1,1.229572E+0,-5.300000E+4,4.000000E+4 7.900000E+1,1.229053E+0,-5.300000E+4,4.000000E+4 7.850000E+1,1.228661E+0,-5.300000E+4,4.000000E+4 7.810000E+1,1.228162E+0,-5.300000E+4,4.000000E+4 7.780000E+1,1.227790E+0,-5.300000E+4,4.000000E+4 7.720000E+1,1.227268E+0,-5.300000E+4,4.000000E+4 7.690000E+1,1.226826E+0,-5.300000E+4,4.000000E+4 7.640000E+1,1.226440E+0,-5.300000E+4,4.000000E+4 7.590000E+1,1.226083E+0,-5.300000E+4,4.000000E+4 7.560000E+1,1.225659E+0,-5.300000E+4,4.000000E+4 7.510000E+1,1.225377E+0,-5.300000E+4,4.000000E+4 7.470000E+1,1.224984E+0,-5.300000E+4,4.000000E+4 7.430000E+1,1.224551E+0,-5.300000E+4,4.000000E+4 7.390000E+1,1.224149E+0,-5.300000E+4,4.000000E+4 7.350000E+1,1.223741E+0,-5.300000E+4,4.000000E+4 7.310000E+1,1.223293E+0,-5.300000E+4,4.000000E+4 7.280000E+1,1.222787E+0,-5.300000E+4,4.000000E+4 7.240000E+1,1.222346E+0,-5.300000E+4,4.000000E+4 7.190000E+1,1.221857E+0,-5.300000E+4,4.000000E+4 7.150000E+1,1.221518E+0,-5.300000E+4,4.000000E+4 7.110000E+1,1.221226E+0,-5.300000E+4,4.000000E+4 7.080000E+1,1.220954E+0,-5.300000E+4,4.000000E+4 7.040000E+1,1.220835E+0,-5.300000E+4,4.000000E+4 7.010000E+1,1.220333E+0,-5.300000E+4,4.000000E+4 6.970000E+1,1.220436E+0,-5.300000E+4,4.000000E+4 6.940000E+1,1.220506E+0,-5.300000E+4,4.000000E+4 6.900000E+1,1.220232E+0,-5.300000E+4,4.000000E+4 6.860000E+1,1.219913E+0,-5.300000E+4,4.000000E+4 6.820000E+1,1.219706E+0,-5.300000E+4,4.000000E+4 6.800000E+1,1.219455E+0,-5.300000E+4,4.000000E+4 6.760000E+1,1.219181E+0,-5.300000E+4,4.000000E+4 6.730000E+1,1.218805E+0,-5.300000E+4,4.000000E+4 6.700000E+1,1.218366E+0,-5.300000E+4,4.000000E+4 6.660000E+1,1.217972E+0,-5.300000E+4,4.000000E+4 6.630000E+1,1.217613E+0,-5.300000E+4,4.000000E+4 6.600000E+1,1.217265E+0,-5.300000E+4,4.000000E+4 6.550000E+1,1.216945E+0,-5.300000E+4,4.000000E+4 6.530000E+1,1.216560E+0,-5.300000E+4,4.000000E+4 6.490000E+1,1.216323E+0,-5.300000E+4,4.000000E+4 6.450000E+1,1.216054E+0,-5.300000E+4,4.000000E+4 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