Date:"06.12.2023" Folder:"C:\MESSUNGEN\USER\Philip" Sample-ID:"10012" Process-ID:"231129-k1-3" Measurement Current(mA):"Automatisch" Number of Loops:"2" Tmin:"-20" Tmax:"120" Trate:"5" Comment:"150nm" T, R, X, Y 1.210000E+2,1.517460E+0,-4.400000E+4,4.000000E+4 1.212000E+2,1.517350E+0,-4.400000E+4,4.000000E+4 1.215000E+2,1.517210E+0,-4.400000E+4,4.000000E+4 1.216000E+2,1.517192E+0,-4.400000E+4,4.000000E+4 1.216000E+2,1.517106E+0,-4.400000E+4,4.000000E+4 1.216000E+2,1.516931E+0,-4.400000E+4,4.000000E+4 1.216000E+2,1.516598E+0,-4.400000E+4,4.000000E+4 1.214000E+2,1.516285E+0,-4.400000E+4,4.000000E+4 1.212000E+2,1.515925E+0,-4.400000E+4,4.000000E+4 1.209000E+2,1.515502E+0,-4.400000E+4,4.000000E+4 1.205000E+2,1.515143E+0,-4.400000E+4,4.000000E+4 1.202000E+2,1.514782E+0,-4.400000E+4,4.000000E+4 1.199000E+2,1.514401E+0,-4.400000E+4,4.000000E+4 1.196000E+2,1.513952E+0,-4.400000E+4,4.000000E+4 1.193000E+2,1.513682E+0,-4.400000E+4,4.000000E+4 1.190000E+2,1.513335E+0,-4.400000E+4,4.000000E+4 1.186000E+2,1.512901E+0,-4.400000E+4,4.000000E+4 1.183000E+2,1.512385E+0,-4.400000E+4,4.000000E+4 1.179000E+2,1.512015E+0,-4.400000E+4,4.000000E+4 1.176000E+2,1.511603E+0,-4.400000E+4,4.000000E+4 1.173000E+2,1.511287E+0,-4.400000E+4,4.000000E+4 1.169000E+2,1.510760E+0,-4.400000E+4,4.000000E+4 1.165000E+2,1.510264E+0,-4.400000E+4,4.000000E+4 1.161000E+2,1.509878E+0,-4.400000E+4,4.000000E+4 1.158000E+2,1.509320E+0,-4.400000E+4,4.000000E+4 1.154000E+2,1.508914E+0,-4.400000E+4,4.000000E+4 1.150000E+2,1.508524E+0,-4.400000E+4,4.000000E+4 1.147000E+2,1.507999E+0,-4.400000E+4,4.000000E+4 1.143000E+2,1.507524E+0,-4.400000E+4,4.000000E+4 1.138000E+2,1.507114E+0,-4.400000E+4,4.000000E+4 1.135000E+2,1.506645E+0,-4.400000E+4,4.000000E+4 1.131000E+2,1.506110E+0,-4.400000E+4,4.000000E+4 1.128000E+2,1.505668E+0,-4.400000E+4,4.000000E+4 1.123000E+2,1.505028E+0,-4.400000E+4,4.000000E+4 1.120000E+2,1.504539E+0,-4.400000E+4,4.000000E+4 1.116000E+2,1.503990E+0,-4.400000E+4,4.000000E+4 1.111000E+2,1.503639E+0,-4.400000E+4,4.000000E+4 1.107000E+2,1.503160E+0,-4.400000E+4,4.000000E+4 1.104000E+2,1.502793E+0,-4.400000E+4,4.000000E+4 1.099000E+2,1.502331E+0,-4.400000E+4,4.000000E+4 1.096000E+2,1.501890E+0,-4.400000E+4,4.000000E+4 1.092000E+2,1.501539E+0,-4.400000E+4,4.000000E+4 1.088000E+2,1.501108E+0,-4.400000E+4,4.000000E+4 1.084000E+2,1.500739E+0,-4.400000E+4,4.000000E+4 1.080000E+2,1.500296E+0,-4.400000E+4,4.000000E+4 1.076000E+2,1.499759E+0,-4.400000E+4,4.000000E+4 1.072000E+2,1.499315E+0,-4.400000E+4,4.000000E+4 1.068000E+2,1.498902E+0,-4.400000E+4,4.000000E+4 1.063000E+2,1.499002E+0,-4.400000E+4,4.000000E+4 1.059000E+2,1.500471E+0,-4.400000E+4,4.000000E+4 1.055000E+2,1.499926E+0,-4.400000E+4,4.000000E+4 1.050000E+2,1.499389E+0,-4.400000E+4,4.000000E+4 1.047000E+2,1.498831E+0,-4.400000E+4,4.000000E+4 1.042000E+2,1.498290E+0,-4.400000E+4,4.000000E+4 1.039000E+2,1.497600E+0,-4.400000E+4,4.000000E+4 1.033000E+2,1.497069E+0,-4.400000E+4,4.000000E+4 1.029000E+2,1.496651E+0,-4.400000E+4,4.000000E+4 1.025000E+2,1.496076E+0,-4.400000E+4,4.000000E+4 1.021000E+2,1.495474E+0,-4.400000E+4,4.000000E+4 1.015000E+2,1.494988E+0,-4.400000E+4,4.000000E+4 1.010000E+2,1.494442E+0,-4.400000E+4,4.000000E+4 1.006000E+2,1.493866E+0,-4.400000E+4,4.000000E+4 1.001000E+2,1.493389E+0,-4.400000E+4,4.000000E+4 9.970000E+1,1.492917E+0,-4.400000E+4,4.000000E+4 9.910000E+1,1.492434E+0,-4.400000E+4,4.000000E+4 9.870000E+1,1.492042E+0,-4.400000E+4,4.000000E+4 9.830000E+1,1.491563E+0,-4.400000E+4,4.000000E+4 9.780000E+1,1.491166E+0,-4.400000E+4,4.000000E+4 9.740000E+1,1.490663E+0,-4.400000E+4,4.000000E+4 9.680000E+1,1.490293E+0,-4.400000E+4,4.000000E+4 9.640000E+1,1.489845E+0,-4.400000E+4,4.000000E+4 9.600000E+1,1.489473E+0,-4.400000E+4,4.000000E+4 9.560000E+1,1.488907E+0,-4.400000E+4,4.000000E+4 9.520000E+1,1.488505E+0,-4.400000E+4,4.000000E+4 9.480000E+1,1.488024E+0,-4.400000E+4,4.000000E+4 9.440000E+1,1.487702E+0,-4.400000E+4,4.000000E+4 9.390000E+1,1.487248E+0,-4.400000E+4,4.000000E+4 9.350000E+1,1.486879E+0,-4.400000E+4,4.000000E+4 9.310000E+1,1.486481E+0,-4.400000E+4,4.000000E+4 9.280000E+1,1.486054E+0,-4.400000E+4,4.000000E+4 9.230000E+1,1.485735E+0,-4.400000E+4,4.000000E+4 9.200000E+1,1.485365E+0,-4.400000E+4,4.000000E+4 9.160000E+1,1.485036E+0,-4.400000E+4,4.000000E+4 9.130000E+1,1.484641E+0,-4.400000E+4,4.000000E+4 9.090000E+1,1.484182E+0,-4.400000E+4,4.000000E+4 9.050000E+1,1.483765E+0,-4.400000E+4,4.000000E+4 9.020000E+1,1.483412E+0,-4.400000E+4,4.000000E+4 8.990000E+1,1.483129E+0,-4.400000E+4,4.000000E+4 8.950000E+1,1.482745E+0,-4.400000E+4,4.000000E+4 8.920000E+1,1.482340E+0,-4.400000E+4,4.000000E+4 8.880000E+1,1.482055E+0,-4.400000E+4,4.000000E+4 8.860000E+1,1.481607E+0,-4.400000E+4,4.000000E+4 8.820000E+1,1.481294E+0,-4.400000E+4,4.000000E+4 8.790000E+1,1.480978E+0,-4.400000E+4,4.000000E+4 8.750000E+1,1.480654E+0,-4.400000E+4,4.000000E+4 8.710000E+1,1.480299E+0,-4.400000E+4,4.000000E+4 8.690000E+1,1.479986E+0,-4.400000E+4,4.000000E+4 8.650000E+1,1.479742E+0,-4.400000E+4,4.000000E+4 8.620000E+1,1.479452E+0,-4.400000E+4,4.000000E+4 8.580000E+1,1.479445E+0,-4.400000E+4,4.000000E+4 8.550000E+1,1.479239E+0,-4.400000E+4,4.000000E+4 8.520000E+1,1.478907E+0,-4.400000E+4,4.000000E+4 8.470000E+1,1.478573E+0,-4.400000E+4,4.000000E+4 8.440000E+1,1.478078E+0,-4.400000E+4,4.000000E+4 8.400000E+1,1.477722E+0,-4.400000E+4,4.000000E+4 8.370000E+1,1.477477E+0,-4.400000E+4,4.000000E+4 8.330000E+1,1.477121E+0,-4.400000E+4,4.000000E+4 8.300000E+1,1.476396E+0,-4.400000E+4,4.000000E+4 8.260000E+1,1.475971E+0,-4.400000E+4,4.000000E+4 8.220000E+1,1.475313E+0,-4.400000E+4,4.000000E+4 8.180000E+1,1.474658E+0,-4.400000E+4,4.000000E+4 8.150000E+1,1.474120E+0,-4.400000E+4,4.000000E+4 8.110000E+1,1.473453E+0,-4.400000E+4,4.000000E+4 8.060000E+1,1.472985E+0,-4.400000E+4,4.000000E+4 8.030000E+1,1.472613E+0,-4.400000E+4,4.000000E+4 7.990000E+1,1.472237E+0,-4.400000E+4,4.000000E+4 7.950000E+1,1.471764E+0,-4.400000E+4,4.000000E+4 7.900000E+1,1.471302E+0,-4.400000E+4,4.000000E+4 7.850000E+1,1.470633E+0,-4.400000E+4,4.000000E+4 7.810000E+1,1.470214E+0,-4.400000E+4,4.000000E+4 7.780000E+1,1.469791E+0,-4.400000E+4,4.000000E+4 7.720000E+1,1.469502E+0,-4.400000E+4,4.000000E+4 7.690000E+1,1.469264E+0,-4.400000E+4,4.000000E+4 7.640000E+1,1.468950E+0,-4.400000E+4,4.000000E+4 7.590000E+1,1.468547E+0,-4.400000E+4,4.000000E+4 7.560000E+1,1.468129E+0,-4.400000E+4,4.000000E+4 7.510000E+1,1.467752E+0,-4.400000E+4,4.000000E+4 7.470000E+1,1.467263E+0,-4.400000E+4,4.000000E+4 7.430000E+1,1.466787E+0,-4.400000E+4,4.000000E+4 7.390000E+1,1.466326E+0,-4.400000E+4,4.000000E+4 7.350000E+1,1.465884E+0,-4.400000E+4,4.000000E+4 7.310000E+1,1.465419E+0,-4.400000E+4,4.000000E+4 7.280000E+1,1.464989E+0,-4.400000E+4,4.000000E+4 7.240000E+1,1.464517E+0,-4.400000E+4,4.000000E+4 7.190000E+1,1.464085E+0,-4.400000E+4,4.000000E+4 7.150000E+1,1.463615E+0,-4.400000E+4,4.000000E+4 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