Date:"06.12.2023" Folder:"C:\MESSUNGEN\USER\Philip" Sample-ID:"10012" Process-ID:"231129-k1-3" Measurement Current(mA):"Automatisch" Number of Loops:"2" Tmin:"-20" Tmax:"120" Trate:"5" Comment:"150nm" T, R, X, Y 1.210000E+2,1.157931E+0,-3.950000E+4,4.000000E+4 1.212000E+2,1.158003E+0,-3.950000E+4,4.000000E+4 1.215000E+2,1.158116E+0,-3.950000E+4,4.000000E+4 1.216000E+2,1.158045E+0,-3.950000E+4,4.000000E+4 1.216000E+2,1.157922E+0,-3.950000E+4,4.000000E+4 1.216000E+2,1.157743E+0,-3.950000E+4,4.000000E+4 1.216000E+2,1.157513E+0,-3.950000E+4,4.000000E+4 1.214000E+2,1.157255E+0,-3.950000E+4,4.000000E+4 1.212000E+2,1.157024E+0,-3.950000E+4,4.000000E+4 1.209000E+2,1.156771E+0,-3.950000E+4,4.000000E+4 1.205000E+2,1.156488E+0,-3.950000E+4,4.000000E+4 1.202000E+2,1.156182E+0,-3.950000E+4,4.000000E+4 1.199000E+2,1.155950E+0,-3.950000E+4,4.000000E+4 1.196000E+2,1.155678E+0,-3.950000E+4,4.000000E+4 1.193000E+2,1.155398E+0,-3.950000E+4,4.000000E+4 1.190000E+2,1.155122E+0,-3.950000E+4,4.000000E+4 1.186000E+2,1.154814E+0,-3.950000E+4,4.000000E+4 1.183000E+2,1.154488E+0,-3.950000E+4,4.000000E+4 1.179000E+2,1.154204E+0,-3.950000E+4,4.000000E+4 1.176000E+2,1.153896E+0,-3.950000E+4,4.000000E+4 1.173000E+2,1.153558E+0,-3.950000E+4,4.000000E+4 1.169000E+2,1.153190E+0,-3.950000E+4,4.000000E+4 1.165000E+2,1.152921E+0,-3.950000E+4,4.000000E+4 1.161000E+2,1.152597E+0,-3.950000E+4,4.000000E+4 1.158000E+2,1.152241E+0,-3.950000E+4,4.000000E+4 1.154000E+2,1.151927E+0,-3.950000E+4,4.000000E+4 1.150000E+2,1.151579E+0,-3.950000E+4,4.000000E+4 1.147000E+2,1.151199E+0,-3.950000E+4,4.000000E+4 1.143000E+2,1.150877E+0,-3.950000E+4,4.000000E+4 1.138000E+2,1.150584E+0,-3.950000E+4,4.000000E+4 1.135000E+2,1.150213E+0,-3.950000E+4,4.000000E+4 1.131000E+2,1.149898E+0,-3.950000E+4,4.000000E+4 1.128000E+2,1.149575E+0,-3.950000E+4,4.000000E+4 1.123000E+2,1.149135E+0,-3.950000E+4,4.000000E+4 1.120000E+2,1.148855E+0,-3.950000E+4,4.000000E+4 1.116000E+2,1.148530E+0,-3.950000E+4,4.000000E+4 1.111000E+2,1.148192E+0,-3.950000E+4,4.000000E+4 1.107000E+2,1.147865E+0,-3.950000E+4,4.000000E+4 1.104000E+2,1.147516E+0,-3.950000E+4,4.000000E+4 1.099000E+2,1.147191E+0,-3.950000E+4,4.000000E+4 1.096000E+2,1.146918E+0,-3.950000E+4,4.000000E+4 1.092000E+2,1.146614E+0,-3.950000E+4,4.000000E+4 1.088000E+2,1.146311E+0,-3.950000E+4,4.000000E+4 1.084000E+2,1.145972E+0,-3.950000E+4,4.000000E+4 1.080000E+2,1.145625E+0,-3.950000E+4,4.000000E+4 1.076000E+2,1.145288E+0,-3.950000E+4,4.000000E+4 1.072000E+2,1.144977E+0,-3.950000E+4,4.000000E+4 1.068000E+2,1.144661E+0,-3.950000E+4,4.000000E+4 1.063000E+2,1.144318E+0,-3.950000E+4,4.000000E+4 1.059000E+2,1.144039E+0,-3.950000E+4,4.000000E+4 1.055000E+2,1.143679E+0,-3.950000E+4,4.000000E+4 1.050000E+2,1.143332E+0,-3.950000E+4,4.000000E+4 1.047000E+2,1.142939E+0,-3.950000E+4,4.000000E+4 1.042000E+2,1.142560E+0,-3.950000E+4,4.000000E+4 1.039000E+2,1.142173E+0,-3.950000E+4,4.000000E+4 1.033000E+2,1.141783E+0,-3.950000E+4,4.000000E+4 1.029000E+2,1.141354E+0,-3.950000E+4,4.000000E+4 1.025000E+2,1.140972E+0,-3.950000E+4,4.000000E+4 1.021000E+2,1.140494E+0,-3.950000E+4,4.000000E+4 1.015000E+2,1.140119E+0,-3.950000E+4,4.000000E+4 1.010000E+2,1.139807E+0,-3.950000E+4,4.000000E+4 1.006000E+2,1.139412E+0,-3.950000E+4,4.000000E+4 1.001000E+2,1.139074E+0,-3.950000E+4,4.000000E+4 9.970000E+1,1.138692E+0,-3.950000E+4,4.000000E+4 9.910000E+1,1.138418E+0,-3.950000E+4,4.000000E+4 9.870000E+1,1.138091E+0,-3.950000E+4,4.000000E+4 9.830000E+1,1.137716E+0,-3.950000E+4,4.000000E+4 9.780000E+1,1.137389E+0,-3.950000E+4,4.000000E+4 9.740000E+1,1.137053E+0,-3.950000E+4,4.000000E+4 9.680000E+1,1.136715E+0,-3.950000E+4,4.000000E+4 9.640000E+1,1.136423E+0,-3.950000E+4,4.000000E+4 9.600000E+1,1.136004E+0,-3.950000E+4,4.000000E+4 9.560000E+1,1.135659E+0,-3.950000E+4,4.000000E+4 9.520000E+1,1.135324E+0,-3.950000E+4,4.000000E+4 9.480000E+1,1.135007E+0,-3.950000E+4,4.000000E+4 9.440000E+1,1.134664E+0,-3.950000E+4,4.000000E+4 9.390000E+1,1.134288E+0,-3.950000E+4,4.000000E+4 9.350000E+1,1.133938E+0,-3.950000E+4,4.000000E+4 9.310000E+1,1.133646E+0,-3.950000E+4,4.000000E+4 9.280000E+1,1.133329E+0,-3.950000E+4,4.000000E+4 9.230000E+1,1.132995E+0,-3.950000E+4,4.000000E+4 9.200000E+1,1.132684E+0,-3.950000E+4,4.000000E+4 9.160000E+1,1.132367E+0,-3.950000E+4,4.000000E+4 9.130000E+1,1.132027E+0,-3.950000E+4,4.000000E+4 9.090000E+1,1.131716E+0,-3.950000E+4,4.000000E+4 9.050000E+1,1.131414E+0,-3.950000E+4,4.000000E+4 9.020000E+1,1.131100E+0,-3.950000E+4,4.000000E+4 8.990000E+1,1.130797E+0,-3.950000E+4,4.000000E+4 8.950000E+1,1.130520E+0,-3.950000E+4,4.000000E+4 8.920000E+1,1.130266E+0,-3.950000E+4,4.000000E+4 8.880000E+1,1.129993E+0,-3.950000E+4,4.000000E+4 8.860000E+1,1.129705E+0,-3.950000E+4,4.000000E+4 8.820000E+1,1.129396E+0,-3.950000E+4,4.000000E+4 8.790000E+1,1.129129E+0,-3.950000E+4,4.000000E+4 8.750000E+1,1.128845E+0,-3.950000E+4,4.000000E+4 8.710000E+1,1.128556E+0,-3.950000E+4,4.000000E+4 8.690000E+1,1.128283E+0,-3.950000E+4,4.000000E+4 8.650000E+1,1.127963E+0,-3.950000E+4,4.000000E+4 8.620000E+1,1.127681E+0,-3.950000E+4,4.000000E+4 8.580000E+1,1.127358E+0,-3.950000E+4,4.000000E+4 8.550000E+1,1.127047E+0,-3.950000E+4,4.000000E+4 8.520000E+1,1.126719E+0,-3.950000E+4,4.000000E+4 8.470000E+1,1.126433E+0,-3.950000E+4,4.000000E+4 8.440000E+1,1.126108E+0,-3.950000E+4,4.000000E+4 8.400000E+1,1.125789E+0,-3.950000E+4,4.000000E+4 8.370000E+1,1.125477E+0,-3.950000E+4,4.000000E+4 8.330000E+1,1.125194E+0,-3.950000E+4,4.000000E+4 8.300000E+1,1.124875E+0,-3.950000E+4,4.000000E+4 8.260000E+1,1.124553E+0,-3.950000E+4,4.000000E+4 8.220000E+1,1.124202E+0,-3.950000E+4,4.000000E+4 8.180000E+1,1.123855E+0,-3.950000E+4,4.000000E+4 8.150000E+1,1.123488E+0,-3.950000E+4,4.000000E+4 8.110000E+1,1.123142E+0,-3.950000E+4,4.000000E+4 8.060000E+1,1.122767E+0,-3.950000E+4,4.000000E+4 8.030000E+1,1.122386E+0,-3.950000E+4,4.000000E+4 7.990000E+1,1.122055E+0,-3.950000E+4,4.000000E+4 7.950000E+1,1.121638E+0,-3.950000E+4,4.000000E+4 7.900000E+1,1.121263E+0,-3.950000E+4,4.000000E+4 7.850000E+1,1.120904E+0,-3.950000E+4,4.000000E+4 7.810000E+1,1.120506E+0,-3.950000E+4,4.000000E+4 7.780000E+1,1.120136E+0,-3.950000E+4,4.000000E+4 7.720000E+1,1.119780E+0,-3.950000E+4,4.000000E+4 7.690000E+1,1.119413E+0,-3.950000E+4,4.000000E+4 7.640000E+1,1.119030E+0,-3.950000E+4,4.000000E+4 7.590000E+1,1.118713E+0,-3.950000E+4,4.000000E+4 7.560000E+1,1.118362E+0,-3.950000E+4,4.000000E+4 7.510000E+1,1.118044E+0,-3.950000E+4,4.000000E+4 7.470000E+1,1.117675E+0,-3.950000E+4,4.000000E+4 7.430000E+1,1.117371E+0,-3.950000E+4,4.000000E+4 7.390000E+1,1.117063E+0,-3.950000E+4,4.000000E+4 7.350000E+1,1.116721E+0,-3.950000E+4,4.000000E+4 7.310000E+1,1.116397E+0,-3.950000E+4,4.000000E+4 7.280000E+1,1.116127E+0,-3.950000E+4,4.000000E+4 7.240000E+1,1.115814E+0,-3.950000E+4,4.000000E+4 7.190000E+1,1.115444E+0,-3.950000E+4,4.000000E+4 7.150000E+1,1.115141E+0,-3.950000E+4,4.000000E+4 7.110000E+1,1.114857E+0,-3.950000E+4,4.000000E+4 7.080000E+1,1.114573E+0,-3.950000E+4,4.000000E+4 7.040000E+1,1.114315E+0,-3.950000E+4,4.000000E+4 7.010000E+1,1.114026E+0,-3.950000E+4,4.000000E+4 6.970000E+1,1.113768E+0,-3.950000E+4,4.000000E+4 6.940000E+1,1.113491E+0,-3.950000E+4,4.000000E+4 6.900000E+1,1.113232E+0,-3.950000E+4,4.000000E+4 6.860000E+1,1.112963E+0,-3.950000E+4,4.000000E+4 6.820000E+1,1.112723E+0,-3.950000E+4,4.000000E+4 6.800000E+1,1.112467E+0,-3.950000E+4,4.000000E+4 6.760000E+1,1.112259E+0,-3.950000E+4,4.000000E+4 6.730000E+1,1.111957E+0,-3.950000E+4,4.000000E+4 6.700000E+1,1.111695E+0,-3.950000E+4,4.000000E+4 6.660000E+1,1.111372E+0,-3.950000E+4,4.000000E+4 6.630000E+1,1.111080E+0,-3.950000E+4,4.000000E+4 6.600000E+1,1.110792E+0,-3.950000E+4,4.000000E+4 6.550000E+1,1.110463E+0,-3.950000E+4,4.000000E+4 6.530000E+1,1.110167E+0,-3.950000E+4,4.000000E+4 6.490000E+1,1.109854E+0,-3.950000E+4,4.000000E+4 6.450000E+1,1.109570E+0,-3.950000E+4,4.000000E+4 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