Date:"06.12.2023" Folder:"C:\MESSUNGEN\USER\Philip" Sample-ID:"10012" Process-ID:"231129-k1-3" Measurement Current(mA):"Automatisch" Number of Loops:"2" Tmin:"-20" Tmax:"120" Trate:"5" Comment:"150nm" T, R, X, Y 1.210000E+2,1.399454E+0,-3.500000E+4,4.000000E+4 1.212000E+2,1.399611E+0,-3.500000E+4,4.000000E+4 1.215000E+2,1.399579E+0,-3.500000E+4,4.000000E+4 1.216000E+2,1.399471E+0,-3.500000E+4,4.000000E+4 1.216000E+2,1.399343E+0,-3.500000E+4,4.000000E+4 1.216000E+2,1.399081E+0,-3.500000E+4,4.000000E+4 1.216000E+2,1.398081E+0,-3.500000E+4,4.000000E+4 1.214000E+2,1.397759E+0,-3.500000E+4,4.000000E+4 1.212000E+2,1.397463E+0,-3.500000E+4,4.000000E+4 1.209000E+2,1.397123E+0,-3.500000E+4,4.000000E+4 1.205000E+2,1.396749E+0,-3.500000E+4,4.000000E+4 1.202000E+2,1.396374E+0,-3.500000E+4,4.000000E+4 1.199000E+2,1.395976E+0,-3.500000E+4,4.000000E+4 1.196000E+2,1.395682E+0,-3.500000E+4,4.000000E+4 1.193000E+2,1.395324E+0,-3.500000E+4,4.000000E+4 1.190000E+2,1.394966E+0,-3.500000E+4,4.000000E+4 1.186000E+2,1.394601E+0,-3.500000E+4,4.000000E+4 1.183000E+2,1.394221E+0,-3.500000E+4,4.000000E+4 1.179000E+2,1.393860E+0,-3.500000E+4,4.000000E+4 1.176000E+2,1.393496E+0,-3.500000E+4,4.000000E+4 1.173000E+2,1.393110E+0,-3.500000E+4,4.000000E+4 1.169000E+2,1.392676E+0,-3.500000E+4,4.000000E+4 1.165000E+2,1.392273E+0,-3.500000E+4,4.000000E+4 1.161000E+2,1.391900E+0,-3.500000E+4,4.000000E+4 1.158000E+2,1.391544E+0,-3.500000E+4,4.000000E+4 1.154000E+2,1.391139E+0,-3.500000E+4,4.000000E+4 1.150000E+2,1.390750E+0,-3.500000E+4,4.000000E+4 1.147000E+2,1.390305E+0,-3.500000E+4,4.000000E+4 1.143000E+2,1.389982E+0,-3.500000E+4,4.000000E+4 1.138000E+2,1.389640E+0,-3.500000E+4,4.000000E+4 1.135000E+2,1.389233E+0,-3.500000E+4,4.000000E+4 1.131000E+2,1.388880E+0,-3.500000E+4,4.000000E+4 1.128000E+2,1.388455E+0,-3.500000E+4,4.000000E+4 1.123000E+2,1.388105E+0,-3.500000E+4,4.000000E+4 1.120000E+2,1.387764E+0,-3.500000E+4,4.000000E+4 1.116000E+2,1.387370E+0,-3.500000E+4,4.000000E+4 1.111000E+2,1.386904E+0,-3.500000E+4,4.000000E+4 1.107000E+2,1.386455E+0,-3.500000E+4,4.000000E+4 1.104000E+2,1.386041E+0,-3.500000E+4,4.000000E+4 1.099000E+2,1.385659E+0,-3.500000E+4,4.000000E+4 1.096000E+2,1.385282E+0,-3.500000E+4,4.000000E+4 1.092000E+2,1.384825E+0,-3.500000E+4,4.000000E+4 1.088000E+2,1.384437E+0,-3.500000E+4,4.000000E+4 1.084000E+2,1.384030E+0,-3.500000E+4,4.000000E+4 1.080000E+2,1.383582E+0,-3.500000E+4,4.000000E+4 1.076000E+2,1.383150E+0,-3.500000E+4,4.000000E+4 1.072000E+2,1.382770E+0,-3.500000E+4,4.000000E+4 1.068000E+2,1.382241E+0,-3.500000E+4,4.000000E+4 1.063000E+2,1.381853E+0,-3.500000E+4,4.000000E+4 1.059000E+2,1.381326E+0,-3.500000E+4,4.000000E+4 1.055000E+2,1.380421E+0,-3.500000E+4,4.000000E+4 1.050000E+2,1.379880E+0,-3.500000E+4,4.000000E+4 1.047000E+2,1.379338E+0,-3.500000E+4,4.000000E+4 1.042000E+2,1.378855E+0,-3.500000E+4,4.000000E+4 1.039000E+2,1.378490E+0,-3.500000E+4,4.000000E+4 1.033000E+2,1.378009E+0,-3.500000E+4,4.000000E+4 1.029000E+2,1.377551E+0,-3.500000E+4,4.000000E+4 1.025000E+2,1.376548E+0,-3.500000E+4,4.000000E+4 1.021000E+2,1.376008E+0,-3.500000E+4,4.000000E+4 1.015000E+2,1.375538E+0,-3.500000E+4,4.000000E+4 1.010000E+2,1.375117E+0,-3.500000E+4,4.000000E+4 1.006000E+2,1.374588E+0,-3.500000E+4,4.000000E+4 1.001000E+2,1.374090E+0,-3.500000E+4,4.000000E+4 9.970000E+1,1.373623E+0,-3.500000E+4,4.000000E+4 9.910000E+1,1.373270E+0,-3.500000E+4,4.000000E+4 9.870000E+1,1.372761E+0,-3.500000E+4,4.000000E+4 9.830000E+1,1.372286E+0,-3.500000E+4,4.000000E+4 9.780000E+1,1.371863E+0,-3.500000E+4,4.000000E+4 9.740000E+1,1.371409E+0,-3.500000E+4,4.000000E+4 9.680000E+1,1.371010E+0,-3.500000E+4,4.000000E+4 9.640000E+1,1.370507E+0,-3.500000E+4,4.000000E+4 9.600000E+1,1.370105E+0,-3.500000E+4,4.000000E+4 9.560000E+1,1.369687E+0,-3.500000E+4,4.000000E+4 9.520000E+1,1.369313E+0,-3.500000E+4,4.000000E+4 9.480000E+1,1.368957E+0,-3.500000E+4,4.000000E+4 9.440000E+1,1.368622E+0,-3.500000E+4,4.000000E+4 9.390000E+1,1.368248E+0,-3.500000E+4,4.000000E+4 9.350000E+1,1.367894E+0,-3.500000E+4,4.000000E+4 9.310000E+1,1.367419E+0,-3.500000E+4,4.000000E+4 9.280000E+1,1.367119E+0,-3.500000E+4,4.000000E+4 9.230000E+1,1.366759E+0,-3.500000E+4,4.000000E+4 9.200000E+1,1.366455E+0,-3.500000E+4,4.000000E+4 9.160000E+1,1.366059E+0,-3.500000E+4,4.000000E+4 9.130000E+1,1.365752E+0,-3.500000E+4,4.000000E+4 9.090000E+1,1.365454E+0,-3.500000E+4,4.000000E+4 9.050000E+1,1.365139E+0,-3.500000E+4,4.000000E+4 9.020000E+1,1.364820E+0,-3.500000E+4,4.000000E+4 8.990000E+1,1.364497E+0,-3.500000E+4,4.000000E+4 8.950000E+1,1.364166E+0,-3.500000E+4,4.000000E+4 8.920000E+1,1.363836E+0,-3.500000E+4,4.000000E+4 8.880000E+1,1.363603E+0,-3.500000E+4,4.000000E+4 8.860000E+1,1.363327E+0,-3.500000E+4,4.000000E+4 8.820000E+1,1.362965E+0,-3.500000E+4,4.000000E+4 8.790000E+1,1.362312E+0,-3.500000E+4,4.000000E+4 8.750000E+1,1.361948E+0,-3.500000E+4,4.000000E+4 8.710000E+1,1.361488E+0,-3.500000E+4,4.000000E+4 8.690000E+1,1.361376E+0,-3.500000E+4,4.000000E+4 8.650000E+1,1.361080E+0,-3.500000E+4,4.000000E+4 8.620000E+1,1.360714E+0,-3.500000E+4,4.000000E+4 8.580000E+1,1.360382E+0,-3.500000E+4,4.000000E+4 8.550000E+1,1.360060E+0,-3.500000E+4,4.000000E+4 8.520000E+1,1.359761E+0,-3.500000E+4,4.000000E+4 8.470000E+1,1.359052E+0,-3.500000E+4,4.000000E+4 8.440000E+1,1.358681E+0,-3.500000E+4,4.000000E+4 8.400000E+1,1.358366E+0,-3.500000E+4,4.000000E+4 8.370000E+1,1.358086E+0,-3.500000E+4,4.000000E+4 8.330000E+1,1.357757E+0,-3.500000E+4,4.000000E+4 8.300000E+1,1.357390E+0,-3.500000E+4,4.000000E+4 8.260000E+1,1.357072E+0,-3.500000E+4,4.000000E+4 8.220000E+1,1.356657E+0,-3.500000E+4,4.000000E+4 8.180000E+1,1.356252E+0,-3.500000E+4,4.000000E+4 8.150000E+1,1.355830E+0,-3.500000E+4,4.000000E+4 8.110000E+1,1.355425E+0,-3.500000E+4,4.000000E+4 8.060000E+1,1.354928E+0,-3.500000E+4,4.000000E+4 8.030000E+1,1.354493E+0,-3.500000E+4,4.000000E+4 7.990000E+1,1.354049E+0,-3.500000E+4,4.000000E+4 7.950000E+1,1.353601E+0,-3.500000E+4,4.000000E+4 7.900000E+1,1.353059E+0,-3.500000E+4,4.000000E+4 7.850000E+1,1.352581E+0,-3.500000E+4,4.000000E+4 7.810000E+1,1.352147E+0,-3.500000E+4,4.000000E+4 7.780000E+1,1.351740E+0,-3.500000E+4,4.000000E+4 7.720000E+1,1.351453E+0,-3.500000E+4,4.000000E+4 7.690000E+1,1.351002E+0,-3.500000E+4,4.000000E+4 7.640000E+1,1.350529E+0,-3.500000E+4,4.000000E+4 7.590000E+1,1.350169E+0,-3.500000E+4,4.000000E+4 7.560000E+1,1.349704E+0,-3.500000E+4,4.000000E+4 7.510000E+1,1.349296E+0,-3.500000E+4,4.000000E+4 7.470000E+1,1.348884E+0,-3.500000E+4,4.000000E+4 7.430000E+1,1.348418E+0,-3.500000E+4,4.000000E+4 7.390000E+1,1.348007E+0,-3.500000E+4,4.000000E+4 7.350000E+1,1.347640E+0,-3.500000E+4,4.000000E+4 7.310000E+1,1.347168E+0,-3.500000E+4,4.000000E+4 7.280000E+1,1.346884E+0,-3.500000E+4,4.000000E+4 7.240000E+1,1.346518E+0,-3.500000E+4,4.000000E+4 7.190000E+1,1.346107E+0,-3.500000E+4,4.000000E+4 7.150000E+1,1.345761E+0,-3.500000E+4,4.000000E+4 7.110000E+1,1.345439E+0,-3.500000E+4,4.000000E+4 7.080000E+1,1.345088E+0,-3.500000E+4,4.000000E+4 7.040000E+1,1.344787E+0,-3.500000E+4,4.000000E+4 7.010000E+1,1.344417E+0,-3.500000E+4,4.000000E+4 6.970000E+1,1.344081E+0,-3.500000E+4,4.000000E+4 6.940000E+1,1.343827E+0,-3.500000E+4,4.000000E+4 6.900000E+1,1.343527E+0,-3.500000E+4,4.000000E+4 6.860000E+1,1.343234E+0,-3.500000E+4,4.000000E+4 6.820000E+1,1.342881E+0,-3.500000E+4,4.000000E+4 6.800000E+1,1.342523E+0,-3.500000E+4,4.000000E+4 6.760000E+1,1.342210E+0,-3.500000E+4,4.000000E+4 6.730000E+1,1.341939E+0,-3.500000E+4,4.000000E+4 6.700000E+1,1.341595E+0,-3.500000E+4,4.000000E+4 6.660000E+1,1.341245E+0,-3.500000E+4,4.000000E+4 6.630000E+1,1.340919E+0,-3.500000E+4,4.000000E+4 6.600000E+1,1.340582E+0,-3.500000E+4,4.000000E+4 6.550000E+1,1.340164E+0,-3.500000E+4,4.000000E+4 6.530000E+1,1.339884E+0,-3.500000E+4,4.000000E+4 6.490000E+1,1.339525E+0,-3.500000E+4,4.000000E+4 6.450000E+1,1.339249E+0,-3.500000E+4,4.000000E+4 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