Date:"06.12.2023" Folder:"C:\MESSUNGEN\USER\Philip" Sample-ID:"10012" Process-ID:"231129-k1-3" Measurement Current(mA):"Automatisch" Number of Loops:"2" Tmin:"-20" Tmax:"120" Trate:"5" Comment:"150nm" T, R, X, Y 1.208000E+2,1.223444E+0,-1.800000E+4,6.500000E+4 1.211000E+2,1.222568E+0,-1.800000E+4,6.500000E+4 1.214000E+2,1.222459E+0,-1.800000E+4,6.500000E+4 1.215000E+2,1.222317E+0,-1.800000E+4,6.500000E+4 1.216000E+2,1.222021E+0,-1.800000E+4,6.500000E+4 1.215000E+2,1.221725E+0,-1.800000E+4,6.500000E+4 1.214000E+2,1.221548E+0,-1.800000E+4,6.500000E+4 1.212000E+2,1.221315E+0,-1.800000E+4,6.500000E+4 1.209000E+2,1.221093E+0,-1.800000E+4,6.500000E+4 1.206000E+2,1.220654E+0,-1.800000E+4,6.500000E+4 1.204000E+2,1.220208E+0,-1.800000E+4,6.500000E+4 1.200000E+2,1.219716E+0,-1.800000E+4,6.500000E+4 1.197000E+2,1.219275E+0,-1.800000E+4,6.500000E+4 1.194000E+2,1.219032E+0,-1.800000E+4,6.500000E+4 1.191000E+2,1.218699E+0,-1.800000E+4,6.500000E+4 1.187000E+2,1.218294E+0,-1.800000E+4,6.500000E+4 1.184000E+2,1.217881E+0,-1.800000E+4,6.500000E+4 1.181000E+2,1.217539E+0,-1.800000E+4,6.500000E+4 1.177000E+2,1.217156E+0,-1.800000E+4,6.500000E+4 1.174000E+2,1.216849E+0,-1.800000E+4,6.500000E+4 1.171000E+2,1.216551E+0,-1.800000E+4,6.500000E+4 1.168000E+2,1.216185E+0,-1.800000E+4,6.500000E+4 1.164000E+2,1.215865E+0,-1.800000E+4,6.500000E+4 1.160000E+2,1.215471E+0,-1.800000E+4,6.500000E+4 1.156000E+2,1.215111E+0,-1.800000E+4,6.500000E+4 1.153000E+2,1.214957E+0,-1.800000E+4,6.500000E+4 1.150000E+2,1.214493E+0,-1.800000E+4,6.500000E+4 1.146000E+2,1.213922E+0,-1.800000E+4,6.500000E+4 1.141000E+2,1.213696E+0,-1.800000E+4,6.500000E+4 1.138000E+2,1.213143E+0,-1.800000E+4,6.500000E+4 1.134000E+2,1.212977E+0,-1.800000E+4,6.500000E+4 1.129000E+2,1.212733E+0,-1.800000E+4,6.500000E+4 1.125000E+2,1.212255E+0,-1.800000E+4,6.500000E+4 1.122000E+2,1.211809E+0,-1.800000E+4,6.500000E+4 1.117000E+2,1.211263E+0,-1.800000E+4,6.500000E+4 1.113000E+2,1.210430E+0,-1.800000E+4,6.500000E+4 1.109000E+2,1.209314E+0,-1.800000E+4,6.500000E+4 1.105000E+2,1.208941E+0,-1.800000E+4,6.500000E+4 1.101000E+2,1.208607E+0,-1.800000E+4,6.500000E+4 1.097000E+2,1.207823E+0,-1.800000E+4,6.500000E+4 1.093000E+2,1.207172E+0,-1.800000E+4,6.500000E+4 1.089000E+2,1.203890E+0,-1.800000E+4,6.500000E+4 1.085000E+2,1.203204E+0,-1.800000E+4,6.500000E+4 1.081000E+2,1.202786E+0,-1.800000E+4,6.500000E+4 1.076000E+2,1.202092E+0,-1.800000E+4,6.500000E+4 1.072000E+2,1.201594E+0,-1.800000E+4,6.500000E+4 1.069000E+2,1.200988E+0,-1.800000E+4,6.500000E+4 1.065000E+2,1.200452E+0,-1.800000E+4,6.500000E+4 1.061000E+2,1.199414E+0,-1.800000E+4,6.500000E+4 1.057000E+2,1.198455E+0,-1.800000E+4,6.500000E+4 1.053000E+2,1.195816E+0,-1.800000E+4,6.500000E+4 1.049000E+2,1.198483E+0,-1.800000E+4,6.500000E+4 1.044000E+2,1.198166E+0,-1.800000E+4,6.500000E+4 1.041000E+2,1.197277E+0,-1.800000E+4,6.500000E+4 1.036000E+2,1.196762E+0,-1.800000E+4,6.500000E+4 1.031000E+2,1.195466E+0,-1.800000E+4,6.500000E+4 1.027000E+2,1.194676E+0,-1.800000E+4,6.500000E+4 1.023000E+2,1.194470E+0,-1.800000E+4,6.500000E+4 1.019000E+2,1.194329E+0,-1.800000E+4,6.500000E+4 1.014000E+2,1.193769E+0,-1.800000E+4,6.500000E+4 1.009000E+2,1.193533E+0,-1.800000E+4,6.500000E+4 1.005000E+2,1.193460E+0,-1.800000E+4,6.500000E+4 1.000000E+2,1.190668E+0,-1.800000E+4,6.500000E+4 9.960000E+1,1.190552E+0,-1.800000E+4,6.500000E+4 9.910000E+1,1.190508E+0,-1.800000E+4,6.500000E+4 9.870000E+1,1.190680E+0,-1.800000E+4,6.500000E+4 9.820000E+1,1.190336E+0,-1.800000E+4,6.500000E+4 9.780000E+1,1.190060E+0,-1.800000E+4,6.500000E+4 9.740000E+1,1.190001E+0,-1.800000E+4,6.500000E+4 9.680000E+1,1.189842E+0,-1.800000E+4,6.500000E+4 9.640000E+1,1.189787E+0,-1.800000E+4,6.500000E+4 9.600000E+1,1.189867E+0,-1.800000E+4,6.500000E+4 9.560000E+1,1.189483E+0,-1.800000E+4,6.500000E+4 9.520000E+1,1.189253E+0,-1.800000E+4,6.500000E+4 9.480000E+1,1.189018E+0,-1.800000E+4,6.500000E+4 9.430000E+1,1.189117E+0,-1.800000E+4,6.500000E+4 9.400000E+1,1.188785E+0,-1.800000E+4,6.500000E+4 9.360000E+1,1.188619E+0,-1.800000E+4,6.500000E+4 9.320000E+1,1.188532E+0,-1.800000E+4,6.500000E+4 9.290000E+1,1.188334E+0,-1.800000E+4,6.500000E+4 9.250000E+1,1.188003E+0,-1.800000E+4,6.500000E+4 9.210000E+1,1.187779E+0,-1.800000E+4,6.500000E+4 9.170000E+1,1.187410E+0,-1.800000E+4,6.500000E+4 9.130000E+1,1.187290E+0,-1.800000E+4,6.500000E+4 9.100000E+1,1.187125E+0,-1.800000E+4,6.500000E+4 9.060000E+1,1.186916E+0,-1.800000E+4,6.500000E+4 9.030000E+1,1.186779E+0,-1.800000E+4,6.500000E+4 9.000000E+1,1.186557E+0,-1.800000E+4,6.500000E+4 8.960000E+1,1.186062E+0,-1.800000E+4,6.500000E+4 8.930000E+1,1.185982E+0,-1.800000E+4,6.500000E+4 8.890000E+1,1.185847E+0,-1.800000E+4,6.500000E+4 8.850000E+1,1.185893E+0,-1.800000E+4,6.500000E+4 8.820000E+1,1.185760E+0,-1.800000E+4,6.500000E+4 8.780000E+1,1.185572E+0,-1.800000E+4,6.500000E+4 8.750000E+1,1.185431E+0,-1.800000E+4,6.500000E+4 8.720000E+1,1.185157E+0,-1.800000E+4,6.500000E+4 8.680000E+1,1.185251E+0,-1.800000E+4,6.500000E+4 8.650000E+1,1.184217E+0,-1.800000E+4,6.500000E+4 8.610000E+1,1.182967E+0,-1.800000E+4,6.500000E+4 8.570000E+1,1.182866E+0,-1.800000E+4,6.500000E+4 8.530000E+1,1.182567E+0,-1.800000E+4,6.500000E+4 8.490000E+1,1.182474E+0,-1.800000E+4,6.500000E+4 8.460000E+1,1.182203E+0,-1.800000E+4,6.500000E+4 8.420000E+1,1.182058E+0,-1.800000E+4,6.500000E+4 8.380000E+1,1.181955E+0,-1.800000E+4,6.500000E+4 8.340000E+1,1.181954E+0,-1.800000E+4,6.500000E+4 8.300000E+1,1.181901E+0,-1.800000E+4,6.500000E+4 8.250000E+1,1.181764E+0,-1.800000E+4,6.500000E+4 8.220000E+1,1.181513E+0,-1.800000E+4,6.500000E+4 8.170000E+1,1.181582E+0,-1.800000E+4,6.500000E+4 8.140000E+1,1.181322E+0,-1.800000E+4,6.500000E+4 8.090000E+1,1.180916E+0,-1.800000E+4,6.500000E+4 8.040000E+1,1.180791E+0,-1.800000E+4,6.500000E+4 8.010000E+1,1.180659E+0,-1.800000E+4,6.500000E+4 7.960000E+1,1.180571E+0,-1.800000E+4,6.500000E+4 7.920000E+1,1.180117E+0,-1.800000E+4,6.500000E+4 7.870000E+1,1.179935E+0,-1.800000E+4,6.500000E+4 7.840000E+1,1.179592E+0,-1.800000E+4,6.500000E+4 7.790000E+1,1.179318E+0,-1.800000E+4,6.500000E+4 7.750000E+1,1.179367E+0,-1.800000E+4,6.500000E+4 7.710000E+1,1.179265E+0,-1.800000E+4,6.500000E+4 7.660000E+1,1.179186E+0,-1.800000E+4,6.500000E+4 7.630000E+1,1.178978E+0,-1.800000E+4,6.500000E+4 7.590000E+1,1.178626E+0,-1.800000E+4,6.500000E+4 7.550000E+1,1.178061E+0,-1.800000E+4,6.500000E+4 7.520000E+1,1.177817E+0,-1.800000E+4,6.500000E+4 7.480000E+1,1.177649E+0,-1.800000E+4,6.500000E+4 7.440000E+1,1.177581E+0,-1.800000E+4,6.500000E+4 7.400000E+1,1.177558E+0,-1.800000E+4,6.500000E+4 7.360000E+1,1.177030E+0,-1.800000E+4,6.500000E+4 7.320000E+1,1.177119E+0,-1.800000E+4,6.500000E+4 7.280000E+1,1.176894E+0,-1.800000E+4,6.500000E+4 7.250000E+1,1.177534E+0,-1.800000E+4,6.500000E+4 7.200000E+1,1.196845E+0,-1.800000E+4,6.500000E+4 7.170000E+1,1.198009E+0,-1.800000E+4,6.500000E+4 7.130000E+1,1.197315E+0,-1.800000E+4,6.500000E+4 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